Ihe na-egbochi ọkpọkọ SiC

Nkọwa Dị Mkpirikpi:

VET Energy SiC Coated Barrel Suscepter bụ ngwaahịa dị elu nke e mere iji nye arụmọrụ na-adịgide adịgide ma bụrụ nke a pụrụ ịtụkwasị obi ruo ogologo oge. Ọ nwere ezigbo iguzogide okpomọkụ na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, iguzogide mbuze, na-eme ka ọ bụrụ ihe ngwọta zuru oke maka ngwa nhazi wafer.

Ebe Mmalite:Chaịna

Nhazi kristal:Usoro FCCβ

Njupụta:3.21 g/cm;

Ike:Ndị Vickers 2500;

Nha ọka:2 ~ 10μm;

Ịdị Ọcha Kemịkalụ:99.99995%;

Ike Okpomọkụ:640J·kg-1·K-1;

Okpomọkụ Sublimation:2700℃;

Ike Felexural:415 Mpa (RT 4-Point);

Modulu Young:430 Gpa (ngbagọ 4pt, 1300℃);

Mgbasawanye Okpomọkụ (CTE):4.5 10-6K-1;

Ọgbakọ okpomọkụ:300(W/MK);

Zitere anyị ozi-e Budata ya dị ka PDF

Nkọwa Ngwaahịa

Akara Ngwaahịa

ihe na-egbochi gbọmgbọm is a igodoihe eji eme ihe n'ọtụtụ usoro mmepụta semiconductor dị iche iche.Anyị na-eji teknụzụ patent anyị emepụta iheihe na-egbochi gbọmgbọmnaịdị ọcha dị oke elu,ọ dị mmamkpuchiotu ihena ndụ ọrụ magburu onwe ya, yanannukwu iguzogide kemịkalụ na ihe ndị na-eme ka okpomọkụ sie ike.

Ike VET bụ O nwere ike ịbụ na o meghị ihe ọbụla gbasara ya.ezigbo onye nrụpụta ngwaahịa graphite na silicon carbide ahaziri ahazi nwere mkpuchi CVD,ike inyedị iche icheakụkụ ahaziri ahazi maka ụlọ ọrụ semiconductor na photovoltaic. ONdị otu teknụzụ gị si n'ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye azịza ihe ọkachamara karịamaka gị.

Anyị na-emepụta usoro dị elu mgbe niile iji nye ihe ndị ka elu,naAchọpụtala teknụzụ pụrụ iche nke nwere ikike pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi ahụ na ihe mkpuchi ahụ sie ike ma ghara ịdị mfe ịgbawa.

Fnri nke ngwaahịa anyị:

1. Oke okpomọkụ na-eguzogide oxidation ruo 1700℃.
2. Ịdị ọcha dị elu naotu ihe dị n'otu okpomọkụ
3. Ezigbo nguzogide nchara: acid, alkali, nnu na ihe ndị sitere n'okike.
4. Ike siri ike, elu dị obere, obere ihe.
5. Ndụ ọrụ dị ogologo ma na-adịgide adịgide karịa

CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
性质 / Ihe onwunwe	典型数值 / Uru nkịtị
晶体结构 / Nhazi kristal	FCC β nkebi多晶，主要为（111) 取向
密度 / Njupụta	3.21 g/cm³
硬度 / Ike siri ike	2500 维氏硬度： (ibu 500g)
晶粒大小 / SiZe ọka	2 ~ 10μm
纯度 / Ịdị ọcha nke kemịkalụ	99.99995%
热容 / Ike Okpomọkụ	640 J·kg^-1·K^-1
升华温度 / Okpomọkụ Sublimation	2700℃
抗弯强度 / Ike nke Flexural	415 MPa RT isi ihe anọ
杨氏模量 / Modulu Young	430 GPA 4pt gbagọrọ agbagọ, 1300℃
导热系数 / ThermalNhazigharị	300W·m^-1·K^-1
热膨胀系数 / Mgbasawanye Okpomọkụ (CTE)	4.5 × 10^-6K^-1