Te whakatakotoranga o te kohu matū(CVD)Ko te hangarau tino whānuitia te whakamahi i roto i te umanga haurua-waea mō te whakatakoto i ngā momo rauemi, tae atu ki te whānuitanga o ngā rauemi ārai mate, te nuinga o ngā rauemi whakarewa me ngā rauemi koranu whakarewa.
He hangarau whakarite kiriata angiangi tuku iho te CVD. Ko tōna kaupapa matua he whakamahi i ngā matū mua hau hei wawahi i ētahi wāhanga o te matū mua mā roto i ngā tauhohenga matū i waenga i ngā ngota me ngā ngota, kātahi ka hanga he kiriata angiangi ki runga i te papa. Ko ngā āhuatanga matua o te CVD ko: ngā huringa matū (ngā tauhohenga matū, te pirau wera rānei); i ahu mai ngā rauemi katoa o te kiriata i ngā pūtake o waho; me whai wāhi ngā matū tauhohe ki te tauhohenga i roto i te āhua o te āhua hau.
Ko te whakatakotoranga kohu matū pēhanga iti (LPCVD), te whakatakotoranga kohu matū whakarei ake i te plasma (PECVD) me te whakatakotoranga kohu matū plasma kiato teitei (HDP-CVD) ētahi o ngā hangarau CVD e toru e kitea whānuitia ana, he rerekētanga nui kei roto i te whakatakotoranga rauemi, ngā whakaritenga taputapu, ngā āhuatanga tukanga, me ētahi atu. E whai ake nei he whakamārama māmā me te whakataurite i ēnei hangarau e toru.
1. LPCVD (CVD Pēhanga Iti)
Mātāpono: He tukanga CVD i raro i ngā āhuatanga pēhanga iti. Ko tōna mātāpono he wero i te hau tauhohenga ki roto i te rūma tauhohenga i raro i te korehau, i te taiao pēhanga iti rānei, ka wetewete, ka tauhohe rānei i te hau mā te pāmahana teitei, ka hanga he kiriata totoka ka whakatakotoria ki runga i te mata o te papa. Nā te mea ka whakaitihia e te pēhanga iti te tukinga me te wiri o te hau, ka pai ake te ōritetanga me te kounga o te kiriata. He whānui te whakamahinga o te LPCVD i roto i te hauhā silicon (LTO TEOS), te silicon nitride (Si3N4), te polysilicon (POLY), te karāhe phosphosilicate (BSG), te karāhe borophosphosilicate (BPSG), te polysilicon kua tāpirihia, te graphene, ngā nanotubes waro me ētahi atu kiriata.
Ngā Āhuatanga:
▪ Te pāmahana o te tukanga: i te nuinga o te wā i waenga i te 500~900°C, he teitei te pāmahana o te tukanga;
▪ Te awhe pēhanga hau: te taiao pēhanga iti o te 0.1~10 Torr;
▪ Kounga kiriata: kounga teitei, ōrite pai, matotoru pai, ā, he iti noa ngā hapa;
▪ Te tere o te whakatakotoranga: te tere o te whakatakotoranga puhoi;
▪ Te ōritetanga: he pai mō ngā papa nui, te whakatakotoranga ōrite;
Ngā painga me ngā ngoikoretanga:
▪ Ka taea te whakatakoto i ngā kiriata tino ōrite, tino matotoru hoki;
▪ He pai te mahi i runga i ngā papa rahi, he pai mō te hanga papatipu;
▪ Utu iti;
▪ Te pāmahana teitei, kāore e pai mō ngā rauemi e pāngia ana e te wera;
▪ He puhoi te tere o te whakatakotoranga, ā, he iti noa te putanga.
2. PECVD (CVD Whakarei Ake i te Plasma)
Mātāpono: Whakamahia te parāma hei whakahohe i ngā tauhohenga hau i ngā pāmahana iti iho, hei whakakoi i ngā ngota i roto i te hau tauhohenga, hei whakawehewehe hoki, kātahi ka whakatakoto i ngā kiriata angiangi ki te mata o te papa. Ka taea e te kaha o te parāma te whakaiti i te pāmahana e hiahiatia ana mō te tauhohenga, ā, he whānuitia ngā whakamahinga. Ka taea te whakarite i ngā momo kiriata whakarewa, ngā kiriata kore-waro me ngā kiriata waro.
Ngā Āhuatanga:
▪ Te pāmahana o te tukanga: i waenganui i te 200~400°C te nuinga, he iti noa te pāmahana;
▪ Te awhe pēhanga hau: he rau mTorr ki ētahi Torr te nuinga;
▪ Te kounga o te kiriata: ahakoa he pai te ōritetanga o te kiriata, kāore te kiato me te kounga o te kiriata i te rite te pai ki te LPCVD nā te mea he hapa ka puta mai i te plasma;
▪ Te tere o te whakatakotoranga: te tere teitei, te pai o te whakaputanga;
▪ Te ōritetanga: he iti iho i te LPCVD i runga i ngā papa rahi;
Ngā painga me ngā ngoikoretanga:
▪ Ka taea te whakatakoto i ngā kiriata angiangi ki ngā pāmahana iti iho, he mea e tika ana mō ngā rauemi e pāngia ana e te wera;
▪ Tere te tere o te whakatakoto, he pai mō te whakaputanga whai hua;
▪ He tukanga ngāwari, ka taea te whakahaere i ngā āhuatanga kiriata mā te whakarerekē i ngā tawhā plasma;
▪ Tērā pea ka puta mai ngā hapa kiriata pēnei i ngā kōhao iti, te kore rānei o te ōritetanga i roto i te parāma;
▪ Ki te whakatauritea ki te LPCVD, he kino ake te matotoru me te kounga o te kiriata.
3. HDP-CVD (Te Matū Mate Plasma Kiato Teitei)
Mātāpono: He hangarau PECVD motuhake. Ka taea e te HDP-CVD (e mōhiotia ana ko ICP-CVD) te whakaputa i te kiato me te kounga plasma teitei ake i ngā taputapu PECVD tuku iho i ngā pāmahana whakatakotoranga iti iho. Hei tāpiri, ka whakaratohia e te HDP-CVD te rere katote me te whakahaere pūngao tata motuhake, ka whakapai ake i ngā āheinga whakakī rua, rua rānei mō te whakatakotoranga kiriata uaua, pērā i ngā paninga ārai-whakaata, te whakatakotoranga rauemi iti-pūmau dielectric, me ētahi atu.
Ngā Āhuatanga:
▪ Te pāmahana tukanga: te pāmahana rūma ki te 300℃, he tino iti te pāmahana tukanga;
▪ Te awhe pēhanga hau: i waenga i te 1 me te 100 mTorr, iti iho i te PECVD;
▪ Kounga kiriata: he nui te kiato plasma, he kounga kiriata teitei, he pai te ōritetanga;
▪ Te tere whakatakoto: kei waenganui i te LPCVD me te PECVD te tere whakatakoto, he paku teitei ake i te LPCVD;
▪ Te ōritetanga: nā te mea he nui te kiato o te plasma, he tino pai te ōritetanga o te kiriata, he pai mō ngā mata papa āhua uaua;
Ngā painga me ngā ngoikoretanga:
▪ Ka taea te whakatakoto i ngā kiriata kounga teitei i ngā pāmahana iti iho, he tino pai mō ngā rauemi tairongo wera;
▪ He tino pai te ōritetanga o te kiriata, te matotorutanga me te maeneene o te mata;
▪ Ka whakapai ake te matotoru o te parāoa i te ōritetanga o te whakatakotoranga me ngā āhuatanga kiriata;
▪ Ngā taputapu uaua, me te utu nui ake;
▪ He puhoi te tere o te whakatakotoranga, ā, he iti noa te kino ka puta mai i te kaha plasma teitei ake.
Nau mai haere mai ki te toro mai ki a mātou mō ētahi atu kōrerorero, mai i ngā kiritaki katoa o te ao!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Wā tuku: Hakihea-03-2024