Vet-china itanga uburyo bushya bwo gutunganya ibintu hakoreshejwe icyuma gishyuha cya Vertical Column Wafer Boat & Pedestal, igisubizo cyuzuye cyo gutunganya ibintu hakoreshejwe icyuma gishyuha cya semiconductor. Ubu buryo bwo gutunganya ibintu hakoreshejwe icyuma gishyuha bwakozwe neza cyane, butanga ituze n'uburyo bwo guhuza ibintu, bikaba ari ingenzi cyane mu gukora ibintu mu buryo bwiza.
Ubwoya bwa Vertical Column Wafer Boat & Pedestal bwubatswe n'ibikoresho by'igiciro cyihariye bitanga icyizere cyo kudahungabana k'ubushyuhe no kurwanya ingese, bigatuma bukoreshwa mu gukora ibikoresho bya semiconductor bigoye cyane. Imiterere yabwo yihariye y'inkingi ihagaze ishyigikira neza wafers, bigabanya ibyago byo kwangirika no kwangirika mu gihe cyo gutwara no gutunganya.
Hamwe n’uburyo bwa Vertical Column Wafer Boat & Pedestal bwa vet-china, abakora ibikoresho bya semiconductor bashobora kwitega ko umusaruro wabo uzamuka, igihe cyo gukora kigabanuka, ndetse n’umusaruro w’ibicuruzwa wiyongera. Ubu buryo bujyanye n’ingano zitandukanye za wafer n’imiterere yazo, butanga uburyo bworoshye bwo gukora no kwaguka bitewe n’ibikenewe mu musaruro bitandukanye.
Ubushake bwa vet-china mu gukora neza butuma buri bwato bwa Vertical Column Wafer Boat & Pedestal bwujuje ibisabwa byo mu rwego rwo hejuru by’ubuziranenge n’imikorere. Mu guhitamo iki gisubizo gigezweho, uba ushora imari mu buryo bwo gucunga wafer bushobora kuzahura n’igihe kizaza, bugatuma habaho imikorere myiza n’ubwizerwe mu gukora semiconductor.
Imiterere ya karubide ya silikoni yasubiwemo
Karubide ya silikoni ikoreshwa mu gusya (R-SiC) ni ibikoresho bikora neza cyane kandi bifite ubukana bwa kabiri nyuma ya diyama, ikaba ikora ku bushyuhe buri hejuru ya 2000°C. Igumana imiterere myiza ya SiC, nko gukomera ku bushyuhe bwinshi, kurwanya ingese cyane, kurwanya ogisijeni neza, kurwanya ubushyuhe neza n'ibindi.
● Imiterere myiza cyane ya mekanike. Karubide ya silikoni isubijwemo ifite imbaraga n'ubukana bwinshi kurusha fibre ya karuboni, irwanya ingaruka nyinshi, ishobora kugira imikorere myiza mu bushyuhe bukabije, ishobora kugira imikorere myiza mu bihe bitandukanye. Byongeye kandi, ifite ubushobozi bwo koroha kandi ntiyoroshye kwangirika no kurambura no kunama, ibyo bikaba birushaho kunoza imikorere yayo.
● Irwanya cyane ingese. Karubide ya silikoni isubijwemo ifite ubudahangarwa bwinshi ku ngese ku buryo bwinshi, ishobora gukumira isenyuka ry’ingese zitandukanye, ishobora kugumana imiterere yayo ya mekanike igihe kirekire, ifite ubushobozi bwo gufata neza, ku buryo imara igihe kirekire. Byongeye kandi, ifite ubushyuhe bwiza, ishobora kwihuza n’impinduka zimwe na zimwe z’ubushyuhe, inongera ingaruka zayo mu ikoreshwa ryayo.
● Gutunganya ibintu ntibigabanuka. Kubera ko uburyo bwo gutunganya ibintu butagabanuka, nta kintu na kimwe gisigaye gishobora gutuma ibicuruzwa bihinduka cyangwa bigacika, kandi ibice bifite imiterere igoye kandi bifite ubuhanga buhanitse bishobora gutegurwa.
| 重结晶碳化硅物理特性 Imiterere ifatika ya Silicon Carbide yongeye gukoreshwa | |
| 性质 / Umutungo | 典型数值 / Agaciro Gasanzwe |
| 使用温度/ Ubushyuhe bw'akazi (°C) | 1600°C (harimo ogisijeni), 1700°C (ibidukikije bigabanya) |
| SiC含量/ Ibikubiye muri SiC | > 99.96% |
| 自由Si 含量/ Ibikubiyemo bya Si ku buntu | < 0.1% |
| 体积密度/Ubucucike bw'umubyimba | 2.60-2.70 g/cm3 |
| 气孔率/ Ubuso bugaragara nk'ubufite imyenge | < 16% |
| 抗压强度/ Imbaraga zo gukanda | > 600MPa |
| 常温抗弯强度/Imbaraga zo kunama zikonje | 80-90 MPa (20°C) |
| 高温抗弯强度Imbaraga zishyushye zo kunama | 90-100 MPa (1400°C) |
| 热膨胀系数/ Kwaguka k'ubushyuhe kuri 1500°C | 4.70 10-6/°C |
| 导热系数/Ubushobozi bwo gutwara ubushyuhe kuri 1200°C | 23Ubuso/m•K |
| 杨氏模量/ Moduli ya elastic | 240 GPa |
| 抗热震性/ Ubudahangarwa bw'ingufu ziterwa n'ubushyuhe | Ni byiza cyane |
VET Energy ni iuruganda nyarwo rukora ibikoresho bya graphite na silicon carbide byihariye hamwe n'imvange ya CVD,ishobora gutangabitandukanyeibice byihariye byo mu nganda za semiconductor na photovoltaic. OItsinda ryanyu rya tekiniki rituruka mu bigo bikomeye by’ubushakashatsi mu gihugu, rishobora gutanga ibisubizo by’ibikoresho by’umwuga.kuri wowe.
Dukomeza guteza imbere inzira zigezweho kugira ngo dutange ibikoresho bigezweho,nabakoze ikoranabuhanga ryihariye rifite patenti, rishobora gutuma isano iri hagati y’igitambaro n’icyuma gifunga ibintu irushaho gukomera kandi ntigishobora gutandukana cyane.
| CVD SiC薄膜基本物理性能 Imiterere y'ibanze ya CVD SiCgusiga | |
| 性质 / Umutungo | 典型数值 / Agaciro Gasanzwe |
| 晶体结构 / Imiterere ya kristu | Icyiciro cya FCC β多晶，主要为（111 ）取向 |
| 密度 / Ubucucike | 3.21 g/cm³ |
| 硬度 / Ubukomere | 2500 维氏硬度（ 500g umutwaro） |
| 晶粒大小 / Ubunini bw'ibinyampeke | 2 ~ 10μm |
| 纯度 / Ubuziranenge bw'ibinyabutabire | 99.99995% |
| 热容 / Ubushobozi bwo gushyuha | 640 J·kg-1·K-1 |
| 升华温度 / Ubushyuhe bwo gushyuha | 2700℃ |
| 抗弯强度 / Imbaraga zo Kongera Uburemere | 415 MPa RT ifite amanota 4 |
| 杨氏模量 / Modulus y'Abana | 430 Gpa 4pt bend, 1300℃ |
| 导热系数 / ThermalUbushobozi bwo kuyobora | 300W·m-1·K-1 |
| 热膨胀系数 / Kwagura ubushyuhe (CTE) | 4.5×10-6K-1 |
Turaguhaye ikaze mu gusura uruganda rwacu, reka tugire ibiganiro birambuye!
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