Ka mea lawe kiʻi MOCVD me ka uhi ʻana o CVD SiC

Wehewehe Pōkole:

ʻO VET Energy SiC Coated MOCVD Susceptor kahi huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūlike a hilinaʻi hoʻi i kahi manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ke kūlike wela, ka maʻemaʻe kiʻekiʻe, ke kūpaʻa i ka ʻino, e lilo ia i hopena kūpono no nā noi hana wafer.

 

 


Nā kikoʻī huahana

Nā Lepili Huahana

ʻO ka susceptor graphite i uhi ʻia ʻo SiC kahi ʻāpana koʻikoʻi i hoʻohana ʻia i nā kaʻina hana semiconductor like ʻole. Hoʻohana mākou i kā mākou ʻenehana i hoʻopaʻa ʻia e hana i ka susceptor me ka maʻemaʻe kiʻekiʻe loa, ka like ʻana o ka uhi maikaʻi a me ke ola lawelawe maikaʻi loa, a me ke kūpaʻa kemika kiʻekiʻe a me nā waiwai kūpaʻa wela.

6

Nā hiʻohiʻona o kā mākou huahana:

1. Ke kūpaʻa ʻana i ka oxidation wela kiʻekiʻe a hiki i ka 1700 ℃.
2. Maʻemaʻe kiʻekiʻe a me ke kūlike wela
3. Kū'ē maika'i loa i ka pala: waikawa, alkali, pa'akai a me nā mea hana olaola.

4. Paʻakikī kiʻekiʻe, ʻili paʻa, nā ʻāpana maikaʻi.
5. ʻOi aku ka lōʻihi o ke ola lawelawe a ʻoi aku ka paʻa

CVD SiC薄膜基本物理性能

Nā waiwai kino kumu o CVD SiCuhi ʻana

性质 / Waiwai

典型数值 / Waiwai Maʻamau

晶体结构 / ʻAno Crystal

Pae FCC β多晶,主要为(111)取向

密度 / Ka nui o ka paʻa

3.21 g/cm³

硬度 / Paʻakikī

2500 维氏硬度(500g load)

晶粒大小 / Ka nui o ka palaoa

2~10μm

纯度 / Maʻemaʻe Kemika

99.99995%

热容 / Ka Mana Wela

640 J·kg-1·K-1

升华温度 / Mahana Hoʻohaʻahaʻa

2700℃

抗弯强度 / Ikaika Flexural

415 MPa RT 4-kiko

杨氏模量 / Modulus o Young

430 Gpa 4pt kūlou, 1300 ℃

导热系数 / ThermalKa hoʻokele ʻana

300W·m-1·K-1

热膨胀系数 / Hoʻonui Wela (CTE)

4.5×10-6K-1

1

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ʻO VET Energy ka mea hana maoli o nā huahana graphite a me silicon carbide i hoʻopilikino ʻia me nā uhi like ʻole e like me ka uhi ʻana o SiC, ka uhi ʻana o TaC, ka uhi ʻana o ke kalapona aniani, ka uhi ʻana o ke kalapona pyrolytic, a me nā mea ʻē aʻe, hiki ke hoʻolako i nā ʻāpana like ʻole no ka ʻoihana semiconductor a me ka photovoltaic.

Loaʻa kā mākou hui loea mai nā ʻoihana noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā hoʻonā mea ʻoihana hou aku nāu.

Ke hoʻomau nei mākou i ka hoʻomohala ʻana i nā kaʻina hana holomua e hoʻolako i nā mea holomua hou aʻe, a ua hana i kahi ʻenehana i hoʻopaʻa ʻia, hiki ke hoʻopaʻa i ka pilina ma waena o ka uhi a me ka substrate a emi iki ka maʻalahi o ka hemo ʻana.

Ke hoʻokipa maikaʻi nei iā ʻoe e kipa i kā mākou hale hana, e kūkākūkā hou aku kākou!

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