Onye na-ebu ICP Etch

Nkọwa Ngwaahịa

Ụlọ ọrụ anyị na-enye ọrụ usoro mkpuchi SiC site na usoro CVD n'elu graphite, seramiiki na ihe ndị ọzọ, ka gas pụrụ iche nwere carbon na silicon meghachi omume na okpomọkụ dị elu iji nweta molekul SiC dị ọcha, molekul ndị a na-etinye n'elu ihe ndị a kpuchiri ekpuchi, na-emepụta oyi akwa nchekwa SIC.

Isi atụmatụ:

1. Nguzogide oxidation okpomọkụ dị elu:

Nguzogide oxidation ka dị mma nke ukwuu mgbe okpomọkụ dị elu ruo 1600 Celsius.

2. Ịdị ọcha dị elu: ejiri ihe e ji ekpofu uzuoku mee ya n'okpuru ọnọdụ okpomọkụ dị elu nke chlorine.

3. Mgbochi mbuze: ike siri ike, elu dị obere, obere ihe.

4. Mgbochi nke ire ere: asịd, alkali, nnu na ihe ndị sitere n'okike.

Nkọwapụta Isi nke mkpuchi CVD-SIC