Paddle SiC Cantilever dị elu maka nhazi Wafer

Paddle SiC Cantilever dị elu maka onyonyo egosipụtara na Wafer

Nkọwa dị mkpirikpi:

The Advanced SiC Cantilever Paddle for Wafer Processing nke vet-china bidoro na-eji ngwa SiC nwere teknụzụ dị elu iji melite arụmọrụ na izi ezi nke nhazi wafer. Ụgbọ mmiri Vet-china's cantilever nwere ezigbo nguzogide okpomọkụ na nguzogide corrosion, na-eme ka arụmọrụ wafer kwụsie ike na gburugburu ebe nrụpụta siri ike, na-eme ka ọ bụrụ nhọrọ dị mma maka ịkwalite mmepụta mmepụta.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Nke di eluSiC Cantilever Paddlemaka nhazi Wafer nke vet-china mepụtara na-enye ezigbo ngwọta maka nrụpụta semiconductor. A na-eji ihe SiC (silicon carbide) mee paddle a cantilever, na ike ya dị elu na nguzogide okpomọkụ na-enyere ya aka ịnọgide na-arụ ọrụ dị mma na okpomọkụ dị elu na gburugburu ebe na-emebi emebi. Nhazi nke Cantilever Paddle na-enye ohere ka a kwadoro wafer n'oge nhazi, na-ebelata ihe ize ndụ nke nkewa na mmebi.

SiC Cantilever Paddlebụ ihe pụrụ iche nke eji eme ihe na ihe nrụpụta semiconductor dị ka ọkụ oxidation, ọkụ na-ekesa, na ọkụ na-ekpo ọkụ, ihe bụ isi bụ maka nbudata na nbudata, na-akwado ma na-ebufe wafers n'oge usoro okpomọkụ dị elu.

Ọdịdị nkịtịnkeSiCcantileverpaddle: ihe owuwu cantilever, nke edobere n'otu nsọtụ yana n'efu n'akụkụ nke ọzọ, na-enwekarị atụmatụ dị larịị na paddle.

VET Energy na-eji ihe silicon carbide recrystallized dị ọcha dị elu na-ekwe nkwa ịdịmma ya.

Njirimara anụ ahụ nke Silicon Carbide recrystallized
Ngwongwo	Uru a na-ahụkarị
Okpomọkụ na-arụ ọrụ (°C)	1600°C (ya na oxygen), 1700°C (mbelata gburugburu ebe obibi)
Ọdịnaya SiC	> 99.96%
Ọdịnaya Si efu	<0.1%
Nnukwu njupụta	2.60-2.70 g / cm³
Porosity pụtara	<16%
Ike mkpakọ	> 600MPa
Ike na-ehulata oyi	80-90 MPa (20°C)
Ike na-ehulata ọkụ	90-100 MPa (1400°C)
Mgbasa ọkụ @1500°C	4.70 10^-6/°C
Nrụpụta okpomọkụ @1200°C	23W/m•K
Modulu nke na-agbanwe agbanwe	240 GPA
Mgbochi ujo okpomọkụ	Dị oke mma