CVD (Chemical Vapor Deposition) ke mokhoa o sebelisoang haholo bakeng sa ho lokisa lipente tsa silicon carbide.Liaparo tsa CVD silicon carbideli na le litšobotsi tse ngata tse ikhethang tsa ts'ebetso. Sengoloa sena se tla hlahisa mokhoa oa ho lokisa seaparo sa CVD silicon carbide le litšobotsi tsa sona tsa ts'ebetso.
1. Mokhoa oa ho lokisaSeaparo sa CVD silicon carbide
Mokhoa oa CVD o fetola li-precursor tsa khase hore e be li-coat tse tiileng tsa silicon carbide tlas'a maemo a mocheso o phahameng. Ho ea ka li-precursor tse fapaneng tsa khase, e ka aroloa ka CVD ea khase le CVD ea mokelikeli.
1. CVD ea mouoane
Mokhahlelo oa mouoane CVD e sebelisa li-precursors tsa khase, hangata metsoako ea organosilicon, ho fihlela kholo ea lifilimi tsa silicon carbide. Metsoako ea organosilicon e sebelisoang hangata e kenyelletsa methylsilane, dimethylsilane, monosilane, jj., tse etsang lifilimi tsa silicon carbide holim'a li-substrate tsa tšepe ka ho tsamaisa li-precursors tsa khase ho ea likamoreng tsa karabelo ea mocheso o phahameng. Libaka tsa mocheso o phahameng ka kamoreng ea karabelo hangata li hlahisoa ke ho futhumatsa ha induction kapa ho futhumatsa ho thibelang.
2. CVD ea karolo ea metsi
CVD ea mokelikeli e sebelisa selelekela sa mokelikeli, hangata e leng solvent ea tlhaho e nang le silicon le motsoako oa silanol, o futhumatsoang le ho belisoa ka mouoane ka kamoreng ea karabelo, ebe filimi ea silicon carbide e thehoa holim'a substrate ka karabelo ea lik'hemik'hale.
2. Litšobotsi tsa tshebetso tsaSeaparo sa CVD silicon carbide
1.Tshebetso e ntle haholo ea mocheso o phahameng
Liaparo tsa CVD silicon carbideE fana ka botsitso bo botle ba mocheso o phahameng le ho hanyetsa oxidation. E khona ho sebetsa libakeng tse mocheso o phahameng mme e ka mamella maemo a feteletseng mochesong o phahameng.
2. Thepa e ntle ea mechini
Seaparo sa CVD silicon carbideE na le bothata bo phahameng le ho hanyetsa ho tsofala hantle. E sireletsa di-substrate tsa tshepe ho tsofala le ho bola, e eketsa nako ya tshebeletso ya thepa.
3. Botsitso bo botle ba lik'hemik'hale
Liaparo tsa CVD silicon carbideli hanela lik'hemik'hale tse tloaelehileng tse kang li-acid, li-alkali le letsoai haholo. Li hanela tlhaselo ea lik'hemik'hale le ho bola ha substrate.
4. Koefficient e tlase ea khohlano
Seaparo sa CVD silicon carbideE na le tekanyo e tlase ea khohlano le thepa e ntle ea ho itlotsa. E fokotsa khohlano le ho tsofala 'me e ntlafatsa katleho ea tšebeliso ea thepa.
5.Mokhoa o motle oa ho khanna mocheso
Sekoahelo sa CVD silicon carbide se na le thepa e ntle ea ho tsamaisa mocheso. Se ka tsamaisa mocheso kapele le ho ntlafatsa bokhoni ba ho qhala mocheso ba motheo oa tšepe.
6. Thepa e ntle ea ho thibela motlakase
Sekoahelo sa CVD silicon carbide se na le thepa e ntle ea ho thibela ho bola ha motlakase 'me se ka thibela ho lutla ha motlakase. Se sebelisoa haholo ho sireletsa ho bola ha lisebelisoa tsa elektroniki.
7. Botenya le sebopeho se fetolehang
Ka ho laola maemo nakong ea ts'ebetso ea CVD le ho tsepamisa mohopolo ha selelekela, botenya le sebopeho sa filimi ea silicon carbide li ka fetoloa. Sena se fana ka likhetho tse ngata le ho tenyetseha bakeng sa lits'ebetso tse fapaneng.
Ka bokhutšoanyane, seaparo sa CVD silicon carbide se na le ts'ebetso e ntle haholo ea mocheso o phahameng, thepa e ntle ea mechini, botsitso bo botle ba lik'hemik'hale, coefficient e tlase ea khohlano, conductivity e ntle ea mocheso le thepa ea ho thibela motlakase. Thepa ena e etsa hore seaparo sa CVD silicon carbide se sebelisoe haholo masimong a mangata, ho kenyeletsoa lisebelisoa tsa elektroniki, optics, aerospace, indasteri ea lik'hemik'hale, jj.
Nako ea poso: Hlakubele-20-2024