TaC Coated Graphite mphete

VET Energy imayang'ana kwambiri pa R&D ndikupanga mphete za graphite za CVD tantalum carbide (TaC), ndipo yadzipereka kupereka mayankho azinthu zomwe zimatha kugulidwa pamafakitale a semiconductor, photovoltaic ndi kutentha kwambiri. Ukadaulo wathu wodziyimira pawokha wopangidwa ndi mankhwala opangidwa ndi mpweya (CVD) umapanga zokutira wandiweyani komanso yunifolomu ya tantalum carbide pamwamba pa gawo lapansi la graphite kudzera m'njira zolondola, kuwongolera kwambiri kutentha kwazinthu (> 3000 ℃), kukana dzimbiri ndi kukana kutenthedwa kwamafuta, kukulitsa moyo wautumiki ndi nthawi zopitilira 3, ndikuchepetsa makasitomala ndalama zonse.

Ubwino wathu mwaukadaulo:
1. Kutentha kwakukulu kwa okosijeni kukana
Mumlengalenga wa 1200 ℃, kuchuluka kwa okosijeni kumawonjezera kulemera ndi ≤0.05mg/cm²/h, yomwe ndi yopitilira 3 kukana kukana kwa okosijeni wa graphite wamba, ndipo ndi yoyenera pamayendedwe ozizirira pafupipafupi.
2. Kukana kusungunuka kwa silicon / dzimbiri lachitsulo
Kupaka kwa TaC ndikosavuta kwambiri kuzitsulo monga silicon yamadzimadzi (1600 ℃), aluminiyamu wosungunuka / mkuwa, ndi zina zotero, kupewa kulephera kwapangidwe kwa mphete zachikhalidwe chifukwa cha kulowa kwachitsulo, makamaka koyenera kwa ma semiconductors amagetsi ndi kupanga zida zam'mibadwo yachitatu.
3. Ultra-otsika tinthu kuipitsidwa
Njira ya CVD imakwaniritsa kachulukidwe zokutira > 99.5% ndi roughness pamwamba pa Ra≤0.2μm, kuchepetsa chiopsezo kukhetsa tinthu kuchokera gwero ndi kukwaniritsa zoukhondo zofunika ukhondo 12 inchi wafer manufacturin.
4. Kuwongolera kukula kolondola
Kutengera makina olondola a CNC, kulolerana kwa gawo lapansi la graphite ndi ± 0.01mm, ndipo mapindikidwe onse atapaka ndi <± 5μm, omwe ndi oyenera kuyika m'zipinda za zida zolondola kwambiri.