Kuyika kwa nthunzi ya mankhwala(CVD)Ndi ukadaulo womwe umagwiritsidwa ntchito kwambiri mumakampani opanga ma semiconductor posungira zinthu zosiyanasiyana, kuphatikizapo zinthu zosiyanasiyana zotetezera kutentha, zinthu zambiri zachitsulo ndi zinthu zopangidwa ndi zitsulo.
CVD ndi ukadaulo wachikhalidwe wokonzekera filimu yopyapyala. Mfundo yake ndikugwiritsa ntchito zoyambira mpweya kuti ziwononge zigawo zina mu precursor kudzera mu zochita za mankhwala pakati pa maatomu ndi mamolekyu, kenako nkupanga filimu yopyapyala pa substrate. Makhalidwe oyambira a CVD ndi awa: kusintha kwa mankhwala (zochita za mankhwala kapena kuwonongeka kwa kutentha); zinthu zonse mu filimuyi zimachokera kuzinthu zakunja; zoyambitsa mpweya ziyenera kutenga nawo mbali muzochitazo mu mawonekedwe a gawo la mpweya.
Kuyika nthunzi ya mankhwala otsika mphamvu (LPCVD), kuyika nthunzi ya mankhwala owonjezera mphamvu (PECVD) ndi kuyika nthunzi ya mankhwala ochulukirapo (HDP-CVD) ndi matekinoloje atatu ofanana a CVD, omwe ali ndi kusiyana kwakukulu pakuyika zinthu, zofunikira pazida, momwe zinthu zilili, ndi zina zotero. Zotsatirazi ndi kufotokozera kosavuta ndi kufananiza matekinoloje atatuwa.
1. LPCVD (CVD Yotsika Kwambiri)
Mfundo: Njira ya CVD pansi pa mpweya wochepa. Mfundo yake ndi kulowetsa mpweya wochitapo kanthu m'chipinda chochitirapo kanthu pansi pa vacuum kapena malo otsika a mpweya, kuwola kapena kuchitapo kanthu ndi kutentha kwambiri, ndikupanga filimu yolimba yomwe imayikidwa pamwamba pa substrate. Popeza mpweya wochepa umachepetsa kugundana ndi kugwedezeka kwa mpweya, kufanana ndi khalidwe la filimuyo zimakula. LPCVD imagwiritsidwa ntchito kwambiri mu silicon dioxide (LTO TEOS), silicon nitride (Si3N4), polysilicon (POLY), phosphosilicate glass (BSG), borophosphosilicate glass (BPSG), doped polysilicon, graphene, carbon nanotubes ndi mafilimu ena.
Mawonekedwe:
▪ Kutentha kwa ndondomeko: nthawi zambiri pakati pa 500 ~ 900°C, kutentha kwa ndondomeko kumakhala kwakukulu;
▪ Kuchuluka kwa mpweya: malo opanikizika otsika a 0.1 ~ 10 Torr;
▪ Ubwino wa filimu: yapamwamba kwambiri, yofanana bwino, yolemera bwino, komanso yopanda zilema zambiri;
▪ Kuchuluka kwa ndalama zomwe zasungidwa: kuchuluka kwa ndalama zomwe zasungidwa pang'onopang'ono;
▪ Kufanana: koyenera kugwiritsa ntchito zinthu zazikulu, kuyika zinthu zofanana;
Ubwino ndi kuipa:
▪ Ikhoza kuyika mafilimu ofanana kwambiri komanso okhuthala;
▪ Imagwira ntchito bwino pa nthaka zazikulu, zoyenera kupanga zinthu zambiri;
▪ Mtengo wotsika;
▪ Kutentha kwambiri, sikoyenera kugwiritsa ntchito zinthu zomwe zimakhudzidwa ndi kutentha;
▪ Kuchuluka kwa ndalama zomwe zaperekedwa ndi pang'onopang'ono ndipo zotsatira zake ndi zochepa.
2. PECVD (Plasma Enhanced CVD)
Mfundo: Gwiritsani ntchito plasma kuti muyambitse zochitika za mpweya pa kutentha kochepa, ionize ndikuwononga mamolekyu mu mpweya wochitapo kanthu, kenako ikani mafilimu opyapyala pamwamba pa substrate. Mphamvu ya plasma imatha kuchepetsa kwambiri kutentha komwe kumafunika pakuchitapo kanthu, ndipo imagwira ntchito zosiyanasiyana. Mafilimu osiyanasiyana achitsulo, mafilimu osapangidwa ndi zinthu zachilengedwe ndi mafilimu achilengedwe amatha kukonzedwa.
Mawonekedwe:
▪ Kutentha kwa ndondomeko: nthawi zambiri pakati pa 200 ~ 400°C, kutentha kumakhala kochepa;
▪ Kuchuluka kwa mpweya: nthawi zambiri mTorr mazana ambiri mpaka Torr zingapo;
▪ Ubwino wa filimu: ngakhale kufanana kwa filimuyo kuli bwino, kuchuluka ndi ubwino wa filimuyo sikwabwino ngati LPCVD chifukwa cha zolakwika zomwe zingayambitsidwe ndi plasma;
▪ Kuchuluka kwa zinthu zomwe zayikidwa: kuchuluka kwa zinthu zomwe zagwiritsidwa ntchito, kupanga zinthu mwachangu;
▪ Kufanana: kochepa pang'ono poyerekeza ndi LPCVD pa zinthu zazikulu;
Ubwino ndi kuipa:
▪ Mafilimu opyapyala amatha kuikidwa pamalo otentha kwambiri, oyenera zinthu zomwe zimakhudzidwa ndi kutentha;
▪ Liwiro lofulumira loyika zinthu, loyenera kupanga bwino;
▪ Kapangidwe ka filimu kosinthasintha kangathe kuwongoleredwa mwa kusintha magawo a plasma;
▪ Plasma ingayambitse zolakwika mu filimu monga mabowo ang'onoang'ono kapena kusagwirizana;
▪ Poyerekeza ndi LPCVD, kuchuluka kwa filimu ndi khalidwe lake ndizochepa pang'ono.
3. HDP-CVD (High Density Plasma CVD)
Mfundo: Ukadaulo wapadera wa PECVD. HDP-CVD (yomwe imadziwikanso kuti ICP-CVD) imatha kupanga kuchuluka kwa plasma komanso khalidwe labwino kuposa zida zachikhalidwe za PECVD pa kutentha kochepa. Kuphatikiza apo, HDP-CVD imapereka mphamvu yodziyimira payokha ya ion flux ndi mphamvu, kukonza kuthekera kodzaza ngalande kapena mabowo kuti filimu ifunike, monga zophimba zotsutsana ndi kuwala, kuyika zinthu zosasintha za dielectric, ndi zina zotero.
Mawonekedwe:
▪ Kutentha kwa ndondomeko: kutentha kwa chipinda kufika pa 300℃, kutentha kwa ndondomekoyi ndi kochepa kwambiri;
▪ Kuthamanga kwa mpweya: pakati pa 1 ndi 100 mTorr, yotsika kuposa PECVD;
▪ Ubwino wa filimu: kuchuluka kwa plasma, khalidwe la filimu, kufanana bwino;
▪ Chiŵerengero cha kuyika: chiŵerengero cha kuyika chili pakati pa LPCVD ndi PECVD, chokwera pang'ono kuposa LPCVD;
▪ Kufanana: chifukwa cha plasma yochuluka kwambiri, kufanana kwa filimu ndi kwabwino kwambiri, koyenera malo okhala ndi mawonekedwe ovuta;
Ubwino ndi kuipa:
▪ Yokhoza kuyika mafilimu abwino kwambiri pa kutentha kochepa, yoyenera kwambiri pazinthu zomwe zimakhudzidwa ndi kutentha;
▪ Kufanana bwino kwa filimu, kuchulukana kwake komanso kusalala kwa pamwamba;
▪ Kuchuluka kwa plasma kumathandizira kuti zinthu zikhale zofanana komanso kuti filimu ikhale ndi mawonekedwe ofanana;
▪ Zipangizo zovuta komanso mtengo wake ndi wokwera;
▪ Liwiro la kutayika kwa madzi ndi lochepa, ndipo mphamvu yochuluka ya plasma ingayambitse kuwonongeka pang'ono.
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Nthawi yotumizira: Disembala-03-2024