RTP/RTA SiC Coating Carrier yeMOCVD Epitaxial Growth

Tsananguro pfupi:

VET Energy RTP/RTA SiC Coating Carrier chigadzirwa chine simba guru chakagadzirirwa kupa mashandiro akasimba uye akavimbika kwenguva yakareba. Chine simba rakanaka kwazvo rekudzivirira kupisa uye kufanana kwekupisa, kuchena kwakanyanya, uye chinodzivirira kukukurwa kwevhu, zvichiita kuti ive mhinduro yakakwana yekugadzirisa wafer.

 


  • Nzvimbo Yekwakabva:China
  • Maumbirwo eKristaro:Chikamu cheFCCβ
  • Kuwanda:3.21 g/cm
  • Kuoma:2500 Vickers
  • Saizi yeZviyo:2 ~ 10μm
  • Kuchena Kwemakemikari:99.99995%
  • Kugona Kupisa:640J·kg-1·K-1
  • Kupisa kweSublimation:2700℃
  • Simba reFeleksiyumu:415 Mpa (RT 4-Point)
  • Modulus yeYoung:430 Gpa (4pt yakakombama, 1300℃)
  • Kuwedzera kweThermal (CTE):4.5 10-6K-1
  • Kufambisa kwekupisa:300(W/MK)
  • Ruzivo rweChigadzirwa

    Matagi eChigadzirwa

    SiC Coating Carrier Kune RTP/RTA chinhu chakakosha chinoshandiswa mukugadzira semiconductor inonzi Rapid Thermal Processing & Annealing, tinoshandisa tekinoroji yedu ine patent kugadzira silicon carbide carrier ine kuchena kwakanyanya, kufanana kwakanaka kwecoating uye hupenyu hwakanaka hwebasa, pamwe nekudzivirira makemikari zvakanyanya uye hunhu hwekugadzikana kwekupisa.

    Zvimiro zvezvigadzirwa zvedu:

    1. Kudzivirira kupisa kwakanyanya kusvika 1700℃.
    2. Kuchena kwakanyanya uye kufanana kwekupisa
    3. Kudzivirira ngura kwakanyanya: acid, alkali, munyu uye organic reagents.

    4. Kuoma kwakanyanya, pamusoro pakaoma, zvidimbu zvitete.
    5. Hupenyu hwebasa hwakareba uye hwakasimba

    CVD SiC薄膜基本物理性能

    Hunhu hweCVD SiCkuputira

    性质 / Pfuma

    典型数值 / Kukosha Kwakajairika

    晶体结构 / Chimiro cheKristaro

    Chikamu cheFCC β多晶,主要為(111)取向

    密度 / Kuwanda kwehuwandu

    3.21 g/cm³

    硬度 / Kuomarara

    2500 维氏硬度 (500g mutoro)

    晶粒大小 / Saizi yeZviyo

    2 ~ 10μm

    纯度 / Kuchena kwemakemikari

    99.99995%

    热容 / Kugona Kupisa

    640 J·kg-1·K-1

    升华温度 / Kupisa kweSublimation

    2700℃

    抗弯强度 / Simba reKuchinjika

    415 MPa RT ine mapoinzi mana

    杨氏模量 / Modulus yeVadiki

    430 Gpa 4pt bend, 1300℃

    导热系数 / ThermalKufambisa kwemhepo

    300W·m-1·K-1

    热膨胀系数 / Kuwedzera kweThermal (CTE)

    4.5×10-6K-1

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    VET Energy ndiyo kambani chaiyo inogadzira zvigadzirwa zve graphite ne silicon carbide zvakagadzirwa ne SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, nezvimwewo, inogona kupa zvikamu zvakasiyana-siyana zvakagadzirwa ne semiconductor ne photovoltaic industry.

    Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.

    Tinogara tichigadzira maitiro epamusoro-soro kuti tipe zvinhu zvepamusoro-soro, uye takagadzira tekinoroji yakasarudzika ine patent, iyo inogona kuita kuti kubatana pakati pe coating ne substrate kuve kwakasimba uye kusanyanya kupatsanurwa.

    Tinokugamuchirai neushamwari kuti mushanyire fekitori yedu, ngatikurukurei zvakawanda!

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