WaferKucheka ndeimwe yenzira dzakakosha dzekugadzira ma semiconductor emagetsi. Danho iri rakagadzirirwa kupatsanura macircuit kana machipisi akabatanidzwa kubva kuma semiconductor wafers nemazvo.
Kiyi yekuchifukidzirokucheka ndiko kukwanisa kupatsanura machipisi ega ega ukuwo uchiita chokwadi chekuti maumbirwo nemasekete akapfava zviri mukatichifukidzirohazvina kukuvara. Kubudirira kana kukundikana kwemaitiro ekucheka hakungokanganisi chete kunaka kwekupatsanurwa uye goho rechip, asiwo zvine chekuita zvakananga nekushanda zvakanaka kwemaitiro ese ekugadzira.
▲Marudzi matatu akajairika ekucheka wafer | Chitubu: KLA CHINA
Parizvino, zvakajairikachifukidziroMaitiro ekucheka akakamurwa kuita:
Kucheka banga: mutengo wakaderera, unowanzo shandiswa pakukoramawafer
Kucheka neLaser: mutengo wakakwira, unowanzo shandiswa kuma wafer ane ukobvu hunopfuura 30μm
Kucheka plasma: mutengo wakakwira, zvirambidzo zvakawanda, zvinowanzo shandiswa kuma wafers ane ukobvu husingasviki 30μm
Kucheka kwebanga remakanika
Kucheka banga inzira yekucheka netambo yekunyora uchishandisa dhisiki rekukuya rinotenderera nekukurumidza (banga). Banga rinowanzo gadzirwa nezvinhu zvakatetepa kana zvakakora zvedhaimani, zvakakodzera kucheka kana kukwesha pa silicon wafers. Zvisinei, senzira yekucheka nekanika, kucheka banga kunoenderana nekubvisa zvinhu zvepanyama, izvo zvinogona kutungamira mukutsemuka kana kupwanyika kwemucheto wechip, zvichikanganisa kunaka kwechigadzirwa uye kudzikira kwegoho.
Hunhu hwechigadzirwa chekupedzisira chinogadzirwa nekucheka kwemuchina hunokanganiswa nematanho akasiyana-siyana, anosanganisira kumhanya kwekucheka, ukobvu hwebanga, dhayamita yebanga, uye kumhanya kwekutenderera kwebanga.
Kucheka zvizere ndiyo nzira iri nyore yekucheka banga, iyo inocheka zvachose chidimbu chebasa nekucheka kuita chinhu chakasimba (senge tepi yekucheka).
▲ Kucheka kwesimbi yemakanika | Network yemufananidzo
Kucheka hafu inzira yekugadzira inogadzira mugero nekucheka kusvika pakati pechinhu chebasa. Nekugara uchiita maitiro ekukwesha, kamu nepfungwa dzakaita setsono zvinogona kugadzirwa.
▲ Kucheka nepakati pebanga remakanika | Network yemufananidzo
Kucheka kaviri inzira yekugadzirisa inoshandisa saha rekucheka kaviri rine masipinde maviri kuita kucheka kwakazara kana hafu pamitsetse miviri yekugadzira panguva imwe chete. Saha rekucheka kaviri rine masipinde maviri. Kupinza kwakawanda kunogona kuitwa kuburikidza nemaitiro aya.
▲ Kucheka nebanga remakanika-kucheka kaviri | Network yemufananidzo
Step cut inoshandisa saha rekucheka kaviri rine spindles mbiri kuti icheke zvizere nehafu muzvikamu zviviri. Shandisa mablades akagadzirirwa kucheka waya pamusoro pewafer uye mablades akagadzirirwa silicon single crystal yasara kuti iwane kugadzirwa kwepamusoro-soro.
▲ Kucheka nebanga remuchina - kucheka nematanho | Network yemufananidzo
Kucheka bevel inzira yekugadzirisa inoshandisa banga rine mupendero wakaita seV pamucheto wakachekwa hafu kucheka wafer muzvikamu zviviri panguva yekucheka nhanho. Maitiro ekucheka anoitwa panguva yekucheka. Nokudaro, simba guru remould uye kugadzirisa kwemhando yepamusoro zvinogona kuwanikwa.
▲ Kucheka nebanga remakanika - kucheka nebevel | Network yemufananidzo
Kucheka neLaser
Kucheka neLaser tekinoroji yekucheka wafer isingabatanidzi mawafer inoshandisa danda relaser rakanangana kupatsanura machipisi ega ega kubva kumawafer e semiconductor. Dara relaser rine simba guru rinonangana pamusoro pewafer uye rinopwanya kana kubvisa zvinhu zvichitevedza mutsetse wekucheka wakatarwa kuburikidza ne ablation kana thermal decomposition processes.
▲ Dhayagiramu yekucheka neLaser | Mufananidzo unobva: KLA CHINA
Mhando dzema laser anoshandiswa zvakanyanya parizvino dzinosanganisira ma ultraviolet lasers, infrared lasers, uye femtosecond lasers. Pakati pawo, ma ultraviolet lasers anowanzo shandiswa kubvisa kupisa kwakanyatsonaka nekuda kwesimba rawo re photon rakawanda, uye nzvimbo inokanganiswa nekupisa idiki kwazvo, izvo zvinogona kuderedza njodzi yekukuvara kwekupisa kwe wafer nemachipisi ayo akaipoteredza. Ma infrared lasers akakodzera zviri nani ma wafers akakora nekuti anogona kupinda zvakadzika muchinhu chacho. Ma femtosecond lasers anobvisa zvinhu nemazvo uye zvinobudirira nekupisa kushoma kuburikidza ne ultrashort light pulses.
Kucheka nelaser kune zvakanakira zvikuru pane kucheka nebanga rechinyakare. Chekutanga, senzira isingabatanidzi munhu, kucheka nelaser hakudi kumanikidzwa kwemuviri pawafer, zvichideredza kupatsanuka nematambudziko anowanzoonekwa pakucheka nekanika. Iyi nzira inoita kuti kucheka nelaser kuve kwakakodzera kugadzirisa wafer dzisina kusimba kana dzakatetepa zvakanyanya, kunyanya idzo dzine maumbirwo akaomarara kana maficha akanaka.
▲ Dhayagiramu yekucheka neLaser | Network yemufananidzo
Pamusoro pezvo, kunyatsojeka uye kururama kwekucheka kwelaser kunoita kuti ikwanise kutarisisa danda relaser pahukuru hudiki kwazvo, kutsigira mapatani ekucheka akaomarara, uye kuita kuti pave nekupatsanurwa kwenzvimbo diki pakati pemachipisi. Chinhu ichi chakakosha zvikuru kune zvishandiso zve semiconductor zvepamusoro zvine saizi dzinodzikira.
Zvisinei, kucheka nelaser kune zvimwe zvipingamupinyi. Kana tichienzanisa nekucheka nebanga, kunononoka uye kunodhura, kunyanya mukugadzirwa kukuru. Pamusoro pezvo, kusarudza mhando yelaser yakakodzera uye kugadzirisa maparamita kuti ive nechokwadi chekuti kubviswa kwezvinhu zvinobudirira uye nzvimbo shoma inokanganiswa nekupisa zvinogona kunetsa kune zvimwe zvinhu nehukobvu.
Kucheka kwekubvisa kweLaser
Panguva yekucheka nelaser ablation, danda relaser rinonyatsotarisa panzvimbo yakatarwa pamusoro pewafer, uye simba relaser rinotungamirwa zvichienderana nemaitiro ekucheka akatarwa, zvishoma nezvishoma richicheka wafer kusvika pasi. Zvichienderana nezvinodiwa pakucheka, basa iri rinoitwa uchishandisa pulsed laser kana continuous wave laser. Kuti kudzivirira kukuvara kwewafer nekuda kwekupisa kwakanyanya kwelaser munzvimbo, mvura inotonhodza inoshandiswa kutonhodza uye kudzivirira wafer kubva pakukuvara kwekupisa. Panguva imwe chete, mvura inotonhodza inogonawo kubvisa zvidimbu zvinogadzirwa panguva yekucheka, kudzivirira kusvibiswa uye kuona kuti kucheka kwakanaka.
Kucheka kusingaonekwi neLaser
Laser inogonawo kutariswa kuti itumire kupisa mumuviri mukuru wewafer, nzira inonzi "invisible laser cutting". Panzira iyi, kupisa kubva mulaser kunoita kuti pave nemikana mumigwagwa yekunyora. Nzvimbo idzi dzisina simba dzinobva dzaita zvakafanana nekupinda nekutyoka kana wafer yatambanudzwa.
▲ Maitiro makuru ekucheka kusingaonekwi ne laser
Maitiro ekucheka asingaonekwe inzira yekuisa laser inonyudzwa mukati, kwete laser ablation uko laser inonyudzwa pamusoro. Nekucheka kusingaonekwe, simba remwaranzi relaser rine wavelength inoonekera zvishoma kune zvinhu zvewafer substrate rinoshandiswa. Maitiro aya akakamurwa kuita matanho maviri makuru, rimwe rinobva palaser, uye rimwe rinobva pamechanical separation process.
▲Danda relaser rinoburitsa goko pasi pewafer pamusoro, uye mativi ekumberi nekumashure haakanganisike | Image source network
Mudanho rekutanga, sezvo danda relaser richiskena wafer, danda relaser rinotarisa pane imwe nzvimbo iri mukati mewafer, zvichiita nzvimbo yekutsemuka mukati. Simba redanda rinoita kuti mukati muumbwe zvidimbu zvakasiyana-siyana, izvo zvisati zvasvika pakukora kwese kwewafer kusvika pamusoro nepazasi.
▲Kuenzanisa mawafer esilicon ane ukobvu hwe100μm akachekwa nenzira yebanga uye nzira yekucheka isingaonekwe nelaser | Network yemufananidzo
Mudanho rechipiri, chip tape iri pasi pewafer inowedzerwa, izvo zvinokonzera kushushikana mumitswe iri mukati mewafer, iyo inokonzerwa ne laser process mudanho rekutanga. Kushushikana uku kunoita kuti mitswe itambanuke yakatwasuka ichienda kumusoro nepazasi pewafer, uye yobva yaparadzanisa wafer kuita machipisi pamwe chete nenzvimbo idzi dzekucheka. Mukucheka kusingaonekwe, hafu yekucheka kana hafu yekucheka pasi inowanzo shandiswa kubatsira kupatsanura mawafer kuita machipisi kana machipisi.
Zvakanakira zvikuru zvekucheka nelaser isingaonekwe pamusoro pekubvisa nelaser:
• Hapana chinhu chinotonhodza chinodiwa
• Hapana marara anogadzirwa
• Hapana nzvimbo dzine dambudziko rekupisa dzinogona kukuvadza maseketi anonzwa
Kucheka kweplasma
Kucheka kweplasma (kunozivikanwawo se plasma etching kana dry etching) inyanzvi yepamusoro yekucheka wafer inoshandisa reactive ion etching (RIE) kana deep reactive ion etching (DRIE) kupatsanura machipisi ega ega kubva kuma semiconductor wafers. Iyi tekinoroji inobvisa zvinhu nemakemikari nenzira yekubvisa plasma.
Munguva yekucheka plasma, wafer ye semiconductor inoiswa mukamuri ye vacuum, musanganiswa wegasi rinodzorwa unopinzwa mukamuri, uye munda wemagetsi unoiswa kugadzira plasma ine huwandu hwakawanda hwema ions anopindura uye radicals. Mhando idzi dzinopindura dzinoshanda newafer uye dzinobvisa wafer nenzira yakasarudzwa pamutsetse we scribe kuburikidza nekusanganisa makemikari uye physical sputtering.
Chinhu chikuru chinobatsira pakucheka plasma ndechekuti inoderedza kushushikana kwemuchina pawafer nechip uye inoderedza kukuvara kunogona kukonzerwa nekubata panyama. Zvisinei, maitiro aya akaomarara uye anotora nguva kupfuura mamwe maitiro, kunyanya kana uchibata mawafer akakora kana zvinhu zvine resistance yakakura, saka kushandiswa kwawo mukugadzirwa kwakawanda kwakaganhurirwa.
▲Network yemufananidzo
Mukugadzira ma semiconductor, nzira yekucheka ma wafer inofanira kusarudzwa zvichienderana nezvinhu zvakawanda, kusanganisira hunhu hwezvinhu zve wafer, saizi yema chip uye geometry, kurongeka uye kururama kunodiwa, uye mutengo wekugadzira uye kushanda zvakanaka.
Nguva yekutumira: Gunyana-20-2024