i-vet-china iqinisekisa ukuthi yonke i-DurableIphedi Lokuphatha I-Silicon Carbide Waferinokusebenza okuhle kakhulu nokuqina. Le paddle yokuphatha i-silicon carbide wafer isebenzisa izinqubo zokukhiqiza ezithuthukisiwe ukuqinisekisa ukuthi ukuqina kwesakhiwo sayo kanye nokusebenza kwayo kuhlala ezindaweni zokushisa okuphezulu kanye nokugqwala kwamakhemikhali. Lo mklamo omusha unikeza ukwesekwa okuhle kakhulu kokuphathwa kwe-semiconductor wafer, ikakhulukazi emisebenzini ezenzakalelayo enembile kakhulu.
I-SiC Cantilever Paddleiyisakhi esikhethekile esisetshenziswa emishinini yokukhiqiza ye-semiconductor njenge-oxidation furnace, i-diffusion furnace, kanye ne-annealing furnace, ukusetshenziswa okuyinhloko ukulayisha nokukhipha i-wafer, ukusekela nokuthutha ama-wafer ngesikhathi sezinqubo zokushisa okuphezulu.
Izakhiwo ezivamilekweI-SiCci-antiliverpi-addle: isakhiwo se-cantilever, esiqinile ngakolunye uhlangothi futhi esikhululekile kolunye, ngokuvamile sinomklamo oyisicaba nofana nesigwedlo.
Ukusebenzapi-rinciplekweI-SiCci-antiliverpi-addle:
I-paddle ye-cantilever ingahamba iye phezulu naphansi noma emuva naphambili ngaphakathi kwegumbi lesithando, ingasetshenziswa ukuhambisa ama-wafer kusuka ezindaweni zokulayisha kuya ezindaweni zokucubungula, noma ukuphuma ezindaweni zokucubungula, isekela futhi izinzise ama-wafer ngesikhathi sokucubungula okushisa okuphezulu.
| Izakhiwo zomzimba ze-Recrystallised Silicon Carbide | |
| Impahla | Inani Elijwayelekile |
| Izinga lokushisa lokusebenza (°C) | 1600°C (ene-oxygen), 1700°C (indawo enciphisayo) |
| Okuqukethwe kwe-SiC | > 99.96% |
| Okuqukethwe kwe-Si kwamahhala | < 0.1% |
| Ubuningi obukhulu | 2.60-2.70 g/cm3 |
| Ukuvuleka okubonakalayo | < 16% |
| Amandla okucindezela | > 600 MPa |
| Amandla okugoba abandayo | 80-90 MPa (20°C) |
| Amandla okugoba ashisayo | 90-100 MPa (1400°C) |
| Ukwandiswa kokushisa @1500°C | 4.70 10-6/°C |
| Ukushisa kwe-conductivity @1200°C | 23 W/m•K |
| Imodulus enwebekayo | 240 GPa |
| Ukumelana nokushaqeka kokushisa | Kuhle kakhulu |
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