SiC Wafer Nkoj Thiab Lub Tuav Rau Lub Rauv Ntsug
Silicon carbide wafer nkojyog qhov tseem ceeb rau kev txhawb nqa thiab thauj cov wafers hauv cov txheej txheem kub siab ntawm cov semiconductor wafers xws li diffusion, oxidation, thiab annealing. Nws cov kev ua tau zoo cuam tshuam ncaj qha rau qhov zoo ntawm cov khoom wafer thiab kev ua haujlwm ntau lawm.
Cov qauv tsim ntawm silicon carbide wafer nkoj:
Feem ntau muaj cov qauv slotted lossis comb-zoo li;
Ntau qhov rau kev tso thiab sib cais cov wafers;
Tsim los xav txog kev faib cov roj ntws, kom ntseeg tau tias muaj cua sov thiab txias sib xws;
Haum rau lub cub tawg ntsug thiab lub cub tawg kab rov tav;
Tsim los rau ntau qhov ntau thiab tsawg xws li 3 nti, 4 nti, 6 nti, 8 nti, 12 nti wafers.
VET Energy lub nkoj silicon carbide wafer tau tsim los ntawm kev siv cov thev naus laus zis sintering siab heev thiab tau tsim tshwj xeeb los ua kom tau raws li cov kev cai ntawm cov txheej txheem thauj khoom ntawm kev tsim khoom semiconductor siab heev. Lawv cov txiaj ntsig zoo tshaj plaws yog pom tseeb hauv cov hauv qab no:
1. Qhov Huv Si Kawg thiab Kev Ua Phem Tsawg Kawg Nkaus
Siv cov khoom siv raw uas muaj purity siab heev, peb xyuas kom meej tias cov khoom muaj cov hlau ion tsawg heev (tsawg dua 1 ppm rau Na, K, Fe, thiab Ca). Nag tsawg kawg nkaus ntawm qhov kub siab tiv thaiv kev ua qias tuaj ntawm wafer, ua kom muaj cov chips ntau thiab kev ntseeg tau, ua rau lawv yog qhov kev xaiv zoo tshaj plaws rau cov neeg uas xav ua kom tiav cov txheej txheem.
2. Kev Ua Haujlwm Zoo thiab Kev Ruaj Ntseg Zoo
Peb lub nkoj SiC wafer muaj cov thermal conductivity siab heev thiab tiv taus thermal shock zoo heev. Lawv tuaj yeem tiv taus qhov kub hloov pauv sai sai los ntawm chav tsev kub mus rau 1600 ℃ yam tsis muaj kev tawg lossis deformation, ua kom ntseeg tau tias cov txheej txheem rov ua dua thiab sib xws, txo qhov tsis tau npaj tseg vim muaj teeb meem ntawm tus neeg nqa khoom.
3. Kev Tiv Thaiv Corrosion Zoo Tshaj Plaws thiab Lub Zog Kho Tshuab
Muaj zog heev thiab tiv taus kev hnav, nrog rau kev tiv taus cov kua qaub thiab alkaline zoo heev, zoo dua li quartz thiab graphite. Nws lub zog kho tshuab zoo heev tiv thaiv kev tsim cov khoom me me thaum lub sijhawm ua haujlwm tsis siv neeg, ua rau nws lub neej ua haujlwm ntev dua thiab txo cov nqi khiav lag luam tag nrho.
4. Kev Tsim Qauv Zoo thiab Kev Sib Xws Zoo
Siv cov thev naus laus zis molding thiab ua cov txheej txheem siab heev, peb xyuas kom meej tias txhua lub nkoj wafer muaj qhov ntev geometric meej thiab qhov tseeb ntawm qhov chaw, ua kom muaj qhov sib nrug ntawm wafer thiab cua ntsawj ruaj khov.
| 重结晶碳化硅物理特性 Cov khoom siv lub cev ntawm Recrystallized Silicon Carbide | |
| 性质 / Khoom vaj khoom tsev | 典型数值 / Tus nqi ib txwm muaj |
| 使用温度/ Kub ua haujlwm (°C) | 1600 ° C (nrog oxygen), 1700 ° C (txo qhov chaw ib puag ncig) |
| SiC含量/ Cov ntsiab lus SiC | > 99.96% |
| 自由Si 含量/ Cov ntsiab lus Si pub dawb | < 0.1% |
| 体积密度/Qhov ceev ntawm cov khoom loj | 2.60-2.70 g/cm33 |
| 气孔率Pom tseeb porosity | < 16% |
| 抗压强度/ Lub zog nias | > 600MPa |
| 常温抗弯强度/Lub zog khoov txias | 80-90 MPa (20°C) |
| 高温抗弯强度Lub zog khoov kub | 90-100 MPa (1400 ° C) |
| 热膨胀系数/ Kev nthuav dav ntawm cua sov @ 1500 ° C | 4.70 10-6/°C |
| 导热系数/Kev ua kom sov tau @1200 ° C | 23W/m•K |
| 杨氏模量/ Cov qauv elastic | 240 GPa |
| 抗热震性/ Kev tiv thaiv thermal poob siab | Zoo kawg nkaus |
VET Zog yog ib lub chaw tsim khoom uas tsom mus rau R & D thiab kev tsim cov khoom siv siab heev xws li graphite, silicon carbide, quartz, nrog rau cov khoom siv kho xws li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam. Cov khoom siv dav siv hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam.
Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau dua rau koj.
Cov txiaj ntsig ntawm VET Energy suav nrog:
• Muaj lub Hoobkas thiab chaw kuaj mob tshaj lij;
• Cov qib kev huv thiab qhov zoo uas ua tus thawj coj hauv kev lag luam;
• Tus nqi sib tw & Lub sijhawm xa khoom sai;
• Kev koom tes ntau yam lag luam thoob ntiaj teb;
Peb txais tos koj tuaj xyuas peb lub Hoobkas thiab chaw kuaj mob txhua lub sijhawm!












