Advanced SiC Cantilever Paddle maka nhazi Wafer

Nkọwa Dị Mkpirikpi:

Ngwa ọrụ a na-akpọ Advanced SiC Cantilever Paddle for Wafer Processing nke vet-china wepụtara na-eji ihe SiC dị elu eme ihe iji melite arụmọrụ na nkenke nke nhazi wafer. Ngwa ọrụ cantilever nke Vet-china nwere ezigbo iguzogide okpomọkụ na iguzogide nchara, na-ahụ na arụmọrụ wafer kwụsiri ike na gburugburu ebe nrụpụta siri ike, na-eme ka ọ bụrụ nhọrọ kacha mma maka imeziwanye mmepụta mmepụta.


Nkọwa Ngwaahịa

Akara Ngwaahịa

Onye Kachasị EluSiC Cantilever Paddlemaka Wafer Processing nke vet-china mepụtara na-enye ezigbo ngwọta maka mmepụta semiconductor. Ejiri ihe SiC (silicon carbide) mee cantilever paddle a, ike ya dị elu na iguzogide okpomọkụ na-eme ka ọ nwee ike ịnọgide na-arụ ọrụ nke ọma na gburugburu okpomọkụ dị elu na gburugburu ebe obibi na-emebi emebi. Nhazi nke Cantilever Paddle na-enye ohere ka a kwado wafer ahụ nke ọma n'oge nhazi, na-ebelata ihe egwu nke mgbawa na mmebi.

SiC Cantilever Paddlebụ ihe pụrụ iche eji eme ihe na ngwaọrụ mmepụta semiconductor dịka oxidation oxidation oven, diffusion oven, na annealing oven, isi ihe eji eme ya bụ ibu na ibudata wafer, na-akwado ma na-ebuga wafers n'oge usoro okpomọkụ dị elu.

Ihe owuwu ndị a na-ahụkarịnkeSiCcihe mgbochipaddle: Ọdịdị cantilever, nke a na-edozi n'otu nsọtụ ma nweere onwe ya n'akụkụ nke ọzọ, na-enwekarị imewe dị larịị ma dị ka paddle.

VET Energy na-eji ihe silicon carbide emegharịrị nke ọma iji hụ na e nwere ike iji ya mee ihe dị mma.

Njirimara anụ ahụ nke Silicon Carbide Recrystallized

Akụ na ụba

Uru nkịtị

Okpomọkụ ọrụ (°C)

1600°C (na oxygen), 1700°C (ebe obibi na-ebelata)

Ọdịnaya SiC

> 99.96%

Ọdịnaya Si n'efu

<0.1%

Njupụta dị ukwuu

2.60-2.70 g/cm3

Ntụpọ doro anya

<16%

Ike mkpakọ

> 600MPa

Ike ịgbagọ oyi

80-90 MPa (20°C)

Ike ịgbagọ ọkụ

90-100 MPa (1400°C)

Mgbasa okpomọkụ @1500°C

4.70 10-6/°C

Ọgbakọ okpomọkụ @1200°C

23W/m•K

modulus na-agbanwe agbanwe

240 GPA

Nguzogide ujo okpomọkụ

Ọ dị oke mma

Uru nke Advanced SiC Cantilever Paddle nke VET Energy maka nhazi Wafer bụ:

-Nkwụsi ike okpomọkụ dị elu: enwere ike iji ya mee ihe na gburugburu ebe dị elu karịa 1600°C;

-Ọnụọgụ mgbasa okpomọkụ dị ala: na-eme ka akụkụ kwụsie ike, na-ebelata ihe egwu nke wafer warpage;

-Ịdị ọcha dị elu: obere ihe ize ndụ nke mmetọ ígwè;

-Ọ dịghị ike kemịkalụ: ọ na-eguzogide nchara, ọ dabara adaba maka gburugburu gas dị iche iche;

- Ike na ike dị elu: Na-eguzogide iyi, ogologo ndụ ọrụ;

- Ezigbo njikwa okpomọkụ: na-enyere aka na ikpo ọkụ wafer otu otu.

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