ʻO CVD (Chemical Vapor Deposition) kahi hana maʻamau no ka hoʻomākaukau ʻana i nā uhi silicon carbide.Nā uhi ʻana o ka silicon carbide CVDhe nui nā ʻano hana kūikawā. E hoʻolauna kēia ʻatikala i ke ʻano hoʻomākaukau o ka uhi ʻana o ka CVD silicon carbide a me kāna mau ʻano hana.
1. Ke ʻano hoʻomākaukau oʻO ka uhi ʻana o ka silicon carbide CVD
Hoʻololi ke ʻano CVD i nā mea hoʻomaka kinoea i nā uhi silicon carbide paʻa ma lalo o nā kūlana mahana kiʻekiʻe. Wahi a nā mea hoʻomaka kinoea like ʻole, hiki ke hoʻokaʻawale ʻia i ka CVD pae kinoea a me ka CVD pae wai.
1. Ka pae mahu CVD
Hoʻohana ka CVD pae mahu i nā mea mua o ke kinoea, ʻo ia hoʻi nā hui organosilicon, e hoʻokō i ka ulu ʻana o nā kiʻiʻoniʻoni silicon carbide. ʻO nā hui organosilicon i hoʻohana pinepine ʻia e komo pū me ka methylsilane, dimethylsilane, monosilane, a me nā mea ʻē aʻe, e hana ana i nā kiʻiʻoniʻoni silicon carbide ma nā substrates metala ma ka lawe ʻana i nā mea mua o ke kinoea i loko o nā keʻena hana wela kiʻekiʻe. Hoʻoulu pinepine ʻia nā wahi wela kiʻekiʻe i loko o ke keʻena hana e ka hoʻomehana induction a i ʻole ka hoʻomehana resistive.
2. CVD pae wai
Hoʻohana ka CVD pae wai i kahi mea hoʻomākaukau wai, ʻo ia hoʻi kahi mea hoʻoheheʻe organik i loaʻa ka silicon a me kahi hui silanol, kahi i hoʻomehana ʻia a hoʻoheheʻe ʻia i loko o kahi keʻena hopena, a laila hoʻokumu ʻia kahi kiʻiʻoniʻoni silicon carbide ma luna o ka substrate ma o kahi hopena kemika.
2. Nā ʻano hana oʻO ka uhi ʻana o ka silicon carbide CVD
1. Hana maikaʻi loa i ka mahana kiʻekiʻe
Nā uhi ʻana o ka silicon carbide CVDhāʻawi i ke kūpaʻa wela kiʻekiʻe maikaʻi loa a me ke kūpaʻa oxidation. Hiki iā ia ke hana ma nā wahi wela kiʻekiʻe a hiki ke kū i nā kūlana koʻikoʻi ma nā mahana kiʻekiʻe.
2. Nā waiwai mechanical maikaʻi
ʻO ka uhi ʻana o ka silicon carbide CVDhe paʻakikī kiʻekiʻe a he kūpaʻa maikaʻi hoʻi i ka ʻaʻahu. Mālama ia i nā mea hao mai ka ʻaʻahu a me ka pala, e hoʻolōʻihi ana i ke ola lawelawe o ka mea.
3. Kūlana kemika maikaʻi loa
Nā uhi ʻana o ka silicon carbide CVDhe kūpaʻa loa ia i nā kemika maʻamau e like me nā waikawa, alkalis a me nā paʻakai. Kūʻē ia i ka hoʻouka kaua kemika a me ka pala o ka substrate.
4. Ka helu haʻahaʻa haʻalulu
ʻO ka uhi ʻana o ka silicon carbide CVDhe haʻahaʻa ka coefficient friction a me nā waiwai lubricating ponoʻī maikaʻi. Hoʻemi ia i ka friction a me ke komo ʻana a hoʻomaikaʻi i ka pono o ka hoʻohana ʻana i nā mea.
5. Hoʻokele wela maikaʻi
He maikaʻi nā waiwai hoʻokele wela o ka uhi ʻana o ka silicon carbide CVD. Hiki iā ia ke hoʻokele koke i ka wela a hoʻomaikaʻi i ka pono o ka hoʻoheheʻe wela o ke kumu metala.
6. Nā waiwai hoʻokaʻawale uila maikaʻi loa
He maikaʻi nā waiwai insulation uila o ka uhi ʻana o ka CVD silicon carbide a hiki ke pale i ka liki ʻana o ke au. Hoʻohana nui ʻia ia i ka pale insulation o nā mea uila.
7. Mānoanoa a me ka haku mele hiki ke hoʻololi ʻia
Ma ka kaohi ʻana i nā kūlana i ka wā o ke kaʻina hana CVD a me ka nui o ka precursor, hiki ke hoʻololi ʻia ka mānoanoa a me ka haku mele ʻana o ke kiʻiʻoniʻoni silicon carbide. Hāʻawi kēia i nā koho he nui a me ka maʻalahi no nā ʻano hana like ʻole.
I ka pōkole, loaʻa i ka uhi ʻana o CVD silicon carbide ka hana wela kiʻekiʻe maikaʻi loa, nā waiwai mechanical maikaʻi loa, ke kūpaʻa kemika maikaʻi, ka coefficient friction haʻahaʻa, ka conductivity thermal maikaʻi a me nā waiwai insulation uila. ʻO kēia mau waiwai e hoʻohana nui ʻia ai nā uhi ʻana o CVD silicon carbide ma nā ʻano he nui, me nā mea uila, optics, aerospace, ʻoihana kemika, a pēlā aku.
Ka manawa hoʻouna: Malaki-20-2024