I-CVD (iChemical Vapor Deposition) yindlela esetyenziswa kakhulu ekulungiseleleni ii-silicon carbide coatings.Iingubo ze-CVD silicon carbidezineempawu ezininzi zokusebenza ezizodwa. Eli nqaku liza kwazisa indlela yokulungiselela i-CVD silicon carbide coating kunye neempawu zayo zokusebenza.
1. Indlela yokulungiselelaUgqubuthelo lwe-CVD silicon carbide
Indlela ye-CVD iguqula ii-gaseous precursors zibe zii-silicon carbide coating eziqinileyo phantsi kweemeko zobushushu obuphezulu. Ngokwee-gaseous precursors ezahlukeneyo, inokwahlulwahlulwa ibe yi-gas phase CVD kunye ne-liquid phase CVD.
1. Isigaba se-CVD somphunga
Isigaba somphunga i-CVD sisebenzisa ii-gaseous precursors, ezidla ngokuba zii-organosilicon compounds, ukufezekisa ukukhula kweefilimu ze-silicon carbide. Ii-organosilicon compounds ezisetyenziswa rhoqo ziquka i-methylsilane, i-dimethylsilane, i-monosilane, njl.njl., ezenza iifilimu ze-silicon carbide kwi-metal substrates ngokuthutha ii-gaseous precursors kwiigumbi zokusabela ezinobushushu obuphezulu. Iindawo ezinobushushu obuphezulu kwigumbi lokusabela zihlala ziveliswa kukufudumeza okwenziwa okanye ukufudumeza okuthintelayo.
2. I-CVD yesigaba solwelo
I-CVD yesigaba solwelo isebenzisa i-liquid precursor, idla ngokuba yi-organic solvent equlethe i-silicon kunye ne-silanol compound, efudunyezwa ize ifuthwe kwigumbi lokusabela, ize emva koko kwenziwe ifilimu ye-silicon carbide kwi-substrate nge-chemical reaction.
2. Iimpawu zokusebenza kweUgqubuthelo lwe-CVD silicon carbide
1. Ukusebenza kakuhle kobushushu obuphezulu
Iingubo ze-CVD silicon carbideIbonelela ngozinzo oluhle kakhulu kubushushu obuphezulu kunye nokumelana ne-oxidation. Iyakwazi ukusebenza kwiindawo ezinobushushu obuphezulu kwaye inokumelana neemeko eziqatha kakhulu kubushushu obuphezulu.
2.Iipropati ezilungileyo zoomatshini
Ugqubuthelo lwe-CVD silicon carbideinobunzima obuphezulu kwaye iyamelana nokuguguleka kakuhle. Ikhusela izinto zesinyithi ekugugulekeni nasekuboleni, yandisa ubomi benkonzo yesixhobo.
3. Uzinzo oluhle kakhulu lweekhemikhali
Iingubo ze-CVD silicon carbideZimelana kakhulu neekhemikhali eziqhelekileyo ezifana nee-asidi, ii-alkali kunye neetyuwa. Zimelana nokuhlaselwa ziikhemikhali kunye nokugqwala kwe-substrate.
4. I-coefficient ephantsi yokungqubana
Ugqubuthelo lwe-CVD silicon carbideinomlinganiselo ophantsi wokungqubana kunye neempawu ezilungileyo zokuzithambisa. Inciphisa ukungqubana kunye nokuguguleka kwaye iphucula ukusebenza kakuhle kokusetyenziswa kwezinto.
5.Ukuqhuba kakuhle kobushushu
I-CVD silicon carbide coating ineempawu ezilungileyo zokuqhuba ubushushu. Ingaqhuba ubushushu ngokukhawuleza kwaye iphucule ukusebenza kakuhle kokusasazwa kobushushu kwesiseko sesinyithi.
6. Iipropati zokukhusela umbane ezigqwesileyo
I-CVD silicon carbide coating ineempawu ezilungileyo zokukhusela umbane kwaye inokuthintela ukuvuza kombane. Isetyenziswa kakhulu ekukhuseleni ukhuseleko lwezixhobo ze-elektroniki.
7. Ubukhulu kunye nokwakheka okulungisekayo
Ngokulawula iimeko ngexesha lenkqubo ye-CVD kunye noxinzelelo lwe-precursor, ubukhulu kunye nokwakheka kwefilimu ye-silicon carbide kunokulungiswa. Oku kubonelela ngeendlela ezininzi kunye nokuguquguquka kwiindlela ezahlukeneyo zokusebenza.
Ngamafutshane, i-CVD silicon carbide coating inokusebenza kakuhle kakhulu kubushushu obuphezulu, iipropati ezibalaseleyo zoomatshini, uzinzo oluhle lweekhemikhali, i-coefficient ephantsi yokungqubana, i-thermal conductivity elungileyo kunye neepropati zokufakelwa kombane. Ezi mpawu zenza i-CVD silicon carbide coatings zisetyenziswe kakhulu kwiindawo ezininzi, kubandakanya i-electronics, i-optics, i-aerospace, imboni yeekhemikhali, njl.
Ixesha leposi: Matshi-20-2024