O le a le TaC Coating?

I totonu o le alamanuia semiconductor faʻavavevave, mea e faʻaleleia ai le faʻatinoga, tumau, ma le lelei e taua tele. O se tasi o ia mea fou o le Tantalum Carbide (TaC) faʻapipiʻi, o se vaega puipui puipui e faʻaogaina i vaega o le kalafi. E su'esu'e e lenei blog le fa'auigaga a le coating TaC, tulaga fa'apitoa fa'apitoa, ma ana suiga fa'aoga ile gaosiga semiconductor.

Ⅰ. O le a le TaC Coating?

O le taC coating o se mea fa'apipi'i maualuga fa'atino e aofia ai tantalum carbide (se fa'afefiloi o tantalum ma carbon) fa'apipi'i i luga ole kalafi. O le faʻapipiʻi e masani ona faʻaogaina i le faʻaaogaina o le Chemical Vapor Deposition (CVD) poʻo le Physical Vapor Deposition (PVD), faʻavaeina se pa puipui mafiafia, ultra-mama e puipuia ai le kalafi mai tulaga ogaoga.

Meatotino Autu ole TaC Coating

●Maumau-maualuga Maualuluga: Talitonu i le vevela e sili atu i le 2200°C, e sili atu i mea masani e pei o le silicon carbide (SiC), lea e faʻaleagaina i luga ole 1600°C.

●Tete'e vaila'au: Tete'e a'a mai le hydrogen (H₂), ammonia (NH₃), ausa silikoni, ma u'amea u'amea, e taua tele mo siosiomaga gaosi semiconductor.

●Ultra-Mamaa maualuga: La'asaga le mama i lalo ole 5 ppm, fa'aiti'itia tulaga lamatia ile fa'atupuina tioata.

●Malosi ma le Fa'ainisinia: Faʻapipiʻi malosi i le graphite, faʻalauteleina le vevela (6.3 × 10⁻⁶ / K), ma le faʻamalosi (~ 2000 HK) faʻamautinoa le umi o le ola i lalo o le uila vevela.

Ⅱ. TaC Coating i Semiconductor Manufacturing: Talosaga Autu

TaC-coated graphite vaega e taua tele i le gaosiga semiconductor alualu i luma, aemaise mo masini carbide (SiC) ma gallium nitride (GaN). O lo'o i lalo a latou tulaga fa'aoga taua:

1. SiC Tufua Crystal Tuputupu ae

SiC wafers e taua tele mo eletise eletise ma taavale eletise. TaC-coated graphite crucibles ma susceptors o loʻo faʻaaogaina i le Physical Vapor Transport (PVT) ma le maualuga-Temperature CVD (HT-CVD) faiga e:

● Taofi le Fiafia: O le maualalo o le eleelea o le TaC (eg, boron <0.01 ppm vs. 1 ppm i graphite) faʻaitiitia faʻaletonu i tioata SiC, faʻaleleia le faʻafefeteina (4.5 ohm-cm vs. 0.1 ohm-cm mo le kalafi e leʻi faʻapipiʻiina).

● Faʻaleleia le puleaina o le vevela: Fa'asoa fa'ameaalofa (0.3 i le 1000°C) fa'amautinoaina le tufatufaina atu o le vevela, fa'amalieina le lelei o le tioata.

2. Epitaxial Growth (GaN/SiC)

I mea fa'ameamea fa'ameamea-Organic CVD (MOCVD), vaega fa'apipi'i TaC e pei o va'ava'ava'a ma injectors:

●Taofi Gaoioiga kesi: Tetee i le togiina e le amonia ma le hydrogen i le 1400°C, fa'atumauina le amio sa'o.

●Fa'aleleia le fua: E ala i le faʻaitiitia o le faʻamaligiina o meaʻai mai le graphite, o le CVD TaC coating e faʻaitiitia ai faʻaletonu i luga o le epitaxial layers, e taua tele mo LED maualuga ma masini RF.

3. Isi Talosaga Semiconductor

●Reactors Maualuluga: Susceptors ma fa'avevela i le GaN gaosiga e manuia mai le mautu o le TaC i totonu o le hydrogen-oa'oa siosiomaga.

●Taulimaina o Wafer: O vaega fa'apipi'i e pei o mama ma tapuni e fa'aitiitia ai le fa'aleagaina o u'amea i le taimi o le fa'afefeteina

Ⅲ. Aisea e sili atu ai le fa'aogaina o le TaC Coating i Suiga?

O se faʻatusatusaga ma mea masani e faʻamaonia ai le maualuga o le TaC:

Fa'amaumauga e maua mai fa'atusatusaga o alamanuia

IV. Aisea e filifili ai le VET?

A maeʻa faʻaauau tupe faʻafaigaluega i suʻesuʻega ma atinaʻe tekonolosi,VET's Tantalum carbide (TaC) vaega ufiufi, pei oTaC fa'apipi'i mama ta'iala graphite, CVD TaC Susceptor ipu ufiufi, TaC Coated Susceptor mo Meafaigaluega Epitaxy,Tantalum carbide ufiufi mea porous graphitemaSusceptor wafer ma le TaC coating, e sili ona lauiloa i maketi a Europa ma Amerika. VET o lo'o tulimatai atu ma le faamaoni e avea ma au paaga umi.