Pūwero Paera Panipani SiC

Whakaahuatanga Poto:

He hua mahi-teitei te VET Energy SiC Coated Barrel Susceptor i hangaia hei whakarato i te mahi pumau me te pono mō te wā roa. He tino pai te ātete ki te wera me te ōritetanga o te wera, he tino parakore, he ātete ki te horo, ā, koinei te otinga tino pai mō ngā tono tukatuka wafer.

Te Wāhi Taketake:Haina

Hanganga karaihe:Wāhanga FCCβ

Kiato:3.21 karamu/cm;

Te pakeketanga:2500 Vickers;

Rahi o te witi:2~10μm;

Te Parakore o te Matū:99.99995%;

Te kaha wera:640J·kg-1·K-1;

Te Pāmahana Whakatōtō:2700℃;

Te Kaha o te Felexural:415 Mpa (RT 4-Pōhi);

Te Tauwehenga o te Rangatahi:430 GPA (piko 4pt, 1300℃);

Te Whakawhanuitanga Wera (CTE):4.5 10-6K-1;

Te Arahi Wera:300（W/MK）;

Tukua mai he īmēra ki a mātou Tikiake hei PDF

Taipitopito Hua

Ngā Tohu Hua

Pūwero o te oko is a kīwāhanga e whakamahia ana i roto i ngā tukanga hangahanga semiconductor rerekē.Ka whakamahia e mātou ā mātou hangarau patent hei hanga i tepūwero okometino teitei te parakore,paipaningaōritetangame te ora ratonga tino pai, mengā āhuatanga ātete matū teitei me te pumau wera.

Ko te Pūngao VET tekaihanga tūturu o ngā hua karāpeti me te karāpeti silicon kua whakaritea me te paninga CVD,ka taea te tukungā momongā wāhanga kua whakaritea mō te umanga semiconductor me te photovoltaic. ONō ngā umanga rangahau ā-rohe nui tō mātou tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake.māu.

Ka whakawhanake tonu mātou i ngā tukanga matatau hei whakarato i ngā rauemi matatau ake,mekua hangaia he hangarau motuhake kua patenttia, hei whakakaha ake i te hononga i waenga i te paninga me te papa, ā, hei whakaiti ake i te ngāwari o te wetewete.

Fngā āhuatanga o ā mātou hua:

1. Te ātete ki te waikura pāmahana teitei tae atu ki te 1700℃.
2. Te parakore teitei me tete ōritetanga o te wera
3. Ātete pai ki te waikura: waikawa, kawakore, tote me ngā matū waro.
4. He pakeke rawa, he mata kiato, he matūriki angiangi.
5. He roa ake te ora ratonga, he pakari ake

CVD SiC薄膜基本物理性能 Ngā āhuatanga ā-tinana taketake o te CVD SiCpaninga
性质 / Taonga	典型数值 / Uara Noa
晶体结构 / Hanganga Karaihe	Wāhanga β FCC多晶，主要为（111）取向
密度 / Kiato	3.21 karamu/cm³
硬度 / Te pakeketanga	2500 维氏硬度（500g kawenga）
晶粒大小 / Rahi o te Witi	2~10μm
纯度 / Te Parakore o te Matū	99.99995%
热容 / Te kaha wera	640 J·kg^-1·K^-1
升华温度 / Te Pāmahana Whakatōtō	2700℃
抗弯强度 / Kaha Whakapiko	415 MPa RT 4-ira
杨氏模量 / Te Tauwehenga o te Young	430 Gpa 4pt piko, 1300℃
导热系数 / Te whakamahanalTe kawe i te hiko	300W·m^-1·K^-1
热膨胀系数 / Te Whanuitanga Wera (CTE)	4.5×10^-6K^-1