SiC Coated Barrel Susceptor Yakagadzirirwa

Mudziyo wemubharachinhu chikuru mukukura kwemasekonzi epitaxial akadai seMOCVD, MBE, CVD. Inonyanya kushandiswa kutakura mawafer mumakamuri ekuita tembiricha yepamusoro uye inopa nzvimbo yakafanana uye yakagadzikana yekupisa kuti ive nechokwadi chekuti ma layers epitaxial anowanikwa (akadai seGaN, SiC, nezvimwewo). Basa rayo guru nderekuwana tembiricha yepamusoro yewafer yakaenzana kuburikidza nekudzora kwakanyatsojeka kwekupisa, nokudaro ichivimbisa kuti mafirimu matete eepitaxial ari mukobvu, doping concentration, uye crystal structure yakafanana.

Tinoshandisa tekinoroji yedu ine patent kugadzirachinhu chinobata bhareroine kuchena kwakanyanya, kufanana kwakanaka kwepurasitiki uye hupenyu hwebasa hwakanaka, pamwe nekudzivirira makemikari zvakanyanya uye hunhu hwekugadzikana kwekupisa.

VET Energy inoshandisa graphite yakachena kwazvo ine CVD-SiC coating kuti iwedzere kugadzikana kwemakemikari:

1. Zvinhu zvegraphite zvakachena zvakanyanya
Kupisa kwakanyanya: graphite inopfuudza kupisa katatu kupfuura silicon, iyo inogona kutamisa kupisa nekukurumidza kubva kunzvimbo yekupisa kuenda ku wafer uye kupfupisa nguva yekupisa.
Simba remuchina: Kuwanda kwegirafiti inomanikidzwa neisostatic ≥ 1.85 g/cm³, inokwanisa kutsungirira tembiricha yepamusoro pamusoro pe1200 ℃ isina kuchinja.

2. Kuputira kweCVD SiC
Rutivi rwe β - SiC runoumbwa pamusoro pe graphite ne chemical vapor deposition (CVD), rune kuchena kwe ≥ 99.99995%, chikanganiso chekuenzana kweukobvu hwekufukidza chiri pasi pe ±5%, uye kuomarara kwepamusoro kuri pasi pe Ra0.5um.

3. Kuvandudza mashandiro:
Kuramba ngura: inogona kutsungirira magasi anopisa akadai seCl2, HCl, nezvimwewo, inogona kuwedzera hupenyu hweGaN epitaxy katatu munzvimbo yeNH3.
Kugadzikana kwekupisa: Kuwanda kwekuwedzera kwekupisa (4.5 × 10-6/℃) kunoenderana negirafiti kudzivirira kutsemuka kwejira kunokonzerwa nekuchinja-chinja kwekupisa.
Kuomarara uye Kusapfeka: Kuomarara kweVickers kunosvika 28 GPa, iyo yakapetwa kagumi pane graphite uye inogona kuderedza njodzi yekukwenya kwewafer.