Whakaahuatanga Hua
Ka whakaratohia e tā mātou kamupene ngā ratonga tukanga paninga SiC mā te tikanga CVD i runga i te mata o te karāpeti, te uku me ētahi atu rauemi, kia tauhohe ai ngā hau motuhake kei roto te waro me te silicon i te pāmahana teitei hei whiwhi i ngā ngota SiC parakore teitei, ka whakatakotoria ngā ngota ki runga i te mata o ngā rauemi pania, ka hanga he paparanga tiaki SIC.
Ngā āhuatanga matua:
1. Ātete waikura pāmahana teitei:
He tino pai tonu te ātete ki te waikura ahakoa te teitei o te pāmahana ki te 1600 C.
2. Teitei o te parakore: i hangaia mā te whakatakotoranga kohu matū i raro i te āhuatanga whakapūkara pāmahana teitei.
3. Ātete ki te horo: he pakeke teitei, he mata kiato, he matūriki angiangi.
4. Ātete ki te waikura: waikawa, kawakore, tote me ngā matū waro.
Ngā Whakatakotoranga Matua o te Paninga CVD-SIC
| Ngā Āhuatanga SiC-CVD | ||
| Hanganga Karaihe | Wāhanga β FCC | |
| Kiato | karamu/cm³ | 3.21 |
| Te pakeketanga | Te mārō o Vickers | 2500 |
| Rahi o te witi | µm | 2~10 |
| Te Parakore o te Matū | % | 99.99995 |
| Te kaha wera | J·kg-1 ·K-1 | 640 |
| Te Pāmahana Whakatōtō | ℃ | 2700 |
| Te Kaha o te Felexural | MPa (RT 4-ira) | 415 |
| Te Modulus a Young | Gpa (piko 4pt, 1300℃) | 430 |
| Te Whakawhanuitanga Wera (CTE) | 10-6K-1 | 4.5 |
| Te kawe wera | (W/mK) | 300 |
