Silicon Carbide Furnace Tube SiC Reactor Tube

Silicon Carbide Furnace Tube SiC Reactor Tube
High-purity silicon carbide SiC reactor tube is a critical high-temperature component made from ultra-high-purity silicon carbide (SiC), specifically designed for demanding process environments such as semiconductors and photovoltaics. Leveraging the inherent advantages of silicon carbide (high-temperature resistance, corrosion resistance, and high thermal conductivity), they have become a core consumable in advanced manufacturing, replacing traditional quartz or metal tubes.
VET Energy specializes in the design and manufacturing of silicon carbide (SiC) tubes for high-temperature and corrosive semiconductor applications.With advanced production facilities
and proprietary CVD and sintering technologies, we deliver tubes that feature excellent thermal stability, oxidation resistance, and long service life.

Advantages of VET Energy’s SiC tubes:

Ultra-High Purity: Produced using a special sintering process, harmful metal impurities (such as Na, K, Fe, and Al) are reduced to the ppb level.
Extremely Low Outgassing: Under high-temperature, high-vacuum environments, outgassing is far lower than that of quartz, effectively preventing process chamber contamination, ensuring the intrinsic quality of deposited thin films or crystal growth, and significantly improving product yield (especially critical for SiC epitaxy, GaN growth, and high-end single-crystal silicon production).
High-Temperature Stability: Long-term operating temperatures exceeding 1600°C (well above the softening point of quartz, approximately 1200°C) are possible, and short-term temperatures can withstand even higher temperatures (such as 1800°C), meeting the ultra-high-temperature requirements of third-generation semiconductors and crystal growth processes.
Chemical Corrosion Resistance: Highly resistant to highly corrosive gases such as HCl, Cl₂, and HF, as well as molten silicon and metal vapor, maintaining structural integrity and surface finish in complex atmospheres such as CVD, diffusion, oxidation, and etching, with a lifespan far exceeding that of quartz furnace tubes.
Excellent Thermal Conductivity: Its thermal conductivity is dozens of times greater than that of quartz, enabling faster and more uniform furnace temperature distribution and improving process uniformity and repeatability. This is particularly critical for large-area, multi-wafer processing (e.g., photovoltaic diffusion furnaces and MOCVD reactors).
Dimensional Stability: Its extremely low coefficient of thermal expansion ensures the furnace tube maintains highly stable geometry even when subjected to repeated and drastic temperature fluctuations, preventing seal failure or stress concentration caused by thermal expansion and contraction.
Durability: Its high hardness and strength give the furnace tube excellent mechanical properties, making it resistant to deformation and damage.