Ka whakaatu a vet-china i te Pouaka Whakarewa Poutū me te Pedestal auaha, he otinga whānui mō te tukatuka haurua-ā-ira matatau. I hangaia me te tino tika, ka whakaratohia e tēnei pūnaha whakahaere haurua te pumau me te whakatikatika kāore i te rite, he mea nui mō ngā taiao hangahanga tino whai hua.
He mea hanga te Waka me te Pedestal Poutū Poutū ki ngā rauemi kounga teitei e whakapūmau ana i te pumau o te wera me te ātete ki te waikura matū, e pai ai mō ngā tukanga hanga semiconductor tino uaua. Ko tōna hoahoa poutū ahurei e tautoko ana i ngā wafers me te haumaru, e whakaiti ana i te tūponotanga o te he o te tūnga me te kino pea i te wā e kawe ana me te tukatuka.
Mā te whakaurunga o te Pouaka Wafer Poutū me te Pedestal a vet-china, ka taea e ngā kaihanga haurua-ira te tumanako ka pai ake te mahi, ka iti ake te wā kore mahi, ka nui ake hoki te hua o te hua. He hototahi tēnei pūnaha ki ngā rahi me ngā whirihoranga wafer rerekē, e tuku ana i te ngāwari me te tauine mō ngā hiahia whakaputa rerekē.
Mā te whakapau kaha a vet-china ki te hiranga ka tutuki i ia Waka Wafer Poutū me te Pedestal ngā paerewa kounga me te mahi tino teitei. Mā te whiriwhiri i tēnei otinga hou, ka haumi koe ki tētahi huarahi ā-mua mō te whakahaere wafer e whakanui ana i te pai me te pono o te hanga semiconductor.
Ngā āhuatanga o te karawiti silicon kua whakakākanotia anō
Ko te karawiti silicon kua whakakōkītia anō (R-SiC) he rauemi mahi-teitei, ko tōna pakeke te tuarua ki te taimana, ka hangaia i te pāmahana teitei i runga ake i te 2000℃. He maha ngā āhuatanga pai o te SiC e mau tonu ana, pērā i te kaha pāmahana teitei, te ātete kaha ki te waikura, te ātete pai ki te waikura, te ātete pai ki te ru wera me ētahi atu.
● Ngā āhuatanga miihini tino pai. He kaha ake, he pakari ake hoki te karawiti silicon kua whakakōkītia anō i te muka waro, he ātete nui ki te pānga, ka taea te mahi pai i roto i ngā taiao pāmahana tino kino, ka taea te mahi taurite pai ake i roto i ngā āhuatanga maha. Hei tāpiri, he pai hoki tōna ngāwari, ā, kāore e pakaru wawe i te totoro me te piko, ka tino whakapai ake i tana mahi.
● He ātete nui ki te waikura. He ātete nui te warowaihā silicon kua whakakōkīhia ki ngā momo rauemi, ka ārai i te mimiti o ngā momo rauemi waikura, ka pupuri i ōna āhuatanga miihini mō te wā roa, he kaha te piri, ā, he roa ake tōna ora mahi. Hei tāpiri, he pai hoki tōna pumau wera, ka taea te urutau ki tētahi whānuitanga o ngā huringa pāmahana, me te whakapai ake i tōna pānga tono.
● Kāore te mahi whakahinuhinu e mimiti. Nā te mea kāore te tukanga whakahinuhinu e mimiti, kāore he ahotea toenga e puta ai he rerekētanga, he ngatata rānei o te hua, ā, ka taea te whakarite i ngā wāhanga he uaua te āhua me te tino tika.
| 重结晶碳化硅物理特性 Ngā āhuatanga ā-tinana o te Silicon Carbide kua Whakakāhia anō | |
| 性质 / Taonga | 典型数值 / Uara Noa |
| 使用温度/ Te pāmahana mahi (°C) | 1600°C (me te hāora), 1700°C (taiao whakaiti) |
| SiC含量/ Ihirangi SiC | > 99.96% |
| 自由Si含量/ Ngā ihirangi Si Koreutu | < 0.1% |
| 体积密度/Kīanga papatipu | 2.60-2.70 karamu/cm3 |
| 气孔率/ Te āhua o te pūngao | < 16% |
| 抗压强度/ Kaha pēhanga | > 600MPa |
| 常温抗弯强度/Kaha piko makariri | 80-90 MPa (20°C) |
| 高温抗弯强度Kaha piko wera | 90-100 MPa (1400°C) |
| 热膨胀系数/ Te whānui wera i te 1500°C | 4.70 10-6/°C |
| 导热系数/Te kawe wera @1200°C | 23W/m•K |
| 杨氏模量/ Te tauwehenga rapa | 240 GPa |
| 抗热震性/ Ātete ki te ru wera | Tino pai |
Ko te Pūngao VET tekaihanga tūturu o ngā hua karāpeti me te karāpeti silicon kua whakaritea me te paninga CVD,ka taea te tukungā momongā wāhanga kua whakaritea mō te umanga semiconductor me te photovoltaic. ONō ngā umanga rangahau ā-rohe nui tō mātou tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake.māu.
Ka whakawhanake tonu mātou i ngā tukanga matatau hei whakarato i ngā rauemi matatau ake,mekua hangaia he hangarau motuhake kua patenttia, hei whakakaha ake i te hononga i waenga i te paninga me te papa, ā, hei whakaiti ake i te ngāwari o te wetewete.
| CVD SiC薄膜基本物理性能 Ngā āhuatanga ā-tinana taketake o te CVD SiCpaninga | |
| 性质 / Taonga | 典型数值 / Uara Noa |
| 晶体结构 / Hanganga Karaihe | Wāhanga β FCC多晶，主要为（111）取向 |
| 密度 / Kiato | 3.21 karamu/cm³ |
| 硬度 / Te pakeketanga | 2500 维氏硬度（500g kawenga） |
| 晶粒大小 / Rahi o te Witi | 2~10μm |
| 纯度 / Te Parakore o te Matū | 99.99995% |
| 热容 / Te kaha wera | 640 J·kg-1·K-1 |
| 升华温度 / Te Pāmahana Whakatōtō | 2700℃ |
| 抗弯强度 / Kaha Whakapiko | 415 MPa RT 4-ira |
| 杨氏模量 / Te Tauwehenga o te Young | 430 Gpa 4pt piko, 1300℃ |
| 导热系数 / Te whakamahanalTe kawe i te hiko | 300W·m-1·K-1 |
| 热膨胀系数 / Te Whanuitanga Wera (CTE) | 4.5×10-6K-1 |
Nau mai haere mai ki tō mātou wheketere, kia kōrero anō tātou!
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