ʻO ka paipu umu Silicon Carbide SiC Reactor Tube

ʻO ka paipu umu Silicon Carbide SiC Reactor Tube
ʻO ka carbide silicon maʻemaʻe kiʻekiʻeʻO ka paipu reactor SiChe ʻāpana koʻikoʻi wela kiʻekiʻe i hana ʻia mai ka silicon carbide (SiC) maʻemaʻe loa, i hoʻolālā kūikawā ʻia no nā ʻano hana koi e like me nā semiconductors a me nā photovoltaics. Ke hoʻohana nei i nā pono kūlohelohe o ka silicon carbide (ke kū'ē ʻana i ka wela kiʻekiʻe, ke kū'ē ʻana i ka pala, a me ke alakaʻi wela kiʻekiʻe), ua lilo lākou i mea hoʻopau nui i ka hana holomua, e pani ana i nā paipu quartz a i ʻole nā ​​​​paipu metala.
He loea ʻo VET Energy i ka hoʻolālā a me ka hana ʻana i nā paipu silicon carbide (SiC) no nā noi semiconductor wela kiʻekiʻe a me nā mea ʻino. Me nā pono hana holomua
a me nā ʻenehana CVD ponoʻī a me nā ʻenehana sintering, hāʻawi mākou i nā ʻōmole e hōʻike ana i ke kūpaʻa wela maikaʻi loa, ke kūpaʻa oxidation, a me ke ola lawelawe lōʻihi.

Nā pono o nā paipu SiC a VET Energy:

Maʻemaʻe Loa-Kiʻekiʻe:Hana ʻia me ka hoʻohana ʻana i kahi kaʻina hana sintering kūikawā, ua hoʻemi ʻia nā mea haumia metala ʻino (e like me Na, K, Fe, a me Al) i ka pae ppb.
Ka hoʻokuʻu ʻana i ke kinoea haʻahaʻa loa:Ma lalo o nā wahi wela kiʻekiʻe, kahi vacuum kiʻekiʻe, ʻoi aku ka haʻahaʻa o ka outgassing ma mua o ka quartz, e pale pono ana i ka haumia o ke keʻena hana, e hōʻoiaʻiʻo ana i ka maikaʻi kūloko o nā ʻili lahilahi i waiho ʻia a i ʻole ka ulu ʻana o ke kristal, a hoʻomaikaʻi nui i ka hua huahana (koʻikoʻi loa no ka epitaxy SiC, ka ulu ʻana o GaN, a me ka hana silicon kristal hoʻokahi kiʻekiʻe).
Paʻa o ka Mahana Kiʻekiʻe:Hiki ke ʻoi aku ka mahana hana lōʻihi ma mua o 1600°C (ʻoi aku ma mua o ke kiko palupalu o ka quartz, ma kahi o 1200°C), a hiki i nā mahana pōkole ke kū i nā mahana kiʻekiʻe aʻe (e like me 1800°C), e hoʻokō ana i nā koi mahana kiʻekiʻe loa o nā semiconductors hanauna ʻekolu a me nā kaʻina ulu kristal.
Ke kū'ē'ē i ka palaho kemika:Kūpaʻa loa i nā kinoea ʻino loa e like me HCl, Cl₂, a me HF, a me ka silicon heheʻe a me ka mahu metala, e mālama ana i ka kūpaʻa o ke ʻano a me ka hoʻopau ʻana o ka ʻili i nā lewa paʻakikī e like me CVD, diffusion, oxidation, a me etching, me ke ola e ʻoi aku ana ma mua o nā paipu umu quartz.
Ka Hoʻokele Wela Maikaʻi Loa:ʻOi aku ka nui o kona conductivity thermal ma mua o ka quartz, e hiki ai ke hoʻolaha wikiwiki a ʻoi aku ka like o ka mahana o ka umu a hoʻomaikaʻi i ke ʻano like o ke kaʻina hana a me ka hana hou ʻana. He mea koʻikoʻi loa kēia no ka hana ʻana i nā wahi nui, multi-wafer (e laʻa, nā umu hoʻolaha photovoltaic a me nā reactors MOCVD).
Paʻa Ana:ʻO kona coefficient haʻahaʻa loa o ka hoʻonui ʻana o ka wela e hōʻoiaʻiʻo ana i ka mālama ʻana o ka paipu umu i ke geometry paʻa loa ʻoiai ke kau ʻia nei nā loli wela pinepine a koʻikoʻi, e pale ana i ka hāʻule ʻana o ke sila a i ʻole ka nui o ke koʻikoʻi i hoʻokumu ʻia e ka hoʻonui ʻana a me ka ʻūlū ʻana o ka wela.
Paʻa:ʻO kona paʻakikī kiʻekiʻe a me kona ikaika e hāʻawi i ka ʻōmole umu i nā waiwai mechanical maikaʻi loa, e kūʻē ana i ka deformation a me ka hōʻino.