Lub cub tawg loj hlob siv lead ua yog cov khoom siv tseem ceeb rausilicon carbideKev loj hlob ntawm cov siv lead ua. Nws zoo ib yam li cov khoom siv lead ua silicon qib siv lead ua. Cov qauv ntawm lub cub tawg tsis nyuaj heev. Nws feem ntau yog tsim los ntawm lub cev cub tawg, lub tshuab cua sov, lub tshuab xa hluav taws xob, lub tshuab nqus tsev thiab ntsuas, lub tshuab roj, lub tshuab txias, lub tshuab tswj, thiab lwm yam. Lub tshav kub thiab cov txheej txheem txiav txim siab cov cim tseem ceeb ntawmsilicon carbide siv lead uazoo li qhov zoo, qhov loj me, kev coj hluav taws xob thiab lwm yam.
Ntawm ib sab tes, qhov kub thiab txias thaum lub sijhawm loj hlob ntawmsilicon carbide siv lead uasiab heev thiab tsis tuaj yeem saib xyuas tau. Yog li ntawd, qhov nyuaj tshaj plaws yog nyob rau hauv cov txheej txheem nws tus kheej. Cov teeb meem tseem ceeb yog raws li nram no:
(1) Qhov nyuaj hauv kev tswj cua sov:
Kev saib xyuas qhov kaw qhov kub siab yog qhov nyuaj thiab tsis tuaj yeem tswj tau. Txawv ntawm cov khoom siv silicon-raws li cov tshuaj ib txwm muaj nrog kev ua haujlwm siab thiab cov txheej txheem kev loj hlob ntawm cov siv lead ua tau pom thiab tswj tau, cov siv lead ua silicon carbide loj hlob hauv qhov chaw kaw hauv qhov chaw kub siab tshaj 2,000 ℃, thiab qhov kub ntawm kev loj hlob yuav tsum tau tswj hwm kom meej thaum lub sijhawm tsim khoom, uas ua rau kev tswj kub nyuaj;
(2) Qhov nyuaj hauv kev tswj cov qauv siv lead ua:
Cov kav dej me me, cov polymorphic inclusions, dislocations thiab lwm yam tsis zoo feem ntau tshwm sim thaum lub sijhawm loj hlob, thiab lawv cuam tshuam thiab hloov zuj zus ib leeg. Micropipes (MP) yog cov tsis zoo los ntawm hom nrog qhov loj ntawm ntau microns txog kaum microns, uas yog cov tsis zoo ntawm cov khoom siv. Silicon carbide ib leeg siv lead ua ke suav nrog ntau dua 200 daim ntawv siv lead ua ke sib txawv, tab sis tsuas yog ob peb lub qauv siv lead ua ke (4H hom) yog cov ntaub ntawv semiconductor xav tau rau kev tsim khoom. Kev hloov pauv daim ntawv siv lead ua ke yooj yim tshwm sim thaum lub sijhawm loj hlob, ua rau muaj cov tsis zoo polymorphic inclusion. Yog li ntawd, nws yog qhov tsim nyog los tswj cov kev ntsuas xws li silicon-carbon piv, qhov kub thiab txias gradient, crystal loj hlob tus nqi, thiab cua ntws siab. Tsis tas li ntawd, muaj qhov kub thiab txias gradient hauv thaj chaw thermal ntawm silicon carbide ib leeg siv lead ua ke loj hlob, uas ua rau muaj kev ntxhov siab sab hauv thiab cov dislocations tshwm sim (basal plane dislocation BPD, ntsia hlau dislocation TSD, ntug dislocation TED) thaum lub sijhawm loj hlob siv lead ua ke, yog li cuam tshuam rau qhov zoo thiab kev ua tau zoo ntawm epitaxy thiab cov khoom siv tom ntej.
(3) Kev tswj hwm tshuaj doping nyuaj:
Kev qhia txog cov khoom tsis huv sab nraud yuav tsum tau tswj hwm nruj me ntsis kom tau txais cov siv lead ua ke nrog kev taw qhia doping;
(4) Kev loj hlob qeeb:
Qhov kev loj hlob ntawm silicon carbide qeeb heev. Cov ntaub ntawv silicon ib txwm tsuas yog xav tau 3 hnub los loj hlob mus rau hauv ib lub pas nrig siv lead ua, thaum cov pas nrig siv lead ua silicon carbide xav tau 7 hnub. Qhov no ua rau cov khoom tsim tawm qis dua ntawm silicon carbide thiab cov zis tsawg heev.
Ntawm qhov tod tes, cov kev ntsuas ntawm silicon carbide epitaxial kev loj hlob yog qhov nyuaj heev, suav nrog qhov cua nruj ntawm cov khoom siv, qhov ruaj khov ntawm cov roj siab hauv chav tshuaj tiv thaiv, kev tswj hwm qhov tseeb ntawm lub sijhawm qhia roj, qhov tseeb ntawm cov roj piv, thiab kev tswj hwm nruj ntawm qhov kub thiab txias. Tshwj xeeb, nrog rau kev txhim kho ntawm lub cuab yeej lub zog tiv thaiv qib, qhov nyuaj ntawm kev tswj hwm cov txheej txheem tseem ceeb ntawm epitaxial wafer tau nce ntxiv ntau heev. Tsis tas li ntawd, nrog rau kev nce hauv qhov tuab ntawm epitaxial txheej, yuav ua li cas tswj hwm qhov sib xws ntawm qhov tsis kam thiab txo qhov tsis zoo thaum ua kom ntseeg tau tias qhov tuab tau dhau los ua lwm qhov kev sib tw loj. Hauv lub kaw lus tswj hwm hluav taws xob, nws yog qhov tsim nyog los koom ua ke cov sensors siab thiab actuators kom ntseeg tau tias ntau yam kev ntsuas tuaj yeem tswj tau raug thiab ruaj khov. Tib lub sijhawm, kev ua kom zoo dua ntawm cov txheej txheem tswj hwm kuj tseem ceeb heev. Nws yuav tsum muaj peev xwm kho qhov kev tswj hwm hauv lub sijhawm tiag tiag raws li cov teeb liab tawm tswv yim kom hloov kho rau ntau yam kev hloov pauv hauv silicon carbide epitaxial kev loj hlob txheej txheem.
Cov teeb meem tseem ceeb hauvsilicon carbide substratekev tsim khoom:
Lub sijhawm tshaj tawm: Lub Rau Hli-07-2024