Waa maxay TaC Coating?

Warshadaha semiconductor-ka sida dhaqsaha leh u kobcaya, agabka xoojiya waxqabadka, adkeysiga, iyo hufnaanta ayaa muhiim ah. Mid ka mid ah hal-abuurkan oo kale waa daahan Tantalum Carbide (TaC), lakab ilaalin gees-goyn ah oo lagu dabaqay qaybaha garaafyada. Blog-gani waxa uu sahaminayaa qeexida daahan TaC, faa'iidooyinka farsamada, iyo codsiyadeeda wax ka beddelka ah ee wax soo saarka semiconductor.

Ⅰ Waa maxay TaC Coating?

Daahan TaC waa lakab dhoobo ah oo wax qabad sare leh oo ka kooban tantalum carbide (ka kooban tantalum iyo kaarboon) oo lagu shubay sagxadaha garaafka. Dahaarka waxaa sida caadiga ah lagu dabaqaa iyadoo la adeegsanayo Farsamooyinka Uumiga Uumiga Kiimikada (CVD) ama Farsamooyinka Dhigashada Uumiga Jirka (PVD), abuurista caqabad cufan, ultra saafi ah oo ka ilaalinaysa garaafka xaaladaha daran.

Astaamaha Muhiimka ah ee Dahaarka TaC

●Deganaanshaha Heerkulka Sare: Waxay u adkaysataa heerkulka ka sarreeya 2200 ° C, oo ka sarreeya qalabka dhaqanka sida silicon carbide (SiC), kaas oo hoos u dhigaya in ka sarreeya 1600 ° C.

●Iska caabinta Kiimikada: Waxay u adkaysataa daxalka ka imanaya hydrogen (H₂), ammonia (NH₃), uumiga silikoon, iyo biraha dhalaalay, oo muhiim u ah jawiga habaynta semiconductor.

●ultra-High Purity: Heerarka wasakhaysan ee ka hooseeya 5 ppm, yaraynta khatarta faddaraynta ee hababka koritaanka crystal.

●Kuleylka iyo Joogitaanka MakaanikadaKu dhajinta xooggan ee garaafka, ballaarinta kulaylka hooseeya (6.3 × 10⁻⁶ / K), iyo adkaanta (~ 2000 HK) waxay xaqiijisaa cimriga dheer ee baaskiilka kulaylka.

Ⅱ Dahaarka TaC ee Soo saarista Semiconductor: Codsiyada Muhiimka ah

Qaybaha garaafiga ee dahaarka leh ee TaC ayaa lagama maarmaan u ah samaynta semiconductor horumarsan, gaar ahaan aaladaha silicon carbide (SiC) iyo gallium nitride (GaN). Hoos waxaa ku yaal kiisas isticmaalkooda muhiimka ah:

1. Kobaca Hal Crystal ah ee SiC

Waferrada SiC waxay muhiim u yihiin korantada korantada iyo baabuurta korontada. TaC-dahaarka graphite crucibles iyo susceptors waxaa loo isticmaalaa Gaadiidka Jirka Uumiga (PVT) iyo CVD Heerkulka Sare (HT-CVD) si:

● Jooji wasakhowga: Waxyaabaha wasakhda yar ee TaC (tusaale, boron <0.01 ppm vs. 1 ppm in graphite) waxay yaraynaysaa cilladaha ku jira kiristaalo SiC, waxay hagaajinaysaa iska caabbinta wafer (4.5 ohm-cm vs. 0.1 ohm-cm ee garaafyada aan la daboolin).

● Kor u qaadida Maareynta kulaylkaDheecaan isku mid ah (0.3 at 1000 ° C) waxay hubisaa qaybinta kulaylka joogtada ah, hagaajinta tayada crystal.

2. Kobaca Epitaxial (GaN/SiC)

Gudaha birta-Organic CVD (MOCVD) reactors, qaybaha TaC-dahaarka leh sida xambaarayaasha iyo durayaasha:

●Kahortagga Falcelinta Gaaska: Waxay u adkaysataa in ammonia iyo haydarojiin ay ku dhejiyaan 1400°C, iyaga oo ilaalinaya daacadnimada reactor.

●Hagaajinta Waxsoosaarka: Iyada oo la yareeyo daadinta walxaha garaafyada, dahaarka CVD TaC wuxuu yareeyaa cilladaha lakabyada epitaxial, oo muhiim u ah LED-yada waxqabadka sare leh iyo aaladaha RF.

3. Codsiyada kale ee Semiconductor

●Reactors Heerkulka SareKuleyliyeyaasha iyo kuleyliyeyaasha wax soo saarka GaN waxay ka faa'iideystaan ​​xasilloonida TaC ee deegaannada hodanka ku ah hydrogen.

●Qabashada WaferQaybaha dahaarka leh sida siddooyinka iyo daboolka waxay yareeyaan wasakhda birta inta lagu jiro wareejinta maraqa

Ⅲ Waa maxay sababta dahaarka TaC uu uga fiican yahay beddelka?

Isbarbardhigga qalabka caadiga ah wuxuu muujinayaa sarraynta TaC:

Xogta laga soo xigtay isbarbardhigga warshadaha

IV. Maxaad u dooranaysaa VET?

Ka dib maalgashi joogto ah oo lagu sameeyay cilmi baarista iyo horumarinta tignoolajiyada,VETQaybaha dahaarka leh ee Tantalum carbide (TaC), sidaTaC dahaarka leh giraanta hagaha garaafyada, CVD TaC Dahaarka saxanka, TaC Dahaarka Susceptor ee Qalabka Epitaxy,Tantalum carbide oo dahaarka leh oo dahaarka lehiyoSusceptor Wafer oo leh daahan TaC, ayaa aad caan uga ah suuqyada Yurub iyo Ameerika. VET waxay si daacad ah u rajeyneysaa inaad noqoto lammaanahaaga muddada-dheer.