Kuphimba kwa CVD

Zophimba za CVD za Advanced Semiconductor Processing

Zophimba zathu za Chemical Vapor Deposition (CVD) Silicon Carbide (SiC), Tantalum Carbide (TaC), ndi Pyrolytic Carbon (PyC) zomwe zimapangidwa kuti zigwiritsidwe ntchito popanga zinthu zofunika kwambiri, zimapereka mphamvu yolimba kwambiri ya mankhwala, kutentha kwambiri, komanso kuyera kwambiri (<5 ppm). Zopangidwa kuti ziteteze graphite yoyera kwambiri ndi zinthu zadothi kuchokera ku plasma yoopsa, mpweya wochita zinthu mwachangu, komanso kutentha kwambiri, zophimba zathu zapamwamba zimachepetsa kupanga tinthu tating'onoting'ono ndikuwonjezera nthawi ya moyo wa zinthuzo muSilicon/SiC Epitaxy, MOCVD, Plasma Etching, ndi Monocrystal Growthmapulogalamu.

Kuyera Kwambiri (<5 ppm)

Zonyansa zochepa zachitsulo zomwe zatsimikiziridwa ndi GDMS kuti zisawonongedwe ndi wafer muzochitika zofunika kwambiri.

Kukana Kwambiri kwa Plasma ndi Gasi

Kapangidwe ka kristalo kolimba kamateteza ku plasma ya halogen (CF₄, NF₃, Cl₂) ndi mpweya wowononga.

Kufananiza Kutentha Koyenera

Kuwongolera kolimba kwa CTE kumachotsa kusweka kwa micro-cracking ndi kupaka utoto pansi pa kutentha kwakukulu.

Mtundu Wokutira	Ubwino Waukulu Waukadaulo	Kugwiritsa Ntchito Njira Yoyambira
Kuphimba kwa CVD SiC	Kutentha kwambiri, kukana kukokoloka kwa plasma bwino	Dry Etch, Si Epitaxy, MOCVD, Kukula kwa Crystal
Chophimba cha CVD TaC	Kukana kutentha kwambiri (>2000°C), chotchinga cha dzimbiri cha H₂/SiH₄	Kukula kwa SiC Epitaxy, Single-Crystal SiC PVT
Kuphimba kwa PyC	Kutseka mpweya wa hermetic, pamwamba pa kaboni wa anisotropic wosalala kwambiri	Kutentha kwa munda, CZ Monocrystalline Silicon