TaC Txheej yog dab tsi?

Hauv kev hloov pauv sai sai ntawm kev lag luam semiconductor, cov ntaub ntawv uas txhim kho kev ua tau zoo, ua haujlwm ntev, thiab ua haujlwm tau zoo yog qhov tseem ceeb. Ib qho kev tsim kho tshiab yog Tantalum Carbide (TaC) txheej, txheej txheej tiv thaiv kev siv rau cov khoom siv graphite. Qhov blog no tshawb txog TaC txheej lub ntsiab lus, kev zoo, thiab nws cov kev hloov pauv hauv kev tsim khoom semiconductor.

Ⅰ. TaC Txheej yog dab tsi?

TaC txheej yog txheej txheej ceramic uas ua tau zoo ntawm tantalum carbide (ib qho sib xyaw ntawm tantalum thiab carbon) tso rau ntawm graphite nto. Cov txheej txheej yog feem ntau thov siv cov tshuaj vapor deposition (CVD) lossis siv lub cev ntom ntom, Ultra-ntshiab thaiv cov txheej txheem uas tiv thaiv graphite los ntawm cov xwm txheej.

Cov Khoom Tseem Ceeb ntawm TaC Txheej

●Kub-kub Stability: Muaj qhov kub siab tshaj 2200 ° C, ua haujlwm zoo dua cov khoom siv xws li silicon carbide (SiC), uas degrades saum 1600 ° C.

●Tshuaj tiv thaiv: Resistant corrosion los ntawm hydrogen (H₂), ammonia (NH₃), silicon vapors, thiab molten hlau, tseem ceeb rau semiconductor ua ib puag ncig.

●Ultra-High Purity: Cov qib impurity qis dua 5 ppm, txo qhov kev pheej hmoo ntawm kev kis kab mob hauv cov txheej txheem siv lead ua.

●Thermal thiab Mechanical Durability: Muaj zog adhesion rau graphite, tsis tshua muaj thermal expansion (6.3 × 10⁻⁶ / K), thiab hardness (~ 2000 HK) ua kom lub neej ntev nyob rau hauv thermal cycling.

Ⅱ. TaC Txheej hauv Semiconductor Manufacturing: Cov ntawv thov tseem ceeb

TaC-coated graphite Cheebtsam yog indispensable nyob rau hauv advanced semiconductor fabrication, tshwj xeeb tshaj yog rau silicon carbide (SiC) thiab gallium nitride (GaN) li. Hauv qab no yog lawv cov kev siv tseem ceeb:

1. SiC Ib Leeg Crystal Loj hlob

SiC wafers yog qhov tseem ceeb rau lub zog hluav taws xob thiab hluav taws xob tsheb. TaC-coated graphite crucibles thiab susceptors yog siv nyob rau hauv lub cev Vapor Transport (PVT) thiab High-Temperature CVD (HT-CVD) systems rau:

● Tiv thaiv kev kis kab mob: TaC cov ntsiab lus uas tsis muaj impurity (piv txwv li, boron <0.01 ppm vs. 1 ppm hauv graphite) txo qhov tsis xws ntawm SiC crystals, txhim kho wafer resistivity (4.5 ohm-cm vs. 0.1 ohm-cm rau uncoated graphite).

● Txhim khu kev tswj cua sov: Uniform emissivity (0.3 ntawm 1000 ° C) ua kom muaj cua sov zoo sib xws, ua kom zoo siv lead ua zoo.

2. Kev loj hlob ntawm Epitaxial (GaN/SiC)

Hauv Hlau-Organic CVD (MOCVD) reactors, TaC-coated Cheebtsam xws li wafer nqa thiab injectors:

●Tiv thaiv cov pa phem: Resistant etching los ntawm ammonia thiab hydrogen ntawm 1400 ° C, tswj reactor kev ncaj ncees.

●Txhim kho Yield: Los ntawm kev txo cov particle shedding los ntawm graphite, CVD TaC txheej minimizes defects nyob rau hauv epitaxial txheej, tseem ceeb heev rau high-kev ua tau zoo LEDs thiab RF li.

3. Lwm yam kev siv semiconductor

●High-temperature Reactors: Susceptors thiab heaters hauv GaN ntau lawm tau txais txiaj ntsig los ntawm TaC qhov kev ruaj ntseg hauv ib puag ncig hydrogen-nplua nuj.

●Wafer tuav: Coated Cheebtsam xws li rings thiab hau txo cov hlau paug thaum lub sij hawm wafer hloov

Ⅲ. Vim li cas TaC txheej ua haujlwm tau zoo dua?

Ib qho kev sib piv nrog cov ntaub ntawv ib txwm qhia txog TaC qhov zoo tshaj plaws:

Cov ntaub ntawv tau los ntawm kev sib piv kev lag luam

IV. Vim li cas thiaj xaiv VET?

Tom qab tsis tu ncua peev hauv kev tshawb fawb thiab kev tsim kho technology,VET's Tantalum carbide (TaC) coated qhov chaw, xws liTaC coated graphite qhia nplhaib, CVD TaC Coated phaj susceptor, TaC Coated Susceptor rau Epitaxy Equipment,Tantalum carbide coated porous graphite khoomthiabWafer susceptor nrog TaC txheej, yog nrov heev hauv European thiab Asmeskas kev lag luam. VET ua siab ntev tos ntsoov los ua koj tus khub mus sij hawm ntev.