SiC Wafer Cassette and Carrier

SiC Wafer Cassette and Carrier

Silicon carbide wafer cassette is primarily for supporting and transporting the wafers in high-temperature thermal processes of semiconductor wafers such as diffusion, oxidation, and annealing. Its performance directly affects wafer product quality and production efficiency.

The structural designs of silicon carbide wafer boat:
Typically has a slotted or comb-like structure;
Multiple slots for placing and separating wafers;
Designed to consider gas flow distribution, ensuring uniform heating and cooling;
Suitable for vertical furnace and horizontal furnace;
Designed for different sizes such 3inch, 4inch, 6inch, 8inch, 12inch wafers.

VET Energy's silicon carbide wafer boats are crafted using advanced sintering technology and are specifically designed to meet the stringent process carrier requirements of advanced semiconductor manufacturing. Their superior technical advantages are primarily reflected in the following aspects:

1. Ultimate Purity and Ultra-Low Contamination
Using ultra-high-purity raw materials, we ensure the product has an extremely low metal ion content (less than 1 ppm for Na, K, Fe, and Ca). Minimal precipitation at high temperatures effectively prevents wafer contamination, ensuring high chip yield and reliability, making them an ideal choice for those striving for process perfection.
2. Excellent Thermal Performance and Stability
Our SiC wafer boat possess extremely high thermal conductivity and excellent thermal shock resistance. They can withstand rapid temperature fluctuations from room temperature to 1600℃ without cracking or deformation, ensuring process repeatability and consistency, significantly reducing unplanned downtime due to carrier issues.
3.Extraordinary Corrosion Resistance and Mechanical Strength
High hardness and strong wear resistance, along with exceptional resistance to acidic and alkaline environments, far surpasses quartz and graphite. Its exceptional mechanical strength effectively prevents particle generation during frequent automated handling, significantly extending its service life and reducing overall operating costs.
4. Precision Design and Excellent Consistency
Leveraging advanced molding and processing technologies, we ensure that each wafer boat possesses precise geometric dimensions and excellent surface accuracy, ensuring uniform wafer spacing and stable airflow.

The Cleaning and Maintenance of SiC wafer boat:
Requires regular cleaning to remove potential deposits;
Uses specialized cleaning solutions and methods to avoid damage;