He aha te paninga TaC?

I roto i te umanga haurua-ā-ira e tere whanake ana, he mea nui ngā rauemi hei whakarei ake i te mahi, te roa, me te whai huatanga. Ko tētahi o aua auahatanga ko te paninga Tantalum Carbide (TaC), he paparanga tiaki matatau e whakamahia ana ki ngā wāhanga karāpeti. Ka tūhuratia e tēnei tuhinga te whakamāramatanga o te paninga TaC, ngā painga hangarau, me ōna tono whakarerekētanga i roto i te hanga haurua-ā-ira.

Ⅰ. He aha te paninga TaC?

Ko te paninga TaC he paparanga uku mahi-teitei i hangaia mai i te tantalum carbide (he matū o te tantalum me te waro) kua whakatakotoria ki runga i ngā mata karāpeti. Ko te tikanga ka pania te paninga mā te whakamahi i ngā tikanga Chemical Vapor Deposition (CVD) me te Physical Vapor Deposition (PVD), ka hangaia he ārai matotoru, tino parakore e tiaki ana i te karāpeti mai i ngā āhuatanga tino kino.

Ngā Āhuatanga Matua o te Paninga TaC

●Te Pūmautanga o te Pāmahana TeiteiKa ātete ki ngā pāmahana neke atu i te 2200°C, ka pai ake i ngā rauemi tuku iho pēnei i te silicon carbide (SiC), ka pakaru i runga ake i te 1600°C.

●Ātete MatūĀtete ki te waikura mai i te hauwai (H₂), te haukini (NH₃), ngā kohu silicon, me ngā konganuku rewa, he mea nui mō ngā taiao tukatuka haurua-ira.

●Te Parakore Tino-TeiteiNgā taumata poke i raro i te 5 ppm, e whakaiti ana i ngā mōrearea poke i roto i ngā tukanga tipu tioata.

●Te Pumautanga o te Wera me te Ā-MīhiniMā te piri kaha ki te karāpeti, te iti o te horapa wera (6.3×10⁻⁶/K), me te pakeke (~2000 HK) ka roa te ora i raro i te huringa wera.

II. Te paninga TaC i roto i te hanga i ngā taputapu hiko: Ngā tono matua

He mea nui ngā wāhanga karāpiti kua pania ki te TaC i roto i te hanganga haurua-ā-ira matatau, inā koa mō ngā taputapu silicon carbide (SiC) me te gallium nitride (GaN). Kei raro nei ō rātou whakamahinga nui:

1. Te Tiputanga o te Tioata Kotahi SiC

He mea nui ngā papa SiC mō ngā hikohiko mana me ngā waka hiko. Ka whakamahia ngā ipu para me ngā mea ārai i pania ki te TaC i roto i ngā pūnaha Kawe Kohu Tinana (PVT) me ngā pūnaha CVD Mahana-Teitei (HT-CVD) hei:

● Pehi i te pokeKo te iti o te poke o TaC (hei tauira, ko te boron <0.01 ppm vs. 1 ppm i roto i te karāpeti) ka whakaiti i ngā hapa o ngā tioata SiC, ka whakapai ake i te ātete o te wafer (4.5 ohm-cm vs. 0.1 ohm-cm mō te karāpeti kāore i pania).

● Whakapai ake i te Whakahaere WeraMā te tukunga ōrite (0.3 i te 1000°C) ka rite te tohatoha wera, ka pai ake te kounga o te tioata.

2. Te Tipu Epitaxial (GaN/SiC)

I roto i ngā tauhohenga CVD Metal-Organic (MOCVD), ko ngā wāhanga kua pania ki te TaC pērā i ngā kaikawe wafer me ngā werohanga:

●Ārai i ngā Tauhohenga HauĀtete ki te whakairohia e te haukini me te hauwai i te 1400°C, me te pupuri tonu i te pumau o te tauhohenga.

●Whakapai ake i te HuaMā te whakaiti i te maturuturunga o ngā matūriki mai i te karāpeti, ka whakaitihia e te paninga CVD TaC ngā hapa i roto i ngā paparanga epitaxial, he mea nui mō ngā LED mahi-teitei me ngā taputapu RF.

3. Ētahi atu Whakamahinga Ā-Haumaru

●Ngā Tauhohenga Pāmahana-TeiteiKa whai hua ngā whakapūmau me ngā whakamahana i roto i te hanga GaN i te pumau o TaC i roto i ngā taiao whai hauwai.

●Te Whakahaere i te Wafer: Ka whakaitihia e ngā wāhanga paninga pēnei i ngā mowhiti me ngā taupoki te paru whakarewa i te wā e whakawhitihia ana te wafer

Ⅲ. He aha i pai ake ai te mahi a te TaC Coating i ngā momo kē atu?

Mā te whakataurite ki ngā rauemi tuku iho ka kitea te hiranga o TaC:

Ngā raraunga i ahu mai i ngā whakataurite ahumahi

IV. He aha i whiriwhiri ai i te VET?

Whai muri i te haumi tonu ki te rangahau me te whanaketanga hangarau,Te Tari Hauorangā wāhanga kua pania ki te Tantalum carbide (TaC), pērā iMowhiti arataki karāhe kua pania ki te TaC, Ārai pereti paninga CVD TaC, Te Ārai Paninga TaC mō ngā Taputapu Epitaxy,Rauemi karāhe porowhita kua pania ki te tantalum carbidemeHe ārai angiangi me te paninga TaC, he tino rongonui i ngā mākete o Ūropi me Amerika. E tino hiahia ana a VET ki te noho hei hoa mahi mō te wā roa.