Yakagadzirirwa SiC Coated Barrel Susceptor

Bharel susceptorchinhu chakakosha mu semiconductor epitaxial kukura maitiro akadai MOCVD, MBE, CVD. Inonyanya kushandiswa kutakura mawafers mumakamuri ekupisa-yepamusoro uye inopa yunifomu uye yakagadzikana yenzvimbo yekupisa yekupisa kuti ive nechokwadi chekuiswa kweiyo epitaxial layers (yakadai seGaN, SiC, nezvimwewo). Basa rayo repakati nderekuwana kuenzana kwepamusoro tembiricha yewafer pamusoro kuburikidza neiyo chaiyo yekudziya munda kutonga, nekudaro kuve nechokwadi kukora, doping concentration, uye crystal chimiro kufanana kweepitaxial matete mafirimu.

Isu tinoshandisa tekinoroji yedu ine patent kugadzira iyobarrel susceptornehutsanana hwakanyanya, kuwirirana kwakanaka uye hupenyu hwesevhisi hwakanakisa, pamwe nekukwirira kwemakemikari kuramba uye kugadzikana kwemafuta.

VET Energy inoshandisa yakakwira kuchena graphite neCVD-SiC coating kusimudzira kugadzikana kwemakemikari:

1. High kuchena graphite zvinhu
High thermal conductivity: thermal conductivity ye graphite yakapetwa katatu iyo yesilicon, iyo inogona kukurumidza kutamisa kupisa kubva kune inopisa sosi kusvika kune wafer uye kupfupisa nguva yekupisa.
Mechanical simba: Isostatic pressure graphite density ≥ 1.85 g/cm ³, inokwanisa kushingirira tembiricha yepamusoro pamusoro pe1200 ℃ pasina deformation.

2. CVD SiC kupfeka
A β - SiC layer inoumbwa pamusoro pegraphite nekemikari vapor deposition (CVD), ine kuchena kwe ≥ 99.99995%, kukanganisa kwakafanana kwekuputira ukobvu kunodarika ± 5%, uye kushata kwepamusoro kuri pasi peRa0.5um.

3. Kuvandudzwa kwekuita:
Corrosion resistance: inogona kumirisana nemagasi anoodza zvakanyanya seCl2, HCl, nezvimwewo, inogona kuwedzera hupenyu hweGaN epitaxy katatu munzvimbo yeNH3.
Thermal kugadzikana: The coefficient of thermal expansion (4.5 × 10-6 / ℃) inofananidzwa negraphite kuti irege kuvhara kuputika kunokonzerwa nekushanduka kwekushisa.
Kuoma uye Kupfeka Kuramba: Kuoma kweVickers kunosvika 28 GPa, iyo yakapetwa ka10 kupfuura graphite uye inogona kuderedza njodzi yezvimedu zvewafer.