Imodoka ya MOCVD Graphite ifite CVD SiC Coating

Ishusho ya MOCVD Graphite Carrier ifite CVD SiC Coating

Ibisobanuro bigufi:

VET Energy SiC Coated MOCVD Susceptor ni ibicuruzwa bifite imikorere myiza kandi byizewe byagenewe gutanga imikorere ihoraho kandi yizewe mu gihe kirekire. Bifite ubushobozi bwo kurwanya ubushyuhe n'ubushyuhe bungana, bifite isuku nyinshi, birwanya isuri, bigatuma biba igisubizo cyiza cyo gutunganya wafer.

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Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

Susceptor ya grafiti ikozwe muri SiC ni igice cy'ingenzi gikoreshwa mu bikorwa bitandukanye byo gukora semiconductor. Dukoresha ikoranabuhanga ryacu ryemewe n'amategeko kugira ngo dukore susceptor ifite ubuziranenge buhanitse cyane, ifite ubushobozi bwo gusiga neza kandi ikora neza, ndetse ikaba ifite ubushobozi bwo kudakoresha imiti n'ubushyuhe bwinshi.

Ibiranga ibicuruzwa byacu:

1. Ubudahangarwa ku bushyuhe bwinshi bwo kuzura kugeza kuri 1700°C.
2. Ubuziranenge bwinshi n'ubushyuhe bungana
3. Irwanya ingese neza cyane: aside, alkali, umunyu n'ibikomoka ku bimera.
4. Ubukomere bwinshi, ubuso buto, uduce duto.
5. Igihe kirekire cyo gukora kandi kiramba kurushaho

CVD SiC薄膜基本物理性能 Imiterere y'ibanze ya CVD SiCgusiga
性质 / Umutungo	典型数值 / Agaciro Gasanzwe
晶体结构 / Imiterere ya kristu	Icyiciro cya FCC β多晶，主要为（111 ）取向
密度 / Ubucucike	3.21 g/cm³
硬度 / Ubukomere	2500 维氏硬度（ 500g umutwaro）
晶粒大小 / Ubunini bw'ibinyampeke	2 ~ 10μm
纯度 / Ubuziranenge bw'ibinyabutabire	99.99995%
热容 / Ubushobozi bwo gushyuha	640 J·kg^-1·K^-1
升华温度 / Ubushyuhe bwo gushyuha	2700℃
抗弯强度 / Imbaraga zo Kongera Uburemere	415 MPa RT ifite amanota 4
杨氏模量 / Modulus y'Abana	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalUbushobozi bwo kuyobora	300W·m^-1·K^-1
热膨胀系数 / Kwagura ubushyuhe (CTE)	4.5×10^-6K^-1

VET Energy niyo sosiyete nyayo ikora ibikoresho bya grafiti na silicon carbide byihariye hamwe n’ibirahure bitandukanye nka SiC coating, TaC coating, ikirahure cya karuboni, pyrolytic carbon coating, nibindi, ishobora gutanga ibice bitandukanye byihariye ku nganda za semiconductor na photovoltaic.

Itsinda ryacu rya tekiniki rituruka mu bigo bikomeye by’ubushakashatsi mu gihugu, rishobora kuguha ibisubizo by’ibikoresho by’umwuga.

Dukomeza guteza imbere inzira zigezweho kugira ngo dutange ibikoresho bigezweho, kandi twakoze ikoranabuhanga ryihariye rifite uburenganzira bwo gukora patenti, rishobora gutuma isano iri hagati y’igitambaro n’icyuma gifunga ibintu irushaho gukomera kandi ikagira ingaruka nke ku buryo bitavangwa.

Turaguhaye ikaze mu gusura uruganda rwacu, reka tugire ibiganiro birambuye!