He aha ka uhi ʻana o TaC?

I ka ʻoihana semiconductor e loli wikiwiki nei, he mea koʻikoʻi nā mea e hoʻomaikaʻi ai i ka hana, ke kūpaʻa, a me ka pono. ʻO kekahi o ia mau hana hou, ʻo ia ka uhi ʻana o Tantalum Carbide (TaC), kahi papa pale ʻoi loa i hoʻopili ʻia i nā ʻāpana graphite. Ke nānā nei kēia blog i ka wehewehe ʻana o ka uhi ʻana o TaC, nā pono loea, a me kāna mau noi hoʻololi i ka hana semiconductor.

I. He aha ka uhi ʻana o TaC?

ʻO ka uhi ʻana o TaC kahi papa keramika hana kiʻekiʻe i haku ʻia me ka tantalum carbide (kahi hui o ka tantalum a me ke kalapona) i waiho ʻia ma luna o nā ʻili graphite. Hoʻopili pinepine ʻia ka uhi ʻana me ka hoʻohana ʻana i nā ʻano hana Chemical Vapor Deposition (CVD) a i ʻole Physical Vapor Deposition (PVD), e hana ana i kahi pale mānoanoa a maʻemaʻe loa e pale ana i ka graphite mai nā kūlana koʻikoʻi.

Nā Waiwai Koʻikoʻi o ka Uhi ʻana o TaC

●Paʻa o ka Mahana Kiʻekiʻe: Kū i nā mahana ma luna o 2200°C, ʻoi aku ka maikaʻi ma mua o nā mea kuʻuna e like me ka silicon carbide (SiC), ka mea e hōʻino ʻia ma luna o 1600°C.

●Ke kū'ē kemikaKūʻē i ka pala mai ka hydrogen (H₂), ammonia (NH₃), nā mahu silicon, a me nā metala hoʻoheheʻe ʻia, he mea koʻikoʻi no nā wahi hana semiconductor.

●Maʻemaʻe Loa-KiʻekiʻeNā pae haumia ma lalo o 5 ppm, e hōʻemi ana i nā pilikia haumia i nā kaʻina hana ulu kristal.

●Ka Paʻa Mahana a me ka MechanicalʻO ka hoʻopili ikaika ʻana i ka graphite, ka hoʻonui wela haʻahaʻa (6.3 × 10⁻⁶ / K), a me ka paʻakikī (~ 2000 HK) e hōʻoia i ka lōʻihi o ke ola ma lalo o ke kaʻapuni wela.

II. ʻO ka uhi ʻana o TaC i ka hana ʻana o Semiconductor: Nā noi koʻikoʻi

He mea nui nā ʻāpana graphite i uhi ʻia me TaC i ka hana semiconductor holomua, ʻoiai no nā mea silicon carbide (SiC) a me gallium nitride (GaN). Aia ma lalo iho ko lākou mau hihia hoʻohana koʻikoʻi:

1. Ka ulu ʻana o ka kristal hoʻokahi SiC

He mea nui nā wafers SiC no nā mea uila mana a me nā kaʻa uila. Hoʻohana ʻia nā ipu hoʻoheheʻe graphite i uhi ʻia me TaC a me nā susceptors i ka Physical Vapor Transport (PVT) a me nā ʻōnaehana High-Temperature CVD (HT-CVD) i:

● Kāohi i ka haumiaʻO ka haʻahaʻa o ka haumia o TaC (e laʻa, boron <0.01 ppm vs. 1 ppm i loko o ka graphite) e hōʻemi ana i nā hemahema i loko o nā kristal SiC, e hoʻomaikaʻi ana i ke kū'ē ʻana o ka wafer (4.5 ohm-cm vs. 0.1 ohm-cm no ka graphite i uhi ʻole ʻia).

● Hoʻonui i ka Hoʻokele WelaʻO ka emissivity like (0.3 ma 1000°C) e hōʻoiaʻiʻo ana i ka hoʻolaha wela like ʻana, e hoʻomaikaʻi ana i ka maikaʻi o ke kristal.

2. Ka ulu ʻana o ka epitaxial (GaN/SiC)

I loko o nā mea hana Metal-Organic CVD (MOCVD), nā ʻāpana i uhi ʻia me TaC e like me nā mea lawe wafer a me nā mea hoʻokomo:

●Kāohi i nā hopena kinoea: Kūʻē i ke kālai ʻia e ka ammonia a me ka hydrogen ma 1400°C, e mālama ana i ka pono o ka reactor.

●Hoʻomaikaʻi i ka huaMa ka hōʻemi ʻana i ka hoʻokahe ʻana o nā ʻāpana mai ka graphite, hoʻemi ka uhi ʻana o CVD TaC i nā hemahema i nā papa epitaxial, he mea nui no nā LED hana kiʻekiʻe a me nā polokalamu RF.

3. Nā noi Semiconductor ʻē aʻe

●Nā Mea Hana Mahana KiʻekiʻeLoaʻa i nā mea hoʻomaha a me nā mea hoʻomehana i ka hana ʻana o GaN ka pōmaikaʻi mai ke kūpaʻa o TaC i nā wahi waiwai i ka hydrogen.

●Ka lawelawe ʻana i ka waferʻO nā ʻāpana i uhi ʻia e like me nā apo a me nā poʻi e hōʻemi i ka haumia metala i ka wā o ka hoʻoili wafer

I. No ke aha i ʻoi aku ai ka maikaʻi o ka uhi ʻana o TaC ma mua o nā koho ʻē aʻe?

ʻO ka hoʻohālikelike ʻana me nā mea maʻamau e hōʻike ana i ka maikaʻi o TaC:

ʻIkepili i lawe ʻia mai nā hoʻohālikelike ʻoihana

IV. No ke aha e koho ai iā VET?

Ma hope o ka hoʻopukapuka mau ʻana i ka noiʻi a me ka hoʻomohala ʻenehana,Kauka holoholonaʻO nā ʻāpana i uhi ʻia me ka Tantalum carbide (TaC), e like meApo alakaʻi graphite i uhi ʻia me TaC, ʻO ka mea hoʻopaʻa papa i uhi ʻia ʻo CVD TaC, ʻO ka mea hoʻopaʻa i uhi ʻia ʻo TaC no nā lako Epitaxy,Mea graphite porous i uhi ʻia me ka tantalum carbidea meʻO ka mea hoʻopaʻa wafer me ka uhi ʻana o TaC, he mea kaulana loa ia ma nā mākeke ʻEulopa a me ʻAmelika. Ke kakali nei ʻo VET i ka lilo ʻana i hoa pili lōʻihi nou.