Bwato la Quartz Loyera Kwambiri Lopangira Ma Wafer

Bwato la Quartz Waferndi chida chofunikira kwambiri chonyamulira zinthu zomwe zimagwiritsidwa ntchito popanga ma semiconductor, kupanga ma cell a photovoltaic ndi kafukufuku wapamwamba wazinthu, chopangidwira kusamutsa ma wafer mokhazikika ndikuwayika pamalo otentha kwambiri. Chogulitsachi chimapangidwa ndi silica yosungunuka bwino kwambiri (SiO2), yokhala ndi kukana kutentha kwambiri, kukhazikika kwa mankhwala komanso mawonekedwe otsika kwambiri achitsulo, yoyenera kufalikira kwa ng'anjo, ng'anjo ya okosijeni, PECVD/LPCVD ndi zida zina, zomwe zimagwiritsidwa ntchito kwambiri pakuphimba ma wafer, kuyika ma ion, kuyika ma ion kutentha kwambiri ndi njira zina zapakati.

Ubwino Waukulu wa Boti la Quartz la VET Energy:

• Zipangizo zoyera kwambiri
  Kuyera ≥99.99%: Kuchuluka kwa zodetsa (Na, K, Fe, ndi zina zotero) <5ppm, kupewa kuipitsidwa kwa wafer ndikutsimikizira kuchuluka kwa chip.
  Kuchepa kwa mvula ndi kulowetsedwa kwa madzi: pamwamba pake pali kupukutidwa kwambiri (Ra≤0.4μm) kuti tinthu timene timakhala tolimba komanso tinthu ta mpweya tichepetse.
• Kukhazikika kwa kutentha kwambiri
  Malire a kutentha: Kutentha kwa nthawi yayitali kwa 1100℃, pachimake cha nthawi yochepa cha 1300℃, palibe kusintha, palibe mvula ya kristalo.
  Kuchuluka kwa kutentha kochepa (5.5x10-7/℃), kukana kutentha kwambiri, komwe kumasintha kutentha kukakwera ndi kugwa mwachangu (monga RTP rapid annealing).
• Kapangidwe kolondola ka nyumba
  Kulondola kwa malo ± 0.1mm: kufananiza ma wafer a 2”mpaka 12”, cholakwika cha mtunda pakati pa ma wafer ndi <0.05mm, kuonetsetsa kuti ma wafer alibe choletsa.
  Kulemera kwakukulu: Kulemera kwakukulu kwa ma wafer 50 (malinga ndi ma wafer 12”) m'boti limodzi, kuthandizira kusamutsa kokhazikika kwa ma wafer owonda (≥100um).
• Kulephera kwa mankhwala
  Kukana dzimbiri: Kukana asidi (kupatula HF), dzimbiri la alkali ndi organic solvent, kumagwirizana ndi njira yoyeretsera ya CMP.
  Kulimba kwa mpweya kwabwino kwambiri: Kuchuluka kwa mpweya wotuluka <5x10-10 Pa.m3/s, koyenera malo osungira mpweya wotuluka mpweya komanso malo oteteza mpweya.
• Moyo wautali ndi kukhazikika
  Moyo woyembekezera ≥ ma cycle 5000 (ntchito yabwinobwino), pamwamba pake pakhoza kutsukidwa ndikugwiritsidwa ntchito mobwerezabwereza, kuchepetsa mtengo wonse.
  Kapangidwe ka modular: kamathandizira kusintha pang'ono (monga dzino la boti limodzi), kuchepetsa nthawi yogwira ntchito.

Timapereka malo owonekera komanso oundana malinga ndi zosowa za makasitomala:

Ningbo VET Energy Technology Co., Ltd ndi kampani yapamwamba kwambiri yomwe imayang'ana kwambiri pakupanga ndi kugulitsa zipangizo zapamwamba kwambiri, zipangizo ndi ukadaulo kuphatikizapo graphite, silicon carbide, ziwiya zadothi, mankhwala a pamwamba monga SiC ❖ kuyanika, TaC ❖ kuyanika, galasi carbon ❖ kuyanika, pyrolytic carbon ❖ kuyanika, ndi zina zotero, zinthuzi zimagwiritsidwa ntchito kwambiri mu photovoltaic, semiconductor, new energy, metallurgy, etc.

Gulu lathu laukadaulo limachokera ku mabungwe apamwamba ofufuza mdziko muno, ndipo lapanga ukadaulo wambiri wokhala ndi patent kuti zitsimikizire kuti malonda amagwira ntchito bwino komanso kuti ndi abwino, lingathenso kupatsa makasitomala mayankho aukadaulo.