Isikebhe Se-SiC Esiyindilinga Nesiphathi Sesithando Esiqondile

Isikebhe Se-SiC Esiyindilinga Nesiphathi Sesithando Esiqondile

Isikebhe se-silicon carbide esithambileikakhulukazi ukusekela nokuthutha ama-wafer ezinqubweni zokushisa eziphakeme zama-wafer e-semiconductor njengokusabalalisa, ukujiya, kanye nokufaka i-annealing. Ukusebenza kwawo kuthinta ngqo ikhwalithi yomkhiqizo we-wafer kanye nokusebenza kahle kokukhiqiza.

Imiklamo yesakhiwo sesikebhe se-silicon carbide wafer:
Ngokuvamile inesakhiwo esinezimbobo noma esifana nekamu;
Izikhala eziningi zokubeka nokuhlukanisa ama-wafer;
Yakhelwe ukucabangela ukusatshalaliswa kokugeleza kwegesi, ukuqinisekisa ukushisa nokupholisa okufanayo;
Ifanele isithando somlilo esiqondile nesithando somlilo esivundlile;
Yakhelwe osayizi abahlukene njengama-wafer angu-3 intshi, 4 intshi, 6 intshi, 8 intshi, 12 intshi.

Izikebhe ze-wafer ze-silicon carbide ze-VET Energy zenziwe kusetshenziswa ubuchwepheshe obuthuthukisiwe bokuthulula futhi zenzelwe ngqo ukuhlangabezana nezidingo eziqinile zokuthwala izinqubo zokukhiqiza i-semiconductor ethuthukisiwe. Izinzuzo zazo zobuchwepheshe eziphakeme zibonakala kakhulu kulezi zici ezilandelayo:

1. Ukuhlanzeka Okuphelele kanye Nokungcola Okuphansi Kakhulu
Sisebenzisa izinto zokusetshenziswa ezihlanzekile kakhulu, siqinisekisa ukuthi umkhiqizo unokuqukethwe kwe-ion yensimbi okuphansi kakhulu (ngaphansi kwe-1 ppm ye-Na, K, Fe, kanye ne-Ca). Imvula encane emazingeni okushisa aphezulu ivimbela ngempumelelo ukungcoliswa kwe-wafer, iqinisekisa ukukhiqizwa okuphezulu kwe-chip kanye nokuthembeka, okwenza kube ukukhetha okuhle kulabo abalwela ukuphelela kwenqubo.
2. Ukusebenza Okuhle Kakhulu Kokushisa Nokuzinza
Isikebhe sethu se-SiC wafer sinokudluliswa kokushisa okuphezulu kakhulu kanye nokumelana okuhle kakhulu nokushaqeka kokushisa. Singakwazi ukumelana nokushintshashintsha kwezinga lokushisa okusheshayo kusukela ekushiseni kwegumbi kuya ku-1600℃ ngaphandle kokuqhekeka noma ukuguquka, okuqinisekisa ukuphindaphindwa kwenqubo kanye nokungaguquguquki, okunciphisa kakhulu isikhathi sokungasebenzi esingahleliwe ngenxa yezinkinga zomthwali.
3. Ukumelana Okungavamile Kokugqwala kanye Nokuqina Kwemishini
Ukuqina okuphezulu kanye nokumelana okunamandla kokuguguleka, kanye nokumelana okumangalisayo ezindaweni ezine-acidic kanye ne-alkaline, kudlula kakhulu i-quartz kanye ne-graphite. Amandla ayo amangalisayo okusebenza avimbela ngempumelelo ukukhiqizwa kwezinhlayiya ngesikhathi sokuphathwa okuzenzakalelayo okuvamile, okwandisa kakhulu impilo yayo yesevisi futhi kunciphisa izindleko zokusebenza zizonke.
4. Umklamo Oqondile Nokuhambisana Okuhle Kakhulu
Sisebenzisa ubuchwepheshe obuthuthukisiwe bokubumba nokucubungula, siqinisekisa ukuthi isikebhe ngasinye se-wafer sinezilinganiso eziqondile zejometri kanye nokunemba okuphezulu kobuso, siqinisekisa izikhala ezifanayo ze-wafer kanye nokuhamba komoya okuzinzile.