WaferKo te tapahi tētahi o ngā hononga nui i roto i te hanga hiko haurua-ā-hiko. Kua hangaia tēnei taahiraa hei wehewehe tika i ngā ara iahiko whakauru takitahi, i ngā maramara rānei mai i ngā papa haurua-ā-hiko.
Ko te kī kipapaKo te tapahi kia taea ai te wehewehe i ngā maramara takitahi me te whakarite kia whakauruhia ngā hanganga me ngā ara iahiko ki rotopapakāore i pakaru. Ko te angitu, te kore rānei o te tukanga tapahi e pā ana ki te kounga wehenga me te hua o te maramara anake, engari e pā tika ana hoki ki te whai huatanga o te tukanga whakaputa katoa.
▲E toru ngā momo tapahi wafer noa | Puna: KLA CHINA
I tēnei wā, ko te mea noapapaKua wehea ngā tukanga tapahi ki:
Te tapahi mata: he iti te utu, he mea whakamahi mō ngā mata matotorungā papa
Te tapahi taiaho: he utu nui, e whakamahia ana mō ngā angaanga he matotoru neke atu i te 30μm
Te tapahi plasma: he nui te utu, he nui ake ngā here, e whakamahia ana mō ngā angaanga he iti iho i te 30μm te matotoru
Te tapahi mata mīhini
Ko te tapahi mata he tukanga tapahi i te rārangi o te kaituhi mā te whakamahi i tētahi kōpae huri tere-tere (mata). Ko te tikanga, he mea hanga te mata ki te taimana whakakoi, ki te taimana angiangi rawa rānei, he pai mō te tapatapahi, te keri rānei i runga i ngā papa silicon. Heoi, hei tikanga tapahi ā-ringa, ka whakawhirinaki te tapahi mata ki te tango rauemi ā-tinana, ka taea ai te pakaru, te ngatata rānei o te taha maramara, ka pā ki te kounga o te hua, ka whakaiti hoki i te hua.
He maha ngā tawhā e pāngia ana te kounga o te hua whakamutunga e te tukanga kani mīhini, tae atu ki te tere tapahi, te matotoru o te mata, te whānui o te mata, me te tere hurihuri o te mata.
Ko te tapahi katoa te tikanga tapahi mata taketake rawa atu, e tapahi katoa ai te mea mahi mā te tapahi ki tētahi rauemi pumau (pērā i te rīpene tapatapahi).
▲ Te tapahi mata mīhini-te tapahi katoa | Whatunga pūtake whakaahua
Ko te tapahi haurua he tikanga tukatuka e whakaputa ana i tētahi awaawa mā te tapahi ki waenganui o te mea mahi. Mā te mahi tonu i te tukanga keri, ka taea te whakaputa i ngā pito heru me ngā pito ngira.
▲ Te tapahi mata mīhini-te tapahi haurua | Whatunga pūtake whakaahua
Ko te tapahi takirua he tikanga tukatuka e whakamahi ana i te kani tapahi takirua me ngā miro e rua hei mahi i te tapahi katoa, i te tapahi haurua rānei i runga i ngā raina whakaputa e rua i te wā kotahi. E rua ngā toki miro o te kani tapahi takirua. Ka taea te whakatutuki i te kaha whakaputa nui mā tēnei tukanga.
▲ Te tapahi mata mīhini-te tapahi takirua | Whatunga pūtake whakaahua
Ka whakamahia he kani tapahi takirua me ngā miro e rua mō te tapahi i ngā wāhanga e rua. Whakamahia ngā mata kua arotauhia mō te tapahi i te paparanga waea i runga i te mata o te anga, me ngā mata kua arotauhia mō te tioata kotahi silicon e toe ana kia tutuki ai te tukatuka kounga teitei.
▲ Te tapahi mata mīhini – te tapahi taahiraa | Whatunga pūtake whakaahua
Ko te tapahi piko he tikanga tukatuka e whakamahi ana i tētahi mata he taha āhua-V kei te taha haurua-tapa hei tapahi i te anga i roto i ngā wāhanga e rua i te wā o te tukanga tapahi taahiraa. Ka mahia te tukanga whakakopa i te wā o te tukanga tapahi. Nō reira, ka taea te whakatutuki i te kaha teitei o te pokepokea ai me te tukatuka kounga teitei.
▲ Te tapahi mata mīhini – te tapahi piko | Whatunga pūtake whakaahua
Te tapahi laser
Ko te tapahi taiaho he hangarau tapahi papa kore-pā e whakamahi ana i te hihi taiaho arotahi hei wehe i ngā maramara takitahi mai i ngā papa haurua-ira. Ka arotahi te hihi taiaho kaha-nui ki te mata o te papa, ā, ka mimiti, ka tango rānei i te rauemi i te rārangi tapahi kua whakaritea mā roto i ngā tukanga tango, i ngā tukanga wetewete wera rānei.
▲ Hoahoa tapahi taiaho | Puna whakaahua: KLA CHINA
Ko ngā momo taiaho e whakamahia whānuitia ana i tēnei wā ko ngā taiaho ultraviolet, ngā taiaho infrared, me ngā taiaho femtosecond. I roto i ēnei, he maha ngā wā ka whakamahia ngā taiaho ultraviolet mō te tango makariri tika nā te mea he nui te kaha photon, ā, he tino iti te rohe e pāngia ana e te wera, ka taea te whakaiti i te tūponotanga o te kino wera ki te papa me ōna maramara e karapoti ana. He pai ake ngā taiaho infrared mō ngā papa matotoru nā te mea ka taea e rātou te uru hohonu ki roto i te rauemi. Ka tutuki i ngā taiaho femtosecond te tango rauemi tino tika me te whai hua me te kore e nui te whakawhiti wera mā roto i ngā pao mārama poto rawa.
He nui ngā painga o te tapahi taiaho i te tapahi mata tuku iho. Tuatahi, nā te mea he tukanga kore-pa, kāore e hiahiatia he pēhanga tinana ki runga i te papa angiangi mō te tapahi taiaho, ka whakaiti i ngā raruraru pakaru me te ngatata e kitea ana i roto i te tapahi miihini. Nā tēnei āhuatanga ka tino pai te tapahi taiaho mō te tukatuka i ngā papa angiangi, ngā papa angiangi rawa rānei, inā koa ko ērā he hanganga uaua, he āhuatanga pai rānei.
▲ Hoahoa tapahi taiaho | Whatunga pūtake whakaahua
Hei tāpiritanga, nā te tino tika me te pūmau o te tapahi taiaho ka taea te arotahi i te hihi taiaho ki tētahi rahi iti rawa o te ira, te tautoko i ngā tauira tapahi uaua, me te whakatutuki i te wehenga o te mokowā iti rawa i waenga i ngā maramara. He mea nui tēnei āhuatanga mō ngā taputapu haurua-ā-ira matatau me ngā rahi e whakaiti ana.
Heoi anō, he iti noa iho ngā herenga o te tapahi taiaho. Ki te whakatauritea ki te tapahi mata, he puhoi ake, he nui ake hoki te utu, inā koa i roto i te whakaputanga nui. Hei tāpiri, he uaua pea te whiriwhiri i te momo taiaho tika me te arotau i ngā tawhā hei whakarite kia pai te tango rauemi me te iti o te rohe e pāngia ana e te wera mō ētahi rauemi me ngā matotoru.
Te tapahi tango taiaho
I te wā e tapahia ana te wahie laser, ka arotahi tika te hihi laser ki tētahi wāhi kua tohua i runga i te mata o te wafer, ā, ka arahina te kaha laser i runga i tētahi tauira tapahi kua whakaritea, ka tapahia mārire mā roto i te wafer ki raro. I runga i ngā whakaritenga tapahi, ka mahia tēnei mahi mā te whakamahi i te laser pupuhi, i te laser ngaru tonu rānei. Hei ārai i te kino o te wafer nā te wera nui o te laser, ka whakamahia te wai whakamatao hei whakamatao me te tiaki i te wafer mai i te kino wera. I taua wā anō, ka taea hoki e te wai whakamatao te tango pai i ngā matūriki i puta i te wā tapahi, te ārai i te poke me te whakarite i te kounga tapahi.
Te tapahi kore e kitea e te laser
Ka taea hoki te arotahi i te taiaho hei whakawhiti i te wera ki roto i te tinana matua o te papa, he tikanga e kiia nei ko te "tapahi taiaho kore e kitea". Mō tēnei tikanga, ka hangaia e te wera mai i te taiaho he āputa i roto i ngā ara tuhituhi. Kātahi ka tutuki i ēnei wāhi ngoikore te pānga urunga rite mā te pakaru i te wā e totorohia ana te papa.
▲Te tukanga matua o te tapahi kore e kitea e te laser
Ko te tukanga tapahi kāore e kitea he tukanga mimiti ā-roto i te taiaho, kaua ki te tango i te taiaho ki te mata. Mō te tapahi kāore e kitea, ka whakamahia te kaha hihi taiaho me te roangaru e mārama ana ki te rauemi papa angiangi. E rua ngā taahiraa matua o te tukanga, ko tētahi he tukanga e hangai ana ki te taiaho, ko tētahi he tukanga wehewehe ā-mīhini.
▲Ka hangaia he kōhao i raro i te mata o te papatahi e te hihi laser, ā, kāore ngā taha o mua me muri e pāngia | Whatunga pūtake whakaahua
I te taahiraa tuatahi, i te wā e matawai ana te hihi taiaho i te papa, ka arotahi te hihi taiaho ki tētahi pūwāhi motuhake i roto i te papa, ka hanga he pūwāhi pakaru i roto. Ka puta he raupapa pakaru i roto i te kaha hihi, kāore anō kia toro atu i roto i te matotoru katoa o te papa ki ngā mata o runga me raro.
▲Te whakataurite i ngā anga silicon matotoru 100μm i tapahia mā te tikanga mata me te tikanga tapahi kore e kitea e te laser | Whatunga pūtake whakaahua
I te taahiraa tuarua, ka whakawhanuitia te rīpene maramara i raro i te papa, ka puta he ahotea kume i roto i ngā kapiti i roto i te papa, ka puta i roto i te tukanga taiaho i te taahiraa tuatahi. Mā tēnei ahotea ka toro poutū ngā kapiti ki ngā mata o runga me raro o te papa, kātahi ka wehea te papa kia maramara i ēnei pūwāhi tapahi. I roto i te tapahi kāore e kitea, ka whakamahia te tapahi-haurua, te tapahi-haurua taha-raro rānei hei whakahaere i te wehenga o ngā papa kia maramara, kia maramara rānei.
Ngā painga matua o te tapahi laser kore e kitea i runga i te tango laser:
• Kāore e hiahiatia he whakamatao
• Kāore he para e puta mai ana
• Kāore he rohe e pāngia ana e te wera ka kino pea ngā ara iahiko tairongo
Te tapahi plasma
Ko te tapahi plasma (e mōhiotia ana ko te whakairo plasma, te whakairo maroke rānei) he hangarau tapahi wafer matatau e whakamahi ana i te whakairo ion tauhohe (RIE) te whakairo ion tauhohe hohonu rānei (DRIE) hei wehe i ngā maramara takitahi mai i ngā wafer semiconductor. Ka tutuki i te hangarau te tapahi mā te tango matū i ngā rauemi i ngā rārangi tapahi kua whakaritea mā te whakamahi i te plasma.
I te wā e tapahia ana te plasma, ka whakanohoia te wafer semiconductor ki roto i te rūma korehau, ka whakaurua he ranunga hau tauhohenga whakahaere ki roto i te rūma, ā, ka whakamahia he mara hiko hei whakaputa i te plasma kei roto he kukū teitei o ngā katote tauhohenga me ngā rauropi. Ka taunekeneke ēnei momo tauhohenga ki te rauemi wafer, ā, ka tangohia te rauemi wafer i te rārangi kaituhi mā te whakakotahitanga o te tauhohenga matū me te pupuhi ā-tinana.
Ko te painga matua o te tapahi plasma ko te whakaiti i te ahotea ā-pūkaha i runga i te papa me te maramara, me te whakaiti i ngā kino ka puta mai i te pa atu o te tinana. Heoi, he uaua ake tēnei tukanga, he roa ake hoki te wā i ērā atu tikanga, inā koa ka whakamahia ngā papa matotoru ake, ngā rauemi rānei he ātete nui ki te whakairo, nō reira he iti noa iho tōna whakamahinga i roto i te whakaputanga papatipu.
▲Whatunga pūtake whakaahua
I roto i te hanga haurua-haurua, me whiriwhiri te tikanga tapahi wafer i runga i ngā āhuatanga maha, tae atu ki ngā āhuatanga o te rauemi wafer, te rahi me te āhua o te maramara, te tika me te pūmau e hiahiatia ana, me te utu whakaputa me te whai huatanga whānui.
Wā tuku: Hepetema-20-2024