I-CVD (Chemical Vapor Deposition) iyindlela evame ukusetshenziswa ekulungiseleleni izembozo ze-silicon carbide.Izembozo ze-CVD silicon carbidebanezimpawu eziningi zokusebenza ezihlukile. Lesi sihloko sizokwethula indlela yokulungiselela i-CVD silicon carbide coating kanye nezici zayo zokusebenza.
1. Indlela yokulungiselelaUkugqoka kwe-CVD silicon carbide
Indlela ye-CVD iguqula izandulela zegesi zibe yizimbozo ze-silicon carbide eziqinile ngaphansi kwezimo zokushisa okuphezulu. Ngokusho kwezandulela zegesi ezahlukene, ingahlukaniswa ibe yi-gas phase CVD kanye ne-liquid phase CVD.
1. Isigaba se-CVD somusi
Isigaba somswakama i-CVD sisebenzisa izandulela zegesi, ngokuvamile ama-organosilicon compounds, ukuze kufezwe ukukhula kwamafilimu e-silicon carbide. Ama-organosilicon compounds asetshenziswa kakhulu afaka i-methylsilane, i-dimethylsilane, i-monosilane, njll., akha amafilimu e-silicon carbide kuma-substrates ensimbi ngokuthutha ama-gaseous precursors aye emakamelweni okusabela okushisa okuphezulu. Izindawo zokushisa okuphezulu ekamelweni lokusabela zivame ukukhiqizwa ngokushisa okufakwayo noma ukushisa okuvimbelayo.
2. I-CVD yesigaba soketshezi
I-CVD yesigaba soketshezi isebenzisa isandulela soketshezi, ngokuvamile isinyibilikisi se-organic esiqukethe i-silicon kanye ne-silanol compound, esifudunyezwa futhi sishiswe ekamelweni lokusabela, bese kwakheka ifilimu ye-silicon carbide phezu kwe-substrate ngokusebenzisa ukusabela kwamakhemikhali.
2. Izici zokusebenza zeUkugqoka kwe-CVD silicon carbide
1. Ukusebenza okuhle kakhulu kokushisa okuphezulu
Izembozo ze-CVD silicon carbideinikeza ukuzinza okuhle kakhulu ekushiseni okuphezulu kanye nokumelana nokushiswa kwe-oxidation. Iyakwazi ukusebenza ezindaweni ezinokushisa okuphezulu futhi ingamelana nezimo ezimbi kakhulu emazingeni okushisa aphezulu.
2. Izakhiwo ezinhle zemishini
Ukugqoka kwe-CVD silicon carbideinobulukhuni obuphezulu kanye nokumelana okuhle nokuguguleka. Ivikela izinsimbi zensimbi ekugugulekeni nasekugqwaleni, yandisa impilo yenkonzo yezinto.
3. Ukuqina kwamakhemikhali okuhle kakhulu
Izembozo ze-CVD silicon carbideamelana kakhulu namakhemikhali avamile njenge-asidi, ama-alkali kanye nosawoti. Amelana nokuhlaselwa ngamakhemikhali kanye nokugqwala kwe-substrate.
4. Isilinganiso sokungqubuzana okuphansi
Ukugqoka kwe-CVD silicon carbideine-coefficient ephansi yokungqubuzana kanye nezakhiwo ezinhle zokuzigcoba. Inciphisa ukungqubuzana nokuguguleka futhi ithuthukisa ukusebenza kahle kokusetshenziswa kwezinto.
5.Ukuqhuba kahle kokushisa okuhle
I-CVD silicon carbide coating inezakhiwo ezinhle zokuqhuba ukushisa. Ingakwazi ukuhambisa ukushisa ngokushesha futhi ithuthukise ukusebenza kahle kokushabalalisa ukushisa kwesisekelo sensimbi.
6. Izakhiwo ezinhle kakhulu zokufakelwa kukagesi
I-CVD silicon carbide coating inezakhiwo ezinhle zokuvikela ugesi futhi ingavimbela ukuvuza kwamanje. Isetshenziswa kabanzi ekuvikeleni ukuvikela ukuvikela ugesi kumadivayisi kagesi.
7. Ubukhulu nokwakheka okulungisekayo
Ngokulawula izimo ngesikhathi senqubo ye-CVD kanye nokuhlushwa kwe-precursor, ukujiya kanye nokwakheka kwefilimu ye-silicon carbide kungalungiswa. Lokhu kunikeza izinketho eziningi kanye nokuguquguquka kwezinhlelo zokusebenza ezahlukahlukene.
Ngamafuphi, i-CVD silicon carbide coating inokusebenza okuhle kakhulu kokushisa okuphezulu, izakhiwo ezinhle kakhulu zemishini, ukuzinza okuhle kwamakhemikhali, i-coefficient ephansi yokushayisana, i-thermal conductivity enhle kanye nezakhiwo zokushisa zikagesi. Lezi zakhiwo zenza i-CVD silicon carbide coating isetshenziswe kabanzi emikhakheni eminingi, kufaka phakathi i-electronics, i-optics, i-aerospace, imboni yamakhemikhali, njll.
Isikhathi sokuthunyelwe: Mashi-20-2024