Txheej TaC yog dab tsi?

Hauv kev lag luam semiconductor uas hloov pauv sai sai, cov ntaub ntawv uas txhim kho kev ua tau zoo, kev ruaj khov, thiab kev ua haujlwm zoo yog qhov tseem ceeb heev. Ib qho kev tsim kho tshiab no yog Tantalum Carbide (TaC) txheej, ib txheej tiv thaiv tshiab siv rau cov khoom graphite. Cov blog no tshawb nrhiav TaC txheej txhais, cov txiaj ntsig kev siv tshuab, thiab nws cov ntawv thov hloov pauv hauv kev tsim khoom semiconductor.

Ⅰ. TaC Txheej yog dab tsi?

Txheej TaC yog ib txheej ceramic ua haujlwm siab uas muaj tantalum carbide (ib qho sib xyaw ntawm tantalum thiab carbon) tso rau ntawm cov nplaim graphite. Cov txheej no feem ntau yog siv los ntawm kev siv Chemical Vapor Deposition (CVD) lossis Physical Vapor Deposition (PVD) cov txheej txheem, tsim kom muaj cov khoom thaiv ntom ntom, ultra-pure uas tiv thaiv graphite los ntawm cov xwm txheej hnyav.

Cov Khoom Tseem Ceeb ntawm TaC Txheej

●Kev Ruaj Ntseg Kub Siab: Tiv taus qhov kub siab tshaj 2200 ° C, ua tau zoo dua li cov ntaub ntawv ib txwm muaj xws li silicon carbide (SiC), uas lwj tshaj 1600 ° C.

●Kev Tiv Thaiv TshuajTiv taus xeb los ntawm hydrogen (H₂), ammonia (NH₃), silicon vapors, thiab molten hlau, tseem ceeb rau semiconductor processing ib puag ncig.

●Kev Ntshiab Siab Tshaj PlawsCov qib tsis huv hauv qab 5 ppm, txo qis kev pheej hmoo ntawm kev ua qias tuaj hauv cov txheej txheem loj hlob ntawm cov siv lead ua.

●Kev Ruaj Khoov thiab Kev Siv Tshuab: Muaj zog lo rau graphite, thermal expansion qis (6.3 × 10⁻⁶/K), thiab hardness (~ 2000 HK) ua kom muaj sia nyob ntev hauv thermal cycling.

Ⅱ. Kev Txheej TaC hauv Kev Tsim Khoom Semiconductor: Cov Ntawv Thov Tseem Ceeb

Cov khoom siv graphite uas tau coated nrog TaC yog qhov tseem ceeb hauv kev tsim cov khoom siv semiconductor siab heev, tshwj xeeb tshaj yog rau silicon carbide (SiC) thiab gallium nitride (GaN). Hauv qab no yog lawv cov ntaub ntawv siv tseem ceeb:

1. SiC Ib Leeg Crystal Loj Hlob

SiC wafers yog qhov tseem ceeb rau cov khoom siv hluav taws xob thiab cov tsheb fais fab. TaC-coated graphite crucibles thiab susceptors siv rau hauv Physical Vapor Transport (PVT) thiab High-Temperature CVD (HT-CVD) systems rau:

● Tiv thaiv kev ua qias tuajCov ntsiab lus tsis muaj kuab paug ntawm TaC (piv txwv li, boron <0.01 ppm vs. 1 ppm hauv graphite) txo cov qhov tsis zoo hauv SiC crystals, txhim kho wafer resistivity (4.5 ohm-cm vs. 0.1 ohm-cm rau graphite tsis coated).

● Txhim Kho Kev Tswj Xyuas KubKev sib npaug ntawm emissivity (0.3 ntawm 1000 ° C) ua kom muaj kev faib cua sov sib xws, ua kom zoo dua qhov zoo ntawm cov siv lead ua.

2. Kev Loj Hlob Epitaxial (GaN / SiC)

Hauv cov reactors Metal-Organic CVD (MOCVD), cov khoom siv TaC-coated xws li cov neeg nqa khoom wafer thiab cov tshuaj txhaj:

●Tiv Thaiv Cov Tshuaj Tiv Thaiv PaTiv taus kev khawb los ntawm ammonia thiab hydrogen ntawm 1400 ° C, tswj kev ruaj khov ntawm reactor.

●Txhim kho cov qoob looLos ntawm kev txo cov khoom me me uas poob tawm ntawm graphite, CVD TaC txheej txo cov qhov tsis zoo hauv cov txheej epitaxial, qhov tseem ceeb rau cov LEDs ua haujlwm siab thiab RF.

3. Lwm Cov Ntawv Thov Semiconductor

●Cov Reactors Kub SiabCov khoom siv susceptors thiab cov cua sov hauv GaN ntau lawm tau txais txiaj ntsig los ntawm TaC qhov kev ruaj khov hauv cov chaw muaj hydrogen ntau.

●Kev Tswj Xyuas WaferCov khoom uas tau coated xws li cov nplhaib thiab cov hau txo cov hlau uas muaj kuab paug thaum lub sijhawm hloov wafer

III. Vim li cas TaC Coating thiaj ua tau zoo dua lwm txoj hauv kev?

Kev sib piv nrog cov ntaub ntawv ib txwm muaj qhia txog TaC qhov zoo tshaj plaws:

Cov ntaub ntawv tau los ntawm kev sib piv hauv kev lag luam

IV. Vim li cas ho xaiv VET?

Tom qab kev nqis peev tas mus li rau kev tshawb fawb thiab kev txhim kho thev naus laus zis,Kws Kho Mob TsiajCov khoom siv coated Tantalum carbide (TaC), xws liCov nplhaib qhia graphite coated TaC, CVD TaC Coated phaj susceptor, TaC Coated Susceptor rau Epitaxy Khoom siv,Tantalum carbide coated porous graphite khoomthiabWafer susceptor nrog TaC txheej, nrov heev hauv kev lag luam European thiab Asmeskas. VET tos ntsoov yuav los ua koj tus khub mus sij hawm ntev.