WaferKudula ndi chimodzi mwa zinthu zofunika kwambiri pakupanga ma semiconductor amphamvu. Gawoli lapangidwa kuti lilekanitse molondola ma circuits kapena ma chips ophatikizidwa ndi ma wafers a semiconductor.
Chinsinsi chachikwama cha mkatekudula ndiko kutha kulekanitsa tchipisi tapadera ndikuwonetsetsa kuti kapangidwe ndi mabwalo ofewa ali mkatichikwama cha mkatesiziwonongeka. Kupambana kapena kulephera kwa njira yodulira sikumangokhudza ubwino wolekanitsa ndi kukolola kwa chip, komanso kumagwirizana mwachindunji ndi kugwira ntchito bwino kwa njira yonse yopangira.
▲Mitundu itatu yodziwika bwino yodulira ma wafer | Chitsime: KLA CHINA
Pakadali pano, wambachikwama cha mkateNjira zodulira zimagawidwa m'magulu otsatirawa:
Kudula tsamba: mtengo wotsika, nthawi zambiri umagwiritsidwa ntchito podulama wafer
Kudula kwa laser: mtengo wokwera, nthawi zambiri umagwiritsidwa ntchito pa ma wafers okhala ndi makulidwe opitilira 30μm
Kudula plasma: mtengo wokwera, zoletsa zambiri, nthawi zambiri zimagwiritsidwa ntchito pa ma wafers okhala ndi makulidwe osakwana 30μm
Kudula tsamba la makina
Kudula tsamba ndi njira yodulira mzere wa scribe pogwiritsa ntchito diski yopukutira yozungulira mofulumira kwambiri (tsamba). Tsamba nthawi zambiri limapangidwa ndi zinthu zopyapyala kapena zopyapyala kwambiri za diamondi, zoyenera kudula kapena kukumba pa ma wafers a silicon. Komabe, monga njira yodulira yamakina, kudula tsamba kumadalira kuchotsa zinthu zakuthupi, zomwe zingayambitse kusweka kapena kusweka kwa m'mphepete mwa chip, motero zimakhudza ubwino wa chinthu ndikuchepetsa zokolola.
Ubwino wa chinthu chomaliza chomwe chimapangidwa ndi njira yodulira yamakina umakhudzidwa ndi magawo angapo, kuphatikizapo liwiro lodulira, makulidwe a tsamba, kukula kwa tsamba, ndi liwiro lozungulira tsamba.
Kudula kwathunthu ndiyo njira yophweka kwambiri yodulira tsamba, yomwe imadula kwathunthu ntchitoyo podula kukhala chinthu chokhazikika (monga tepi yodulira).
▲ Kudula kwathunthu kwa tsamba la makina | Netiweki yochokera ku chithunzi
Kudula theka ndi njira yopangira yomwe imapanga mpata podula pakati pa ntchito. Mwa kuchita ntchito yodula mopitirira muyeso, chipeso ndi mfundo zooneka ngati singano zimatha kupangidwa.
▲ Kudula theka la tsamba la makina | Netiweki yochokera ku chithunzi
Kudula kawiri ndi njira yogwiritsira ntchito yomwe imagwiritsa ntchito soka lodula kawiri lokhala ndi ma spindle awiri kuti lidule zonse kapena theka pa mizere iwiri yopangira nthawi imodzi. Soka lodula kawiri lili ndi ma spindle axes awiri. Kuthamanga kwakukulu kumatha kuchitika kudzera mu njirayi.
▲ Tsamba lodula kawiri la makina | Netiweki yochokera ku chithunzi
Kudula kwa sitepe kumagwiritsa ntchito macheka awiri okhala ndi ma spindle awiri kuti adule zonse ndi theka m'magawo awiri. Gwiritsani ntchito masamba okonzedwa bwino odulira waya pamwamba pa wafer ndi masamba okonzedwa bwino kuti agwirizane ndi kristalo imodzi yotsala ya silicon kuti akwaniritse kukonza kwapamwamba.
▲ Kudula tsamba la makina - kudula masitepe | Netiweki yochokera ku chithunzi
Kudula bevel ndi njira yopangira yomwe imagwiritsa ntchito tsamba lokhala ndi m'mphepete wooneka ngati V pamphepete wodulidwa theka kuti lidule wafer m'magawo awiri panthawi yodula sitepe. Njira yodulira chamfering imachitika panthawi yodula. Chifukwa chake, mphamvu yayikulu ya nkhungu ndi kukonza kwapamwamba zitha kuchitika.
▲ Kudula tsamba la makina - kudula bevel | Netiweki yochokera ku chithunzi
Kudula kwa laser
Kudula kwa laser ndi ukadaulo wodula wafer wosakhudzana ndi kukhudzana womwe umagwiritsa ntchito kuwala kwa laser kolunjika kulekanitsa tchipisi tapadera kuchokera ku ma wafer a semiconductor. Kuwala kwa laser kokhala ndi mphamvu zambiri kumayikidwa pamwamba pa wafer ndipo kumasanduka nthunzi kapena kuchotsa zinthu zomwe zili pamzere wodulira womwe unakonzedweratu kudzera mu njira zochotsera kapena zowola kutentha.
▲ Chithunzi chodulira pogwiritsa ntchito laser | Chithunzi: KLA CHINA
Mitundu ya ma laser omwe amagwiritsidwa ntchito kwambiri pano ndi ma ultraviolet lasers, infrared lasers, ndi femtosecond lasers. Pakati pawo, ma ultraviolet lasers nthawi zambiri amagwiritsidwa ntchito pochotsa kutentha koyenera chifukwa cha mphamvu yawo yambiri ya photon, ndipo malo omwe amakhudzidwa ndi kutentha ndi ochepa kwambiri, zomwe zingachepetse chiopsezo cha kuwonongeka kwa kutentha kwa wafer ndi tchipisi tozungulira. Ma laser a infrared ndi oyenera kwambiri ma wafers okhuthala chifukwa amatha kulowa mkati mwa zinthuzo. Ma laser a Femtosecond amachotsa zinthu molondola kwambiri komanso moyenera ndi kusamutsa kutentha pang'ono kudzera mu kuwala kochepa kwambiri.
Kudula pogwiritsa ntchito laser kuli ndi ubwino waukulu kuposa kudula kwa tsamba lachikhalidwe. Choyamba, monga njira yosakhudzana ndi kukhudza, kudula pogwiritsa ntchito laser sikufuna kukakamizidwa kwa thupi pa wafer, zomwe zimachepetsa kugawanika ndi kusweka kwa mavuto omwe amapezeka podula pogwiritsa ntchito makina. Izi zimapangitsa kudula pogwiritsa ntchito laser kukhala koyenera kwambiri pokonza ma wafer ofooka kapena owonda kwambiri, makamaka omwe ali ndi mapangidwe ovuta kapena mawonekedwe abwino.
▲ Chithunzi chodulira cha laser | Netiweki yochokera ku chithunzi
Kuphatikiza apo, kulondola kwambiri komanso kulondola kwa kudula kwa laser kumathandizira kuti iyang'ane kuwala kwa laser ku malo ochepa kwambiri, kuthandizira njira zodulira zovuta, ndikupangitsa kuti pakhale kusiyana kochepa pakati pa ma chips. Mbali imeneyi ndi yofunika kwambiri pazida zapamwamba za semiconductor zomwe zimakhala ndi kukula kochepa.
Komabe, kudula kwa laser kulinso ndi zofooka zina. Poyerekeza ndi kudula tsamba, kumakhala kochedwa komanso kokwera mtengo, makamaka popanga zinthu zambiri. Kuphatikiza apo, kusankha mtundu woyenera wa laser ndikukonza magawo kuti zitsimikizire kuti zinthuzo zichotsedwa bwino komanso kuti kutentha kusakhale kotsika kungakhale kovuta pa zipangizo zina ndi makulidwe.
Kudula kwa laser ablation
Pakudula kwa laser ablation, kuwala kwa laser kumayang'ana bwino pamalo enaake pamwamba pa wafer, ndipo mphamvu ya laser imatsogozedwa motsatira njira yodulira yomwe idakonzedweratu, pang'onopang'ono kudula wafer mpaka pansi. Kutengera ndi zofunikira zodulira, ntchitoyi imachitika pogwiritsa ntchito laser yoyendetsedwa ndi pulsed kapena laser yopitilira mafunde. Pofuna kupewa kuwonongeka kwa wafer chifukwa cha kutentha kwambiri kwa laser, madzi ozizira amagwiritsidwa ntchito kuziziritsa ndikuteteza wafer ku kuwonongeka kwa kutentha. Nthawi yomweyo, madzi ozizira amathanso kuchotsa tinthu tomwe timapangidwa panthawi yodulira, kupewa kuipitsidwa ndikuwonetsetsa kuti kudula kuli bwino.
Kudula kosaoneka kwa laser
Laser ikhozanso kugwiritsidwa ntchito potumiza kutentha m'thupi lalikulu la wafer, njira yotchedwa "kudula kwa laser kosawoneka". Pa njira iyi, kutentha kuchokera ku laser kumapanga mipata m'misewu yolembera. Malo ofooka awa amapeza zotsatira zofanana zolowera mwa kusweka wafer ikatambasulidwa.
▲ Njira yayikulu yodulira kosaoneka kwa laser
Njira yodulira yosaoneka ndi njira yodulira mkati mwa laser, osati laser ablation komwe laser imayamwa pamwamba. Ndi kudula kosaoneka, mphamvu ya laser yokhala ndi mafunde omwe ali owonekera pang'ono ku zinthu za wafer substrate imagwiritsidwa ntchito. Njirayi imagawidwa m'magawo awiri akuluakulu, imodzi ndi njira yochokera ku laser, ndipo inayo ndi njira yolekanitsira makina.
▲Mtanda wa laser umapanga kubowoka pansi pa pamwamba pa wafer, ndipo mbali zakutsogolo ndi zakumbuyo sizikhudzidwa | Netiweki yochokera ku chithunzi
Mu gawo loyamba, pamene kuwala kwa laser kukuyang'ana wafer, kuwala kwa laser kumayang'ana pa mfundo inayake mkati mwa wafer, ndikupanga malo osweka mkati. Mphamvu ya kuwala imapangitsa kuti ming'alu ingapo ipangidwe mkati, yomwe sinapitirire mpaka makulidwe onse a wafer mpaka pamwamba ndi pansi.
▲Kuyerekeza kwa ma wafer a silicon okhuthala a 100μm odulidwa ndi tsamba ndi njira yodulira yosaoneka ya laser | Netiweki yochokera pachithunzi
Mu gawo lachiwiri, tepi ya chip yomwe ili pansi pa wafer imakulitsidwa, zomwe zimapangitsa kuti ming'alu yomwe ili mkati mwa wafer ikhale yolimba, yomwe imachitika mu njira ya laser mu gawo loyamba. Kupsinjika kumeneku kumapangitsa kuti ming'aluyo ifike molunjika pamwamba ndi pansi pa wafer, kenako n'kulekanitsa waferyo kukhala tchipisi m'malo odulira awa. Pakudula kosaoneka, kudula theka kapena kudula theka kumbali ya pansi nthawi zambiri kumagwiritsidwa ntchito kuti kuthandize kulekanitsa ma wafer kukhala tchipisi kapena tchipisi.
Ubwino waukulu wa kudula kosaoneka kwa laser kuposa kuchotsedwa kwa laser:
• Palibe choziziritsira chomwe chikufunika
• Palibe zinyalala zomwe zapangidwa
• Palibe madera omwe amakhudzidwa ndi kutentha omwe angawononge ma circuits okhudzidwa ndi kutentha
Kudula kwa plasma
Kudula kwa plasma (komwe kumadziwikanso kuti plasma etching kapena dry etching) ndi ukadaulo wapamwamba wodula wafer womwe umagwiritsa ntchito reactive ion etching (RIE) kapena deep reactive ion etching (DRIE) kuti ulekanitse tchipisi tapadera kuchokera ku ma semiconductor wafers. Ukadaulowu umakwaniritsa kudula mwa kuchotsa zinthu pogwiritsa ntchito mankhwala m'mizere yodulira yomwe idakonzedweratu pogwiritsa ntchito plasma.
Pa nthawi yodula plasma, semiconductor wafer imayikidwa mu chipinda chopanda mpweya, chisakanizo cha mpweya wolowerera chimalowetsedwa mu chipindacho, ndipo mphamvu yamagetsi imayikidwa kuti ipange plasma yokhala ndi ma ion ambiri olowerera ndi ma radicals. Mitundu yolowererayi imagwirizana ndi zinthu za wafer ndikuchotsa zinthu za wafer mosankha pamzere wa scribe kudzera mu kuphatikiza kwa mankhwala ndi kutulutsa kwa thupi.
Ubwino waukulu wa kudula kwa plasma ndikuti kumachepetsa kupsinjika kwa makina pa wafer ndi chip ndipo kumachepetsa kuwonongeka komwe kungachitike chifukwa cha kukhudzana ndi thupi. Komabe, njirayi ndi yovuta komanso yotenga nthawi kuposa njira zina, makamaka pochita ndi ma wafer okhuthala kapena zinthu zomwe zimakhala ndi kukana kwambiri, kotero kugwiritsa ntchito kwake popanga zinthu zambiri kumakhala kochepa.
▲Netiweki yopezera chithunzi
Pakupanga zinthu za semiconductor, njira yodulira wafer iyenera kusankhidwa kutengera zinthu zambiri, kuphatikizapo mawonekedwe a wafer, kukula kwa chip ndi geometry, kulondola ndi kulondola kofunikira, komanso mtengo wonse wopanga ndi magwiridwe antchito.
Nthawi yotumizira: Sep-20-2024