Tacewar tururin sinadarai(CVD)ita ce fasahar da aka fi amfani da ita a masana'antar semiconductor don adana nau'ikan kayayyaki iri-iri, gami da nau'ikan kayan rufewa iri-iri, yawancin kayan ƙarfe da kayan ƙarfe.
CVD fasaha ce ta gargajiya ta shirya fim mai siriri. Manufarta ita ce amfani da abubuwan da suka riga suka shiga iskar gas don lalata wasu abubuwa a cikin abin da ya riga ya shiga ta hanyar halayen sinadarai tsakanin kwayoyin halitta da kwayoyin halitta, sannan a samar da wani siriri a kan abin da ke ciki. Halayen asali na CVD sune: canje-canjen sinadarai (halayen sinadarai ko rugujewar zafi); duk kayan da ke cikin fim ɗin sun fito ne daga tushe na waje; masu amsawa dole ne su shiga cikin amsawar a cikin yanayin yanayin iskar gas.
Tarancin tururin sinadarai mai ƙarancin matsin lamba (LPCVD), tarancin tururin sinadarai mai haɓaka plasma (PECVD) da tarancin tururin sinadarai mai yawan yawa (HDP-CVD) su ne fasahohin CVD guda uku da aka saba amfani da su, waɗanda ke da manyan bambance-bambance a cikin tararin abu, buƙatun kayan aiki, yanayin aiki, da sauransu. Ga bayani mai sauƙi da kwatantawa na waɗannan fasahohi guda uku.
1. LPCVD (Ƙarancin Matsi na CVD)
Ka'ida: Tsarin CVD a ƙarƙashin yanayin matsin lamba mai ƙarancin ƙarfi. Ka'idarsa ita ce a saka iskar gas mai amsawa a cikin ɗakin amsawa a ƙarƙashin yanayin injin ko yanayin matsin lamba mai ƙarancin ƙarfi, a ruguje ko a mayar da iskar gas ɗin ta hanyar zafin jiki mai yawa, sannan a samar da wani fim mai ƙarfi da aka ajiye a saman substrate. Tunda ƙarancin matsin lamba yana rage karo da hayaki da turmutsi, daidaito da ingancin fim ɗin sun inganta. Ana amfani da LPCVD sosai a cikin silicon dioxide (LTO TEOS), silicon nitride (Si3N4), polysilicon (POLY), gilashin phosphosilicate (BSG), gilashin borophosphosilicate (BPSG), polysilicon da aka yi amfani da su, graphene, nanotubes na carbon da sauran fina-finai.
Siffofi:
▪ Zafin aiki: yawanci tsakanin 500 ~ 900°C, zafin aikin yana da yawa sosai;
▪ Matsakaicin matsin lamba na iskar gas: yanayin matsin lamba mai ƙarancin 0.1~10 Torr;
▪ Ingancin fim: inganci mai kyau, daidaito mai kyau, yawan da ya dace, da kuma ƙarancin lahani;
▪ Yawan ajiyar kuɗi: jinkirin ajiyar kuɗi;
▪ Daidaito: ya dace da manyan ƙananan abubuwa, da kuma adanawa iri ɗaya;
Amfani da rashin amfani:
▪ Zai iya sanya fina-finai iri ɗaya da yawa;
▪ Yana aiki da kyau akan manyan ƙananan abubuwa, waɗanda suka dace da yawan amfanin ƙasa;
▪ Ƙarancin farashi;
▪ Zafin jiki mai yawa, bai dace da kayan da ke da saurin kamuwa da zafi ba;
▪ Yawan fitar da bayanai yana da jinkiri kuma fitarwa ba ta da yawa.
2. PECVD (CVD Mai Ingantaccen Jijiyoyin Jiki)
Ka'ida: Yi amfani da plasma don kunna halayen iskar gas a ƙananan zafin jiki, ionize da lalata ƙwayoyin da ke cikin iskar reaction, sannan a saka siririn fina-finai a saman substrate. Ƙarfin plasma na iya rage zafin da ake buƙata don amsawar sosai, kuma yana da aikace-aikace iri-iri. Ana iya shirya fina-finan ƙarfe daban-daban, fina-finan inorganic da fina-finan organic.
Siffofi:
▪ Zafin aiki: yawanci tsakanin 200 ~ 400°C, zafin jiki yana da ƙasa kaɗan;
▪ Matsakaicin matsin lamba na iskar gas: yawanci ɗaruruwan mTorr zuwa Torr da yawa;
▪ Ingancin fim: kodayake daidaiton fim ɗin yana da kyau, yawan fim ɗin da ingancinsa ba su kai na LPCVD ba saboda lahani da plasma zai iya haifarwa;
▪ Yawan ajiyar kaya: babban farashi, ingantaccen samarwa;
▪ Daidaito: ɗan ƙasa da LPCVD akan manyan ƙananan abubuwa;
Amfani da rashin amfani:
▪ Za a iya ajiye siraran fina-finai a ƙananan yanayin zafi, waɗanda suka dace da kayan da ke da saurin kamuwa da zafi;
▪ Saurin adanawa cikin sauri, wanda ya dace da ingantaccen samarwa;
▪ Tsarin sassauƙa, halayen fim za a iya sarrafa su ta hanyar daidaita sigogin plasma;
▪ Jini na iya haifar da lahani a cikin fim kamar ramukan filaye ko rashin daidaito;
▪ Idan aka kwatanta da LPCVD, yawan fim ɗin da ingancinsa sun ɗan yi muni.
3. HDP-CVD (CVD mai yawan yawa a cikin jini)
Ka'ida: Fasaha ta musamman ta PECVD. HDP-CVD (wanda aka fi sani da ICP-CVD) na iya samar da yawan plasma da inganci mafi girma fiye da kayan aikin PECVD na gargajiya a ƙananan yanayin zafi. Bugu da ƙari, HDP-CVD yana ba da kusan sarrafa kwararar ion mai zaman kanta da makamashi, yana inganta damar cike rami ko ramuka don buƙatar zubar da fim, kamar su rufewar hana haske, ƙaramin ajiyar kayan dielectric, da sauransu.
Siffofi:
▪ Zafin aiki: zafin ɗaki zuwa 300℃, zafin aiki yana da ƙasa sosai;
▪ Matsakaicin matsin lamba na iskar gas: tsakanin 1 zuwa 100 mTorr, ƙasa da PECVD;
▪ Ingancin fim: yawan sinadarin plasma mai yawa, ingancin fim mai yawa, daidaito mai kyau;
▪ Yawan ajiyar bayanai: ƙimar ajiyar bayanai yana tsakanin LPCVD da PECVD, ɗan fi girma fiye da LPCVD;
▪ Daidaito: saboda yawan sinadarin plasma, daidaiton fim ɗin yayi kyau kwarai da gaske, ya dace da saman substrate masu siffa mai rikitarwa;
Amfani da rashin amfani:
▪ Mai iya ajiye fina-finai masu inganci a ƙananan yanayin zafi, wanda ya dace sosai da kayan da ke da saurin kamuwa da zafi;
▪ Daidaiton fim ɗin, yawansa da kuma santsi a samansa mai kyau;
▪ Yawan sinadarin plasma yana inganta daidaiton wurin ajiya da kuma halayen fim;
▪ Kayan aiki masu rikitarwa da tsada mai yawa;
▪ Saurin cirewa yana da jinkiri, kuma ƙarin kuzarin jini na iya haifar da ɗan lahani.
Barka da zuwa ga duk wani kwastomomi daga ko'ina cikin duniya don ziyarce mu don ƙarin tattaunawa!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Lokacin Saƙo: Disamba-03-2024