Ko te oumu tipu karaihe te taputapu matua mōkarāhe silicontipu tioata. He rite ki te oumu tipu tioata silicon tioata tuku iho. Kāore i te tino uaua te hanganga o te oumu. Ko te nuinga o te mea he tinana oumu, he pūnaha whakamahana, he tikanga tuku koiri, he pūnaha hopu me te ine korehau, he pūnaha ara hau, he pūnaha whakamatao, he pūnaha whakahaere, me ētahi atu. Ko te mara wera me ngā āhuatanga tukanga e whakatau ana i ngā tohu matua okaraihe karawiti siliconpērā i te kounga, te rahi, te kawe hiko me ērā atu mea.
I tetahi taha, ka piki ake te pāmahana i te wā e tipu haere anakaraihe karawiti siliconhe tino teitei, ā, kāore e taea te aroturuki. Nō reira, ko te uauatanga matua kei roto i te tukanga tonu. Ko ngā uauatanga matua koia ēnei:
(1) Te uauatanga o te whakahaere i te papa wera:
He uaua, he kore e taea te whakahaere i te aroturukitanga o te kōhao pāmahana-tiketike kua kati. He rerekē i ngā taputapu whakatipu tioata kume-tika tuku iho e ahu mai ana i te otinga silicon me te taumata teitei o te aunoatanga me te tukanga whakatipu tioata ka taea te tirotiro me te whakahaere, ka tipu ngā tioata silicon carbide i roto i te wāhi kati i roto i te taiao pāmahana-tiketike neke atu i te 2,000℃, ā, me whakahaere tika te pāmahana tipu i te wā whakaputa, ka uaua ai te whakahaere pāmahana;
(2) Te uauatanga o te whakahaere i te āhua tioata:
He ngāwari te puta o ngā paipa iti, ngā whakaurunga maha-ira, ngā nekehanga me ētahi atu hapa i te wā o te tukanga tipu, ā, ka pāngia, ka whanakehia hoki e rātou. Ko ngā paipa iti (MP) he hapa momo-roto me te rahi mai i te maha o ngā maikoroni ki te tekau maikoroni, he hapa nui ēnei o ngā taputapu. Kei roto i ngā tioata takitahi he neke atu i te 200 ngā momo tioata rerekē, engari he torutoru noa ngā hanganga tioata (momo 4H) e hiahiatia ana mō te hanga. He ngāwari te puta o te huringa āhua tioata i te wā o te tukanga tipu, ka hua ake he hapa whakaurunga maha-ira. Nō reira, me whakahaere tika ngā tawhā pēnei i te ōwehenga silicon-waro, te pikinga pāmahana tipu, te tere tipu tioata, me te pēhanga rere hau. Hei tāpiri, he pikinga pāmahana kei roto i te mara wera o te tipu tioata takitahi silicon carbide, e hua ake ai te ahotea ā-roto taketake me ngā nekehanga hua (te nekehanga papa turanga BPD, te nekehanga tīwiri TSD, te nekehanga taha TED) i te wā o te tukanga tipu tioata, ā, ka pā ki te kounga me te mahi o ngā epitaxy me ngā taputapu e whai ake nei.
(3) Te whakahaere uaua i te tarukino:
Me tino whakahaere te whakaurunga o ngā poke o waho kia puta ai he tioata arataki me te tāpiringa aronga;
(4) Te tere o te tipu puhoi:
He tino puhoi te tere tipu o te silicon carbide. E toru noa ngā rā e hiahiatia ana mō ngā rauemi silicon tuku iho hei tipu hei tokotoko tioata, engari e whitu ngā rā e hiahiatia ana mō ngā tokotoko tioata silicon carbide. Nā tēnei ka iti ake te pai o te whakaputanga o te silicon carbide, ā, he iti noa iho te putanga.
I tētahi atu taha, he tino uaua ngā tawhā o te tipu epitaxial silicon carbide, tae atu ki te ātete hau o ngā taputapu, te pumau o te pēhanga hau i roto i te rūma tauhohenga, te whakahaere tika i te wā whakauru hau, te tika o te ōwehenga hau, me te whakahaere pakari i te pāmahana whakatakotoranga. Ina koa, me te whakapai ake i te taumata ātete ngaohiko o te taputapu, kua tino piki ake te uaua o te whakahaere i ngā tawhā matua o te wafer epitaxial. Hei tāpiri, me te pikinga o te matotoru o te paparanga epitaxial, me pēhea te whakahaere i te ōritetanga o te ātete me te whakaiti i te kiato hapa me te whakarite i te matotoru kua noho hei wero nui. I roto i te pūnaha whakahaere hiko, me whakauru ngā pūoko me ngā kaiwhakaoho tino tika kia taea ai te whakahaere tika me te pumau i ngā tawhā rerekē. I te wa ano, he mea nui hoki te arotau i te raupapa whakahaere. Me taea te whakarite i te rautaki whakahaere i te wā tūturu kia rite ki te tohu urupare kia urutau ki ngā huringa rerekē i roto i te tukanga tipu epitaxial silicon carbide.
Ngā uauatanga matua i roto ipapa whakarewa silicon carbidete hanga:
Wā tuku: Pipiri-07-2024