Ka waiho ʻana o ka mahu kemika(CVD)ʻo ia ka ʻenehana i hoʻohana nui ʻia ma ka ʻoihana semiconductor no ka waiho ʻana i nā ʻano mea like ʻole, me ka laulā o nā mea hoʻokaʻawale, ka hapa nui o nā mea metala a me nā mea metala hui pū ʻia.
He ʻenehana hoʻomākaukau ʻili lahilahi kuʻuna ka CVD. ʻO kona kumu, ʻo ia ka hoʻohana ʻana i nā mea mua o ke kinoea e hoʻokaʻawale i kekahi mau ʻāpana i loko o ka mea mua ma o nā hopena kemika ma waena o nā ʻātoma a me nā molekala, a laila hana i kahi ʻili lahilahi ma luna o ka substrate. ʻO nā ʻano kumu o CVD: nā loli kemika (nā hopena kemika a i ʻole ka hoʻokaʻawale wela); hele mai nā mea āpau i loko o ke kiʻiʻoniʻoni mai nā kumu waho; pono nā mea hana e komo i ka hopena ma ke ʻano o ka pae kinoea.
ʻO ka waiho ʻana o ka mahu kemika haʻahaʻa (LPCVD), ka waiho ʻana o ka mahu kemika hoʻonui plasma (PECVD) a me ka waiho ʻana o ka mahu kemika plasma kiʻekiʻe (HDP-CVD) ʻekolu mau ʻenehana CVD maʻamau, nona nā ʻokoʻa koʻikoʻi i ka waiho ʻana o nā mea, nā koi o nā lako, nā kūlana hana, a me nā mea ʻē aʻe. Eia ka wehewehe maʻalahi a me ka hoʻohālikelike ʻana o kēia mau ʻenehana ʻekolu.
1. LPCVD (CVD Haʻahaʻa)
Kumumanaʻo: He hana CVD ma lalo o nā kūlana haʻahaʻa. ʻO kona kumumanaʻo, ʻo ia ke hoʻokomo i ke kinoea hopena i loko o ke keʻena hopena ma lalo o ka vacuum a i ʻole ke kaiapuni haʻahaʻa, e hoʻoheheʻe a pane paha i ke kinoea ma ka mahana kiʻekiʻe, a hana i kahi kiʻiʻoniʻoni paʻa i waiho ʻia ma luna o ka ʻili substrate. ʻOiai ʻo ke kaomi haʻahaʻa e hōʻemi ana i ka hoʻokuʻi kinoea a me ka haunaele, ua hoʻomaikaʻi ʻia ke ʻano like a me ka maikaʻi o ke kiʻiʻoniʻoni. Hoʻohana nui ʻia ka LPCVD i loko o ka silicon dioxide (LTO TEOS), silicon nitride (Si3N4), polysilicon (POLY), phosphosilicate glass (BSG), borophosphosilicate glass (BPSG), doped polysilicon, graphene, carbon nanotubes a me nā kiʻiʻoniʻoni ʻē aʻe.
Nā Hiʻohiʻona:
▪ Mahana hana: ma waena o 500~900°C, kiʻekiʻe iki ka mahana hana;
▪ Paepae kaomi kinoea: wahi kaomi haʻahaʻa o 0.1~10 Torr;
▪ ʻAno kiʻiʻoniʻoni: kūlana kiʻekiʻe, kūlike maikaʻi, mānoanoa maikaʻi, a me nā hemahema liʻiliʻi;
▪ Ka nui o ka waiho ʻana: ka nui o ka waiho ʻana lohi;
▪ ʻAno like: kūpono no nā substrates nui, waiho like;
Nā Pōmaikaʻi a me nā Pōʻino:
▪ Hiki ke waiho i nā kiʻiʻoniʻoni like a mānoanoa loa;
▪ Hana maikaʻi ma nā substrates nui, kūpono no ka hana nui ʻana;
▪ Kumukūʻai haʻahaʻa;
▪ Kiʻekiʻe ka mahana, ʻaʻole kūpono no nā mea i ʻike ʻia i ka wela;
▪ Lohi ka nui o ka waiho ʻana a haʻahaʻa ka hopena.
2. PECVD (Plasma Enhanced CVD)
Kumumanaʻo: E hoʻohana i ka plasma e hoʻoulu i nā hopena pae kinoea ma nā mahana haʻahaʻa, e hoʻohuihui a hoʻokaʻawale i nā molekala i loko o ke kinoea hopena, a laila e waiho i nā ʻili lahilahi ma luna o ka ʻili substrate. Hiki i ka ikehu o ka plasma ke hōʻemi nui i ka mahana e pono ai no ka hopena, a he ākea nā noi. Hiki ke hoʻomākaukau ʻia nā ʻili metala like ʻole, nā ʻili inorganic a me nā ʻili organik.
Nā Hiʻohiʻona:
▪ Mahana hana: ma waena o 200~400°C, haʻahaʻa iki ka mahana;
▪ Paepae kaomi kinoea: maʻamau he mau haneli mTorr a i kekahi mau Torr;
▪ ʻAno kiʻiʻoniʻoni: ʻoiai maikaʻi ke ʻano like o ke kiʻiʻoniʻoni, ʻaʻole maikaʻi ka nui a me ke ʻano o ke kiʻiʻoniʻoni e like me LPCVD ma muli o nā kīnā i hoʻokomo ʻia e ka plasma;
▪ Ka nui o ka waiho ʻana: ka nui kiʻekiʻe, ka pono hana kiʻekiʻe;
▪ ʻAno like: ʻoi aku ka haʻahaʻa ma mua o LPCVD ma nā substrates nui;
Nā Pōmaikaʻi a me nā Pōʻino:
▪ Hiki ke waiho ʻia nā ʻili lahilahi ma nā mahana haʻahaʻa, kūpono no nā mea i ʻike ʻia i ka wela;
▪ Ka wikiwiki o ka waiho ʻana, kūpono no ka hana pono ʻana;
▪ Kaʻina hana maʻalahi, hiki ke hoʻomalu ʻia nā waiwai kiʻiʻoniʻoni ma ka hoʻoponopono ʻana i nā palena plasma;
▪ Hiki i ka plasma ke hoʻokomo i nā hemahema kiʻiʻoniʻoni e like me nā pinholes a i ʻole ke kūlike ʻole;
▪ Ke hoʻohālikelike ʻia me LPCVD, ʻoi aku ka ʻino o ka nui a me ka maikaʻi o ke kiʻiʻoniʻoni.
3. HDP-CVD (CVD Plasma Density Kiʻekiʻe)
Kumumanaʻo: He ʻenehana PECVD kūikawā. Hiki i ka HDP-CVD (i ʻike ʻia hoʻi ʻo ICP-CVD) ke hana i ka nui o ka plasma a me ka maikaʻi ma mua o nā lako PECVD kuʻuna ma nā mahana hoʻokaʻawale haʻahaʻa. Eia kekahi, hāʻawi ʻo HDP-CVD i ka flux ion a me ka kaohi ikehu kūʻokoʻa, e hoʻomaikaʻi ana i nā hiki ke hoʻopiha ʻana i nā lua a i ʻole nā lua no ka hoʻokaʻawale ʻana i nā kiʻiʻoniʻoni koi, e like me nā uhi anti-reflective, ka hoʻokaʻawale ʻana i nā mea dielectric constant haʻahaʻa, a pēlā aku.
Nā Hiʻohiʻona:
▪ Mahana hana: mahana lumi a i 300℃, haʻahaʻa loa ka mahana hana;
▪ Paepae kaomi kinoea: ma waena o 1 a me 100 mTorr, haʻahaʻa ma mua o PECVD;
▪ ʻAno kiʻiʻoniʻoni: kiʻekiʻe ka nui o ka plasma, kiʻekiʻe ke ʻano kiʻiʻoniʻoni, maikaʻi ke ʻano like;
▪ Ka helu hoʻomoe: aia ka helu hoʻomoe ma waena o LPCVD a me PECVD, ʻoi aku ka kiʻekiʻe ma mua o LPCVD;
▪ ʻAno like: ma muli o ka plasma kiʻekiʻe-density, maikaʻi loa ke ʻano like o ka ʻiliʻili, kūpono no nā ʻili substrate paʻakikī;
Nā Pōmaikaʻi a me nā Pōʻino:
▪ Hiki ke waiho i nā kiʻiʻoniʻoni kiʻekiʻe ma nā mahana haʻahaʻa, kūpono loa no nā mea wela;
▪ ʻO ke ʻano like o ka ʻili, ka mānoanoa a me ka laumania o ka ʻili maikaʻi loa;
▪ Hoʻomaikaʻi ka nui o ka plasma density i ke ʻano like o ka deposition a me nā waiwai kiʻiʻoniʻoni;
▪ Nā lako paʻakikī a me ke kumukūʻai kiʻekiʻe;
▪ Lohi ka wikiwiki o ka waiho ʻana, a ʻo ka ikehu plasma kiʻekiʻe e hoʻolauna i kahi liʻiliʻi o ka pōʻino.
Hoʻokipa i nā mea kūʻai mai nā wahi a puni o ka honua e kipa mai iā mākou no kahi kūkākūkā hou aku!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Ka manawa hoʻouna: Dec-03-2024