Thaum nws los txog rau lub qexov xwm lag luam, kev nkag siab txog qhov ua tiav ntawm kev tsim khoom semiconductor yog qhov tseem ceeb. semiconductor wafer yog cov khoom tseem ceeb hauv kev lag luam no, tab sis lawv feem ntau ntsib kev ua qias tuaj ntawm ntau yam kev tsis huv. Cov kev ua qias tuaj no, suav nrog atom, organic matter, metallic element ion, thiab oxide, tuaj yeem cuam tshuam rau cov txheej txheem tsim khoom.
Cov khoom me mexws li polymer thiab etching impurity ntseeg siab rau intermolecular force kom adsorb rau ntawm wafer qhov chaw, cuam tshuam rau cov cuab yeej photolithography.cov organic impuritieszoo li roj ntawm daim tawv nqaij homo thiab roj tshuab ua yeeb yaj kiab rau ntawm lub wafer, cuam tshuam kev ntxuav.cov khoom siv hlau ionszoo li hlau thiab txhuas feem ntau raug tshem tawm los ntawm kev tsim cov hlau ion complex.Cov oxidescuam tshuam cov txheej txheem tsim khoom thiab feem ntau raug tshem tawm los ntawm kev tsau hauv cov kua qaub hydrofluoric dilute.
cov txheej txheem tshuaj lom neegFeem ntau siv los ntxuav thiab nias cov semiconductor wafer. Cov txheej txheem ntxuav cov tshuaj noo xws li kev muab cov kua dej tso rau hauv qab thiab kev txhuam tshuab yog qhov nrov heev. Cov txheej txheem ntxuav supersonic thiab megasonic muaj cov hau kev zoo los tshem tawm cov khoom tsis huv. Kev ntxuav tshuaj qhuav, suav nrog cov thev naus laus zis plasma thiab gas phase, kuj ua lub luag haujlwm hauv cov txheej txheem ntxuav semiconductor wafer.
Lub sijhawm tshaj tawm: Lub Kaum Hli-29-2024