Igwe ọkụ kristal bụ isi ihe eji eme yasilicon carbideuto kristal. O yiri ọkụ kristal nke kristal nke ọdịnala. Ọdịdị ọkụ ahụ adịghị oke mgbagwoju anya. Ọ bụ isi ihe mejupụtara ya bụ ahụ ọkụ, sistemụ kpo oku, usoro nnyefe coil, sistemụ nnweta na nha vacuum, sistemụ ụzọ gas, sistemụ oyi, sistemụ njikwa, wdg. Ọnọdụ okpomọkụ na usoro na-ekpebi ihe ngosi dị mkpa nkekristal silicon carbidedị ka àgwà, nha, njikwa na ihe ndị ọzọ.
N'otu aka, okpomọkụ n'oge uto nkekristal silicon carbidedị oke elu ma enweghị ike inyocha ya. Ya mere, isi ihe isi ike dị na usoro ahụ n'onwe ya. Isi ihe isi ike ndị a bụ ndị a:
(1) Isi ike na njikwa ikuku okpomọkụ:
Nleba anya nke oghere okpomọkụ dị elu mechiri emechi siri ike ma ghara ịchịkwa ya. N'adịghị ka ihe ngwọta ọdịnala nke dabere na silicon, nke nwere ngwa mmepe kristal ozugbo, nke nwere oke akpaaka na usoro uto kristal a na-ahụ anya ma na-achịkwa, kristal silicon carbide na-eto n'ime oghere mechiri emechi n'ebe okpomọkụ dị elu karịa 2,000℃, a kwesịkwara ijikwa okpomọkụ uto ahụ nke ọma n'oge mmepụta, nke na-eme ka njikwa okpomọkụ sie ike;
(2) Isi ike n'ịchịkwa ụdị kristal:
Micropipes, polymorphic inclusions, dislocations na ntụpọ ndị ọzọ na-adịkarị mfe ime n'oge uto, ha na-emetụta ma na-agbanwe ibe ha. Micropipes (MP) bụ ntụpọ site na ụdị nke nwere nha nke ọtụtụ microns ruo iri microns, nke bụ nnukwu ntụpọ nke ngwaọrụ. Silicon carbide otu kristal nwere ihe karịrị ụdị kristal 200 dị iche iche, mana naanị obere nhazi kristal (ụdị 4H) bụ ihe semiconductor achọrọ maka mmepụta. Mgbanwe ụdị kristal dị mfe ime n'oge uto, na-ebute ntụpọ itinye polymorphic. Ya mere, ọ dị mkpa ijikwa paramita dịka nha silicon-carbon, gradient okpomọkụ uto, ọnụego uto kristal, na nrụgide ikuku. Na mgbakwunye, enwere gradient okpomọkụ na mpaghara okpomọkụ nke uto kristal silicon carbide otu kristal, nke na-eduga na nrụgide ime obodo na dislocations na-apụta (basal plane dislocation BPD, screw dislocation TSD, edge dislocation TED) n'oge usoro uto kristal, si otú a na-emetụta àgwà na arụmọrụ nke epitaxy na ngwaọrụ ndị na-esote.
(3) Njikwa ọgwụ mgbochi siri ike:
A ghaghị ịchịkwa mmeghe nke ihe ndị na-adịghị ọcha dị n'èzí iji nweta kristal na-eduzi ya na doping ntụziaka;
(4) Ọkwa uto nwayọ:
Ọganihu nke silicon carbide na-adị nwayọ nwayọ. Ihe eji eme silicon ọdịnala chọrọ naanị ụbọchị atọ iji too ghọọ mkpanaka kristal, ebe mkpara kristal silicon carbide chọrọ ụbọchị asaa. Nke a na-eduga na mmepụta silicon carbide dị ala n'ụzọ ebumpụta ụwa yana mmepụta ya pere mpe.
N'aka nke ọzọ, paramita nke uto epitaxial silicon carbide na-achọsi ike nke ukwuu, gụnyere ike ikuku nke akụrụngwa, nkwụsi ike nke nrụgide gas na ụlọ mmeghachi omume, njikwa ziri ezi nke oge mmalite gas, izi ezi nke oke gas, na njikwa siri ike nke okpomọkụ nkwụnye. Karịsịa, site na mmelite nke ọkwa iguzogide voltaji nke ngwaọrụ ahụ, ihe isi ike nke ijikwa paramita isi nke wafer epitaxial amụbaala nke ukwuu. Na mgbakwunye, na mmụba nke ọkpụrụkpụ nke oyi akwa epitaxial, otu esi achịkwa otu ihe mgbochi na ibelata njupụta ntụpọ ebe ị na-ahụ na ọkpụrụkpụ aghọwo ihe ịma aka ọzọ dị mkpa. Na sistemụ njikwa eletriki, ọ dị mkpa ijikọ sensọ na ihe na-eme ihe dị elu iji hụ na enwere ike ịhazi paramita dị iche iche nke ọma na nke kwụsiri ike. N'otu oge ahụ, nhazi nke algọridim njikwa dịkwa oke mkpa. Ọ dị mkpa inwe ike ịgbanwe atụmatụ njikwa n'oge dị adị dịka akara nzaghachi si dị iji gbanwee mgbanwe dị iche iche na usoro uto epitaxial silicon carbide.
Isi ihe isi ike dị naihe mkpuchi silicon carbidenrụpụta:
Oge ozi: Jun-07-2024