MOCVD Graphite Carrier nwere mkpuchi CVD SiC

Ihe eji ebu MOCVD Graphite nwere mkpuchi CVD SiC

Nkọwa Dị Mkpirikpi:

VET Energy SiC Coated MOCVD Suscepter bụ ngwaahịa dị elu nke e mere iji nye arụmọrụ na-adịgide adịgide ma bụrụ nke a pụrụ ịtụkwasị obi ruo ogologo oge. Ọ nwere ezigbo iguzogide okpomọkụ na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, iguzogide mbuze, na-eme ka ọ bụrụ ihe ngwọta zuru oke maka ngwa nhazi wafer.

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Nkọwa Ngwaahịa

Akara Ngwaahịa

Ihe mkpuchi graphite nke SiC kpuchie bụ isi ihe eji eme ihe n'ọtụtụ usoro mmepụta semiconductor. Anyị na-eji teknụzụ anyị nwere ikike iji mepụta ihe mkpuchi ahụ nke nwere ịdị ọcha dị elu, ịdị mma nke mkpuchi ahụ na ndụ ọrụ dị mma, yana nnukwu iguzogide kemịkalụ na ihe ndị na-eguzogide okpomọkụ.

Atụmatụ nke ngwaahịa anyị:

1. Oke okpomọkụ na-eguzogide oxidation ruo 1700℃.
2. Ịdị ọcha dị elu na ịdị n'otu okpomọkụ
3. Ezigbo nguzogide nchara: acid, alkali, nnu na ihe ndị sitere n'okike.
4. Ike siri ike, elu dị obere, obere ihe.
5. Ndụ ọrụ dị ogologo ma na-adịgide adịgide karịa

CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
性质 / Ihe onwunwe	典型数值 / Uru nkịtị
晶体结构 / Nhazi kristal	FCC β nkebi多晶，主要为（111) 取向
密度 / Njupụta	3.21 g/cm³
硬度 / Ike siri ike	2500 维氏硬度： (ibu 500g)
晶粒大小 / SiZe ọka	2 ~ 10μm
纯度 / Ịdị ọcha nke kemịkalụ	99.99995%
热容 / Ike Okpomọkụ	640 J·kg^-1·K^-1
升华温度 / Okpomọkụ Sublimation	2700℃
抗弯强度 / Ike nke Flexural	415 MPa RT isi ihe anọ
杨氏模量 / Modulu Young	430 GPA 4pt gbagọrọ agbagọ, 1300℃
导热系数 / ThermalNhazigharị	300W·m^-1·K^-1
热膨胀系数 / Mgbasawanye Okpomọkụ (CTE)	4.5 × 10^-6K^-1

VET Energy bụ ezigbo onye na-emepụta ngwaahịa graphite na silicon carbide ahaziri ahazi nke nwere mkpuchi dị iche iche dịka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon iko, mkpuchi carbon pyrolytic, wdg, nwere ike inye akụkụ dị iche iche ahaziri ahazi maka ụlọ ọrụ semiconductor na photovoltaic.

Ndị otu teknụzụ anyị sitere na ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye gị azịza ihe ọkachamara karịa.

Anyị na-emepụta usoro dị elu mgbe niile iji nye ihe ndị ka mma, anyị arụpụtakwala teknụzụ pụrụ iche nke nwere ikike pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi ahụ na ihe mkpuchi ahụ sie ike ma ghara ịdị mfe iwepụ ya.

Nabata gị nke ọma ka ị bịa leta ụlọ ọrụ mmepụta ihe anyị, ka anyị nwee mkparịta ụka ọzọ!