Ko te Kawe Paninga SiC mō te RTP/RTA he wāhanga matua e whakamahia ana i roto i ngā tukanga hanga semiconductor e kiia nei ko te Tukatuka Tere Tere me te Whakamahana. Ka whakamahia e mātou tā mātou hangarau patent hei hanga i te kawe silicon carbide me te tino parakore, te ōritetanga paninga pai me te roa o te ora ratonga pai rawa atu, me te ātete matū teitei me ngā āhuatanga pumau wera.
Ngā āhuatanga o ā mātou hua:
1. Ātete waikura pāmahana teitei tae atu ki te 1700℃.
2. Teitei o te parakore me te ōritetanga wera
3. Ātete pai ki te waikura: waikawa, kawakore, tote me ngā matū waro.
4. He pakeke rawa, he mata kiato, he matūriki angiangi.
5. He roa ake te ora ratonga, he pakari ake
| CVD SiC薄膜基本物理性能 Ngā āhuatanga ā-tinana taketake o te CVD SiCpaninga | |
| 性质 / Taonga | 典型数值 / Uara Noa |
| 晶体结构 / Hanganga Karaihe | Wāhanga β FCC多晶，主要为（111）取向 |
| 密度 / Kiato | 3.21 karamu/cm³ |
| 硬度 / Te pakeketanga | 2500 维氏硬度（500g kawenga） |
| 晶粒大小 / Rahi o te Witi | 2~10μm |
| 纯度 / Te Parakore o te Matū | 99.99995% |
| 热容 / Te kaha wera | 640 J·kg-1·K-1 |
| 升华温度 / Te Pāmahana Whakatōtō | 2700℃ |
| 抗弯强度 / Kaha Whakapiko | 415 MPa RT 4-ira |
| 杨氏模量 / Te Tauwehenga o te Young | 430 Gpa 4pt piko, 1300℃ |
| 导热系数 / Te whakamahanalTe kawe i te hiko | 300W·m-1·K-1 |
| 热膨胀系数 / Te Whanuitanga Wera (CTE) | 4.5×10-6K-1 |
Ko VET Energy te kaihanga tūturu o ngā hua karāpeti me te karāpeti silicon kua whakaritea me ngā paninga rerekē pēnei i te paninga SiC, te paninga TaC, te paninga waro karāhe, te paninga waro pyrolytic, me ētahi atu, ka taea te whakarato i ngā wāhanga kua whakaritea mō te umanga haurua-ira me te photovoltaic.
Nō ngā umanga rangahau ā-rohe matua tā mātou tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake māu.
Kei te whakawhanake tonu mātou i ngā tukanga matatau hei whakarato i ngā rauemi matatau ake, ā, kua hangaia e mātou he hangarau motuhake kua patenttia, hei whakakaha ake i te hononga i waenga i te paninga me te papa, ā, hei whakaiti ake i te ngāwari o te wetewete.
Nau mai haere mai ki tō mātou wheketere, kia kōrero anō tātou!
