SiC coating graphite MOCVD Wafer carriers, Graphite Susceptors bakeng sa SiC Epitaxy

Tlhaloso e Khutšoanyane:

Sekoahelo sa SiC sa substrate ea Graphite bakeng sa lits'ebetso tsa Semiconductor se hlahisa karolo e nang le bohloeki bo phahameng le ho hanyetsa sepakapaka se oxidizing. CVD SiC kapa CVI SiC e sebelisoa ho Graphite ea likarolo tse bonolo kapa tse rarahaneng tsa moralo. Sekoahelo se ka sebelisoa ka botenya bo fapaneng le likarolong tse kholo haholo.

Sebaka sa Tšimoloho:Zhejiang, China (Bohareng)

Nomoro ea Mohlala:Nomoro ea Mohlala:

Sebopeho sa Lik'hemik'hale:Graphite e koahetsoeng ka SiC

Matla a ho tenyetseha:470Mpa

Ho tsamaisa mocheso:300 W/mK

Boleng:E phethahetse

Mosebetsi:CVD-SiC

Kopo:Semiconductor / Photovoltaic

Botenya:3.21 g/cc

Katoloso ea mocheso:4 10-6/K

Molora: <5ppm

Mohlala:E fumaneha

Khoutu ea HS:6903100000

Romella imeile ho rona Khoasolla e le PDF

Qaqiso ea Sehlahisoa

Li-tag tsa Sehlahisoa

SiC coating graphite MOCVD Wafer carriers, Graphite Susceptors bakeng saSiC Epitaxy,
Lisebelisoa tsa khabone tse thusang ho boloka matla, Li-susceptors tsa graphite epitaxy, Lisebelisoa tsa tšehetso ea grafiti, Mohlahisi oa MOCVD, SiC Epitaxy, Li-Susceptor tsa Wafer,

Melemo e ikhethang ea li-susceptor tsa rona tsa graphite tse koahetsoeng ke SiC e kenyelletsa bohloeki bo phahameng haholo, ho koahela ka ho tšoana le bophelo bo botle ba ts'ebeletso. Li boetse li na le khanyetso e phahameng ea lik'hemik'hale le litšobotsi tsa botsitso ba mocheso.

Ho koahela SiC ha karolo e ka tlas'a Graphite bakeng sa lits'ebetso tsa Semiconductor ho hlahisa karolo e nang le bohloeki bo phahameng le ho hanyetsa sepakapaka se oxidizing.
CVD SiC kapa CVI SiC e sebelisoa ho Graphite ea likarolo tse bonolo kapa tse rarahaneng tsa moralo. Sekoahelo se ka sebelisoa ka botenya bo fapaneng le likarolong tse kholo haholo.

Sekoahelo sa SiC/se koahetsoeng sa MOCVD Susceptor

Likaroloana:
· Khanyetso e Hlollang ea Thermal Shock
· Khanyetso e Hlollang ea 'Mele ea ho Tšoaroa ke Tšabo
· Khanyetso e Hlollang ea Lik'hemik'hale
· Bohloeki bo Phahameng ka ho Fetisisa
· Ho fumaneha ka Sebopeho se Rarahaneng
· E ka sebelisoa tlas'a Oxidizing Atmosphere

Kopo:

Matlotlo a Tloaelehileng a Thepa ea Motheo ea Graphite:

Botenya bo Bonahalang:	1.85 g/cm3
Ho hanyetsa motlakase:	11 μΩm
Matla a ho Flexural:	49 MPa (500kgf/cm2)
Ho Tiea ha Lebōpo:	58
Molora:	<5ppm
Ho tsamaisa mocheso:	116 W/mK (100 kcal/mhr-℃)

Lisebelisoa tsa khabone tse thusang ho boloka matlale likarolo tsa graphite bakeng sa li-reactor tsohle tsa hona joale tsa epitaxy. Potefolio ea rona e kenyelletsa li-susceptor tsa libarele bakeng sa li-unit tse sebelisitsoeng le tsa LPE, li-susceptor tsa li-pancake bakeng sa li-unit tsa LPE, CSD, le Gemini, le li-susceptor tsa wafer tse le 'ngoe bakeng sa li-unit tse sebelisitsoeng le tsa ASM. Ka ho kopanya likamano tse matla le li-OEM tse etellang pele, boiphihlelo ba thepa le tsebo ea tlhahiso, SGL e fana ka moralo o motle bakeng sa kopo ea hau.