SiC Coated Barrel Susceptor Mwamakonda

Mgolo susceptorndi gawo lalikulu mu semiconductor epitaxial kukula njira monga MOCVD, MBE, CVD. Amagwiritsidwa ntchito kwambiri kunyamula zowotcha m'zipinda zomwe zimatentha kwambiri ndikupatsanso malo otenthetsera komanso okhazikika kuti atsimikizire kuyika bwino kwa zigawo za epitaxial (monga GaN, SiC, etc.). Ntchito yake yayikulu ndikukwaniritsa kutentha kwapamwamba kwambiri kwa kutentha kwapamtunda kudzera muulamuliro wokhazikika wamafuta, potero kuonetsetsa makulidwe, kuchuluka kwa ma doping, komanso mawonekedwe a kristalo amafilimu oonda a epitaxial.

Timagwiritsa ntchito ukadaulo wathu wapatent kupangambiya susceptoryokhala ndi chiyero chapamwamba kwambiri, ❖ kuyanika kwabwino komanso moyo wabwino kwambiri wautumiki, komanso kukana kwamphamvu kwamankhwala komanso kukhazikika kwamafuta.

VET Energy imagwiritsa ntchito graphite yoyera kwambiri yokhala ndi zokutira za CVD-SiC kuti zithandizire kukhazikika kwamankhwala:

1. Kuyeretsa kwakukulu kwa graphite zakuthupi
High matenthedwe madutsidwe: matenthedwe madutsidwe wa graphite ndi katatu kuposa silicon, amene mofulumira kusamutsa kutentha gwero Kutentha gwero lopyapyala ndi kufupikitsa Kutentha nthawi.
Zimango mphamvu: Isostatic kuthamanga graphite kachulukidwe ≥ 1.85 g/cm ³, wokhoza kupirira kutentha pamwamba 1200 ℃ popanda mapindikidwe.

2. Kupaka kwa CVD SiC
A β - SiC wosanjikiza amapangidwa pamwamba pa graphite ndi mankhwala nthunzi mafunsidwe (CVD), ndi chiyero cha ≥ 99.99995%, yunifolomu cholakwika ❖ kuyanika makulidwe ndi zosakwana ± 5%, ndipo pamwamba roughness ndi zosakwana Ra0.5um.

3. Kuwongolera magwiridwe antchito:
Kukana kwa dzimbiri: Kumatha kupirira mpweya wambiri wowononga monga Cl2, HCl, ndi zina zotero, zimatha kukulitsa moyo wa GaN epitaxy katatu m'malo a NH3.
Kukhazikika kwamafuta: The coefficient of thermal expansion (4.5 × 10-6/℃) imagwirizana ndi graphite kupewa kupaka utoto chifukwa cha kusinthasintha kwa kutentha.
Kuuma ndi Kuvala Kukaniza: Kuuma kwa Vickers kumafika ku 28 GPa, komwe kuli kokwera ka 10 kuposa graphite ndipo kungachepetse chiopsezo cha zokopa za wafer.