Kuiswa kwemhepo yemakemikari(CVD)ndiyo tekinoroji inonyanya kushandiswa muindasitiri ye semiconductor pakuisa zvinhu zvakasiyana-siyana, kusanganisira zvinhu zvakasiyana-siyana zvinodzivirira kupisa, zvinhu zvakawanda zvesimbi uye zvinhu zvesimbi.
CVD inyanzvi yekugadzirwa kwefirimu diki. Musimboti wayo ndewekushandisa magasi precursors kuti aparadze zvimwe zvikamu zviri mu precursor kuburikidza nemakemikari ari pakati pemaatomu nemamorekuru, uye wobva wagadzira firimu diki pa substrate. Hunhu hweCVD ndehwekuti: shanduko dzemakemikari (makemikari kana kuora kwekupisa); zvinhu zvese zviri mufirimu zvinobva kunze; reactants dzinofanira kutora chikamu mukuita kwegasi.
Kuisa vapor yemakemikari ane simba shoma (LPCVD), kuisa vapor yemakemikari ane simba shoma (PECVD) uye kuisa vapor yemakemikari ane simba rakawanda (HDP-CVD) ndidzo nzira nhatu dzakajairika dzeCVD, dzine musiyano mukuru mukuisa zvinhu, zvinodiwa nemidziyo, mamiriro ekushanda, nezvimwewo. Inotevera itsananguro yakapusa uye kuenzanisa matekinoroji aya matatu.
1. LPCVD (Kudzvanywa Kweropa Kushoma)
Nheyo: Maitiro eCVD pasi pemamiriro ekumanikidzwa kwakaderera. Nheyo yayo ndeyekuisa gasi rekuita mukamuri rekuita pasi pevacuum kana nharaunda ine kumanikidzwa kwakaderera, kuora kana kuita kuti gasi riite tembiricha yakakwira, uye kugadzira firimu rakasimba rakaiswa pamusoro pe substrate. Sezvo kumanikidzwa kwakaderera kunoderedza kugongana kwegasi uye turbulence, kufanana uye mhando yefirimu inovandudzwa. LPCVD inoshandiswa zvakanyanya mu silicon dioxide (LTO TEOS), silicon nitride (Si3N4), polysilicon (POLY), phosphosilicate glass (BSG), borophosphosilicate glass (BPSG), doped polysilicon, graphene, carbon nanotubes nedzimwe mafirimu.
Zvimiro:
▪ Tembiricha yemaitiro: kazhinji iri pakati pe500~900°C, tembiricha yemaitiro inenge yakakwira zvakanyanya;
▪ Kumanikidzwa kwegasi: nharaunda ine kumanikidzwa kwakaderera kwe 0.1 ~ 10 Torr;
▪ Hunhu hwefirimu: hwemhando yepamusoro, kufanana kwakanaka, huwandu hwakanaka, uye zvikanganiso zvishoma;
▪ Mwero wekuiswa kwechinhu: mwero wekuiswa kwechinhu unononoka;
▪ Kufanana: kwakakodzera nzvimbo dzakakura, kuiswa kwakafanana;
Zvakanakira nezvayakaipira:
▪ Inogona kuisa mafirimu akafanana uye akakora;
▪ Inoshanda zvakanaka pamatanda makuru, yakakodzera kugadzirwa kwemashizha akawanda;
▪ Mutengo wakaderera;
▪ Kupisa kwakanyanya, hazvikodzeri zvinhu zvinonzwa kupisa;
▪ Kuwanda kwemari inoburitswa kunononoka uye huwandu hwemari inoburitswa hushoma.
2. PECVD (Plasma Enhanced CVD)
Musimboti: Shandisa plasma kuti uite kuti gas phase reactions dzishande patembiricha yakaderera, ionize uye paradza mamorekuru ari mugasi rereaction, wobva waisa matinji pamusoro pe substrate. Simba replasma rinogona kuderedza zvakanyanya tembiricha inodiwa pareaction, uye rine mashandisirwo akasiyana-siyana. Mafirimu akasiyana-siyana esimbi, mafirimu asina organic uye mafirimu eorganic anogona kugadzirwa.
Zvimiro:
▪ Kupisa kwemaitiro: kazhinji pakati pe200~400°C, tembiricha yacho yakaderera;
▪ Kuwanda kwekumanikidzwa kwegasi: kazhinji mazana e mTorr kusvika kune Torr dzakawanda;
▪ Hunhu hwefirimu: kunyangwe kufanana kwefirimu kwakanaka, huwandu uye hunhu hwefirimu hazvina kunaka seLPCVD nekuda kwezvikanganiso zvinogona kuunzwa neplasma;
▪ Mwero wekuisa zvinhu: mwero wepamusoro, kushanda zvakanaka kwekugadzira;
▪ Kufanana: yakaderera zvishoma pane LPCVD pamidziyo mikuru;
Zvakanakira nezvayakaipira:
▪ Mafirimu matete anogona kuiswa patembiricha yakaderera, zvakakodzera zvinhu zvinonzwa kupisa;
▪ Kukurumidza kuisa zvinhu nekukurumidza, zvakakodzera kugadzirwa zvakanaka;
▪ Maitiro anochinjika, hunhu hwefirimu hunogona kudzorwa nekugadzirisa maparamita eplasma;
▪ Plasma inogona kukonzera zvikanganiso zvemafirimu zvakaita semaburi kana kusafanana;
▪ Kana tichienzanisa neLPCVD, huwandu hwefirimu uye mhando yaro zvakaderera zvishoma.
3. HDP-CVD (High Density Plasma CVD)
Musimboti: Tekinoroji yePECVD yakakosha. HDP-CVD (inozivikanwawo seICP-CVD) inogona kugadzira huwandu hwakanyanya hweplasma uye mhando kupfuura michina yePECVD yechinyakare patembiricha yakaderera yekuisa zvinhu. Pamusoro pezvo, HDP-CVD inopa ion flux uye simba rekutonga, ichivandudza kugona kwekuzadza trench kana maburi ekuisa zvinhu zvinoda kuratidzwa, senge anti-reflective coating, low dielectric constant material deposition, nezvimwewo.
Zvimiro:
▪ Tembiricha yekushanda: tembiricha yemukamuri kusvika 300℃, tembiricha yekushanda yakaderera kwazvo;
▪ Kumanikidzwa kwegasi: pakati pe1 ne100 mTorr, yakaderera pane PECVD;
▪ Hunhu hwefirimu: huwandu hwakawanda hweplasma, hunhu hwefirimu hwakawanda, kufanana kwakanaka;
▪ Chiyero chekuisa zvinhu muropa: chiyero chekuisa zvinhu muropa chiri pakati peLPCVD nePECVD, chakakwira zvishoma pane LPCVD;
▪ Kufanana: nekuda kweplasma ine density yakakura, kufanana kwefirimu kwakanaka kwazvo, kwakakodzera nzvimbo dzakaomarara dze substrate;
Zvakanakira nezvayakaipira:
▪ Inokwanisa kuisa mafirimu emhando yepamusoro patembiricha yakaderera, yakakodzera zvinhu zvinonzwa kupisa;
▪ Kuenzana kwakanaka kwefirimu, kuwanda kwayo uye kutsvedzerera kwayo pamusoro;
▪ Kuwanda kweplasma kunovandudza kufanana kwekuisa uye hunhu hwefirimu;
▪ Midziyo yakaoma uye mutengo wakakwira;
▪ Kukurumidza kwekuisa zvinhu muropa kunononoka, uye simba rakawanda replasma rinogona kukonzera kukuvara kudiki.
Gamuchirai vatengi vanobva kumativi ese epasi kuti vatishanyire kuti tikurukure zvakawanda!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Nguva yekutumira: Zvita-03-2024