Gushyira umwuka w'uburozi mu kirere(indwara y'umutima)ni ikoranabuhanga rikoreshwa cyane mu nganda za semiconductor mu gushyiramo ibikoresho bitandukanye, harimo ibikoresho byinshi bikingira ubushyuhe, ibikoresho byinshi by'icyuma n'ibikoresho by'icyuma bivanze.
CVD ni ikoranabuhanga risanzwe ryo gutegura firime nto. Ihame ryayo ni ugukoresha ibyuma bitegura imyuka kugira ngo biboze ibice bimwe na bimwe biri mu gice gitegura imyuka binyuze mu mikorere ya shimi hagati ya atome na molekile, hanyuma bigakora firime nto kuri substrate. Ibiranga CVD ni: impinduka za shimi (imikorere ya shimi cyangwa ihindagurika ry'ubushyuhe); ibikoresho byose biri muri firime bituruka hanze; ibikoresho bitegura imyuka bigomba kugira uruhare mu mikorere ya firime mu buryo bwa gazi.
Gushyira umwuka mu kirere mu buryo buciriritse (LPCVD), gushyira umwuka mu kirere mu buryo burushijeho kwiyongera (PECVD) no gushyira umwuka mu kirere mu buryo bukabije (HDP-CVD) ni ikoranabuhanga ritatu risanzwe rya CVD, rifite itandukaniro rinini mu gushyira ibikoresho, ibisabwa mu bikoresho, imiterere y'imikorere, nibindi. Ibi bikurikira ni ibisobanuro byoroshye no kugereranya ubu buryo butatu.
1. LPCVD (CVD y'umuvuduko muke)
Ihame: Uburyo bwa CVD mu gihe cy’umuvuduko muke. Ihame ryayo ni ugushyira umwuka wa reaction mu cyumba cy’irangizwa ry’irangizwa ry’irangizwa ry’irangizwa ry’iranzi mu kirere cy’umwuka cyangwa ahantu hafite umuvuduko muke, kubora cyangwa gukora reaction y’iranzi ry’iranzi ku bushyuhe bwinshi, no gukora firime ikomeye ishyizwe ku buso bwa substrate. Kubera ko umuvuduko muke ugabanya gukubitana kwa gazi no guhindagurika, ubwiza n’ubuziranenge bya firime birarushaho kwiyongera. LPCVD ikoreshwa cyane muri silicon dioxide (LTO TEOS), silicon nitride (Si3N4), polisilicon (POLY), ikirahure cya phosphosilicate (BSG), ikirahure cya borophosphosilicate (BPSG), polisilicone ya doped, graphene, nanotubes za karuboni n’izindi firime.
Ibiranga:
▪ Ubushyuhe bw'imikorere: ubusanzwe hagati ya 500 ~ 900°C, ubushyuhe bw'imikorere buba buri hejuru cyane;
▪ Ingano y'umuvuduko wa gaze: ibidukikije bifite umuvuduko muto wa 0.1 ~ 10 Torr;
▪ Ubwiza bwa filime: ubwiza bwo hejuru, uburinganire bwiza, ubucucike bwiza, n'ubusembwa buke;
▪ Igipimo cyo kubikuza: igipimo cyo kubikuza buhoro buhoro;
▪ Ubusa: bukwiriye ahantu hanini, hashyirwa ibintu bimwe;
Ibyiza n'ibibi:
▪ Ishobora gushyiramo firime zimeze nk'iz'ubwoko bumwe kandi zicucitse;
▪ Ikora neza ku bimera binini, bikwiriye gukorwa ku bwinshi;
▪ Igiciro gito;
▪ Ubushyuhe bwinshi, ntibukwiriye ibikoresho bikoresha ubushyuhe;
▪ Igipimo cyo gutanga amafaranga kiri hasi kandi umusaruro ni muto ugereranije.
2. PECVD (Plasma Enhanced CVD)
Ihame: Koresha plasma kugira ngo ukore ibikorwa bya gaze ku bushyuhe buri hasi, ushyiremo iyonize kandi uboze molekile ziri muri gaze ya reaction, hanyuma ushyiremo uduce duto ku buso bwa substrate. Ingufu za plasma zishobora kugabanya cyane ubushyuhe bukenewe kuri reaction, kandi zifite uburyo bwinshi bwo gukoresha. Hashobora gutegurwa uduce dutandukanye tw'icyuma, uduce tudafite umwimerere na filime z'umwimerere.
Ibiranga:
▪ Ubushyuhe bw'imikorere: ubusanzwe hagati ya 200 ~ 400°C, ubushyuhe buba buri hasi ugereranyije;
▪ Ingano y'umuvuduko wa gaze: ubusanzwe amagana ya mTorr kugeza kuri Torr nyinshi;
▪ Ubwiza bwa filime: nubwo filime ingana neza, ubucucike n'ubwiza bwa filime ntabwo ari byiza nka LPCVD bitewe n'inenge zishobora guterwa na plasma;
▪ Igipimo cyo gutanga: igipimo cyo hejuru, umusaruro mwinshi;
▪ Ubumwe: buke gato ugereranije na LPCVD ku bimera binini;
Ibyiza n'ibibi:
▪ Udupira duto dushobora gushyirwa ku bushyuhe buri hasi, bikaba bikwiye gukoreshwa mu bikoresho birwanya ubushyuhe;
▪ Umuvuduko wihuse wo gushyiramo ibintu, ukwiriye umusaruro mwiza;
▪ Imiterere ya filime ihindagurika ishobora kugenzurwa hakoreshejwe uburyo bwo guhindura ibipimo bya plasma;
▪ Plasma ishobora guteza inenge mu mafimu nk'uduce duto cyangwa kutagira imiterere imwe;
▪ Ugereranyije na LPCVD, ubucucike n'ubwiza bya firime biragabanuka gato.
3. HDP-CVD (Ubucucike Bukomeye bwa Plasma CVD)
Ihame: Ikoranabuhanga rya PECVD ryihariye. HDP-CVD (izwi kandi nka ICP-CVD) ishobora gutanga ubucucike n'ubwiza bwinshi bwa plasma kurusha ibikoresho bisanzwe bya PECVD ku bushyuhe buke bwo gushyiramo. Byongeye kandi, HDP-CVD itanga flux ya ion yigenga kandi ikagenzura ingufu, inoza ubushobozi bwo kuzuza imyobo cyangwa imyobo mu gushyiramo filime isaba imbaraga, nko gushyiramo irangi rirwanya urumuri, gushyiramo ibikoresho bidahinduka, nibindi.
Ibiranga:
▪ Ubushyuhe bw'imikorere: ubushyuhe bw'icyumba kugeza kuri 300°C, ubushyuhe bw'imikorere ni buke cyane;
▪ Ingano y'umuvuduko wa gaze: hagati ya 1 na 100 mTorr, iri munsi ya PECVD;
▪ Ubwiza bwa filime: ubucucike bwinshi bwa plasma, ubwiza bwinshi bwa filime, uburinganire bwiza;
▪ Igipimo cyo kubikuza: igipimo cyo kubikuza kiri hagati ya LPCVD na PECVD, kiri hejuru gato ya LPCVD;
▪ Ubusa: bitewe n'uko plasma ifite ubucucike bwinshi, ubusa bwa filime ni bwiza cyane, bukwiriye ubuso bumeze nk'urusobe rw'amazi;
Ibyiza n'ibibi:
▪ Ishobora gushyira firime nziza ku bushyuhe buri hasi, ikwiriye cyane ibikoresho byakira ubushyuhe;
▪ Uburyo bwiza bwo guhuza filime, ubucucike n'ubuso bugenda neza;
▪ Ubucucike bwinshi bwa plasma butuma habaho imiterere imwe n'imwe y'amafilimi;
▪ Ibikoresho bigoye kandi bihendutse;
▪ Umuvuduko wo gusohora ugenda buhoro, kandi ingufu nyinshi za plasma zishobora kwangiza bike.
Murakaza neza abakiriya bose baturutse impande zose z'isi baza kudusura kugira ngo tuganireho byinshi!
https://www.vet-china.com/
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https://www.linkedin.com/company/100890232/admin/page-posts/published/
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Igihe cyo kohereza: Ukuboza-03-2024