Silicon Carbide Coated Wafer Susceptor Disc

Tsananguro pfupi:

VET Energy silicon carbide coated wafer susceptor disc chigadzirwa chine simba guru chakagadzirirwa kupa mashandiro akasimba uye akavimbika kwenguva yakareba. Chine simba rakanaka kwazvo rekudzivirira kupisa uye kufanana kwekupisa, kuchena kwakanyanya, uye kuramba kukurwa kwevhu, zvichiita kuti ive mhinduro yakakwana yekugadzirisa wafer.

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Silicon Carbide Wafer Disc chinhu chakakosha chinoshandiswa mukugadzira ma semiconductor akasiyana-siyana. Tinoshandisa tekinoroji yedu ine patent kuti silicon carbide ive yakachengeteka ine kuchena kwakanyanya, kufanana kwakanaka uye hupenyu hwakanaka hwebasa, pamwe nekudzivirira makemikari zvakanyanya uye hunhu hwekugadzikana kwekupisa.

VET Energy ndiyo kambani chaiyo inogadzira zvigadzirwa zve graphite ne silicon carbide zvakagadzirwa ne SiC, TaC, pyrolytic carbon, glassy-carbon, nezvimwewo, inogona kupa zvikamu zvakasiyana-siyana zvakagadzirwa ne semiconductor ne photovoltaic industry. Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.

Tinogara tichigadzira maitiro epamusoro-soro kuti tipe zvinhu zvepamusoro-soro, uye takagadzira tekinoroji yakasarudzika ine patent, iyo inogona kuita kuti kubatana pakati pe coating ne substrate kuve kwakasimba uye kusanyanya kupatsanurwa.

FMitemo yezvigadzirwa zvedu:

1. Kudzivirira kupisa kwakanyanya kwe oxidation kusvika 1700℃.
2. Kuchena kwakanyanya uyekufanana kwekupisa
3. Kudzivirira ngura kwakanyanya: acid, alkali, munyu uye organic reagents.
4. Kuoma kwakanyanya, pamusoro pakaoma, zvidimbu zvitete.
5. Hupenyu hwebasa hwakareba uye hwakasimba

CVD SiC薄膜基本物理性能 Hunhu hweCVD SiCkuputira
性质 / Pfuma	典型数值 / Kukosha Kwakajairika
晶体结构 / Chimiro cheKristaro	Chikamu cheFCC β多晶，主要為（111）取向
密度 / Kuwanda kwehuwandu	3.21 g/cm³
硬度 / Kuomarara	2500 维氏硬度 (500g mutoro)
晶粒大小 / Saizi yeZviyo	2 ~ 10μm
纯度 / Kuchena kwemakemikari	99.99995%
热容 / Kugona Kupisa	640 J·kg^-1·K^-1
升华温度 / Kupisa kweSublimation	2700℃
抗弯强度 / Simba reKuchinjika	415 MPa RT ine mapoinzi mana
杨氏模量 / Modulus yeVadiki	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalKufambisa kwemhepo	300W·m^-1·K^-1
热膨胀系数 / Kuwedzera kweThermal (CTE)	4.5×10^-6K^-1