Ihe eji aka rụọ Wafer Silicon Carbide siri ike

vet-china na-eme ka ọ sie ike na ihe ọ bụla siri ikeIhe eji ejikwa eriri silicon carbidenwere arụmọrụ na ogologo oge dị mma. Paddle njikwa wafer silicon carbide a na-eji usoro nrụpụta dị elu iji hụ na ọ kwụsiri ike na ọrụ ya n'ọnọdụ okpomọkụ dị elu na gburugburu nchara kemịkalụ. Nhazi ọhụrụ a na-enye nkwado magburu onwe ya maka njikwa wafer semiconductor, ọkachasị maka ọrụ akpaaka dị elu.

SiC Cantilever Paddlebụ ihe pụrụ iche eji eme ihe na ngwaọrụ mmepụta semiconductor dịka oxidation oxidation oven, diffusion oven, na annealing oven, isi ihe eji eme ya bụ ibu na ibudata wafer, na-akwado ma na-ebuga wafers n'oge usoro okpomọkụ dị elu.

Ihe owuwu ndị a na-ahụkarịnkeSiCcihe mgbochipaddle: Ọdịdị cantilever, nke a na-edozi n'otu nsọtụ ma nweere onwe ya n'akụkụ nke ọzọ, na-enwekarị imewe dị larịị ma dị ka paddle.

Na-arụ ọrụprinciplenkeSiCcihe mgbochipaddle:

Paịlị cantilever nwere ike ịkwaga elu na ala ma ọ bụ azụ na azụ n'ime ụlọ ọkụ ahụ, enwere ike iji ya bufee wafers site na ebe ibu ibu gaa na ebe nhazi, ma ọ bụ pụọ na ebe nhazi, na-akwado ma na-eme ka wafers guzosie ike n'oge nhazi okpomọkụ dị elu.