Ngā Paninga CVD mō te Tukatuka Ārahi Matatau

I hangaia mō ngā taiao hanga haurua-haurua nui, ko ā mātou paninga Whakatakotoranga Matū Vapor Deposition (CVD) Silicon Carbide (SiC), Tantalum Carbide (TaC), me te Pyrolytic Carbon (PyC) e tuku ana i te koretake matū tino pai, te pumau wera nui, me te tino parakore (< 5 ppm). I hangaia hei tiaki i ngā papa graphite me ngā papa uku tino parakore mai i te plasma kaha, ngā hau tukanga tauhohe, me te huringa wera nui, ka whakaitihia e ā mātou paninga matatau te whakaputanga matūriki me te whakaroa i te roa o te oranga o ngā wāhanga i roto i.Te Epitaxy Silicon/SiC, te MOCVD, te Whakairo Plasma, me te Tipu Kotahi-kiriatangā tono.