He aha te tapahi wafer?

A papame haere i roto i ngā huringa e toru kia riro hei maramara haurua-ā-ira tūturu: tuatahi, ka tapahia te poro porotaka kia rite ki ngā papa; i te tukanga tuarua, ka whakairohia ngā transistors ki mua o te papa mā te tukanga o mua; hei whakamutunga, ka mahia te takai, arā, mā te tukanga tapahi, tepapaka huri hei maramara haurua-ā-ira katoa. Ka kitea ko te tukanga tākai kei roto i te tukanga o muri. I roto i tēnei tukanga, ka tapahia te wafer ki roto i ētahi maramara hexahedron takitahi. Ko tēnei tukanga o te whiwhi maramara motuhake ka kiia ko te "Singulation", ā, ko te tukanga o te kani i te papa wafer ki roto i ngā poraka motuhake ka kiia ko te "tapahi wafer (Die Sawing)". Nō nā tata nei, me te whakapainga o te whakaurunga haurua-ā-ira, ka piki ake te matotoru ongā papakua angiangi haere, ā, he nui te uauatanga o tēnei ki te tukanga "takitahi".

Te whanaketanga o te tapahi wafer

Kua whanake haere ngā tukanga o mua me muri mā te taunekeneke i roto i ngā huarahi maha: mā te whanaketanga o ngā tukanga o muri ka taea te whakatau i te hanganga me te tūranga o ngā maramara iti hexahedron kua wehea mai i te mate i runga i tepapa, tae atu ki te hanganga me te tūranga o ngā papa (ngā ara hononga hiko) i runga i te papa; i te ritenga kē, kua hurihia e te whanaketanga o ngā tukanga o mua te tukanga me te tikanga opapate angiangi o muri me te "tapahanga mate" i roto i te tukanga o muri. Nō reira, ka nui te pānga o te āhua matatau o te kete ki te tukanga o muri. Heoi anō, ka rerekē anō hoki te maha, te tukanga me te momo tapahanga i runga anō i te huringa o te āhua o te kete.

Tātaitanga Kaituhi

I ngā rā o mua, ko te "whati" mā te whakamahi i te kaha o waho te tikanga tapahi anake i taea ai te wehewehe i tepapaki roto i ngā mate hexahedron. Heoi, he ngoikoretanga tēnei tikanga, arā, ka pakaru, ka ngatata rānei te taha o te maramara iti. Hei tāpiri, nā te mea kāore i tino tangohia ngā kōhao i runga i te mata whakarewa, he tino taratara hoki te mata kua tapahia.
Hei whakaoti i tēnei raruraru, i puta mai te tikanga tapahi "Scribing", arā, i mua i te "pakaru", ko te mata o tepapaka tapahia kia tata ki te haurua o te hohonutanga. Ko te "Scribing", e ai ki te ingoa, e pā ana ki te whakamahi i te impeller hei kani (tapa haurua) i te taha o mua o te wafer i mua. I ngā rā o mua, ko te nuinga o ngā wafer i raro iho i te 6 inihi i whakamahi i tēnei tikanga tapahi o te "tapa" i waenga i ngā maramara, kātahi ka "whati".

Te Tapatapahi Mata, te Kani Mata rānei

I āta whanake te tikanga tapahi "Scribing" ki te tikanga tapahi "Blade dicing" (te kani rānei), arā, he tikanga tapahi mā te whakamahi i te mata e rua, e toru rānei ngā wā karapīpiti. Ka taea e te tikanga tapahi "Blade" te whakakapi i te āhua o te tihorenga o ngā maramara iti i te wā e "pakaru ana" i muri i te "scribing", ā, ka taea hoki te tiaki i ngā maramara iti i te wā e "takitahi ana". He rerekē te tapahi "Blade" i te tapahi "dicing" o mua, arā, i muri i te tapahi "mata", ehara i te mea "pakaru", engari he tapahi anō mā te mata. Nō reira, ka kiia hoki ko te tikanga "step dicing".

Hei tiaki i te wafer mai i ngā kino o waho i te wā e tapahia ana, ka pania he kiriata ki te wafer i mua i te wā kia haumaru ake ai te "takitahi". I te wā e "hurihia ana ki muri", ka tāpirihia te kiriata ki te mua o te wafer. Engari i te taha ke, i te tapahi "mata", me tāpiri te kiriata ki te tuara o te wafer. I te wā e herea ana te mate eutectic (te herea o te mate, te whakapiri i ngā maramara kua wehea ki te PCB, ki te anga pumau rānei), ka taka aunoa te kiriata e piri ana ki te tuara. Nā te nui o te waku i te wā e tapahia ana, me rehu tonu te wai DI mai i ngā taha katoa. Hei tāpiri, me tāpiri te impeller ki ngā matūriki taimana kia pai ake ai te tapatapahi i ngā poro. I tēnei wā, me ōrite te tapahi (te matotoru o te mata: te whānui o te awaawa) ā, kaua e neke ake i te whānui o te awaawa tapatapahi.
Mō te wā roa, ko te kani te tikanga tapahi tuku iho e whakamahia whānuitia ana. Ko tōna painga nui ko te kaha ki te tapahi i te maha o ngā anga i roto i te wā poto. Heoi, ki te whakanuia te tere whāngai o te poro, ka piki ake te tūponotanga o te kiri o te mata maramara. Nō reira, me whakahaere te maha o ngā hurihanga o te impeller i te 30,000 ngā wā ia meneti. Ka kitea ko te hangarau o te tukanga semiconductor he mea ngaro e kohia haeretia ana i roto i te wā roa o te kohikohi me te whakamātautau me te hapa (i te wāhanga e whai ake nei mō te hononga eutectic, ka matapakihia e mātou ngā ihirangi mō te tapahi me te DAF).

Te tapahi i mua i te huri (DBG): kua whakarerekētia te tikanga e te raupapa tapahi

Ina tapahia he mata o te whata he 8 inihi te whānui, kāore he take e manukanuka ai kei pakaru, kei pakaru rānei te taha o te maramara. Engari i te pikinga o te whānui o te whata ki te 21 inihi, ā, ka tino angiangi te matotoru, ka tīmata anō te puta mai o ngā āhuatanga pakaru me te pakaru. Hei whakaiti i te pānga ā-tinana ki te whata i te wā o te tapahi, ka whakakapia te raupapa tapahi tuku iho e te tikanga DBG o te "tapa i mua i te huri". He rerekē ki te tikanga tapahi "mata" tuku iho e tapahi tonu ana, ka mahi tuatahi a DBG i te tapahi "mata", kātahi ka whakangawari haere i te matotoru o te whata mā te whakangawari tonu i te taha o muri kia pakaru rā anō te maramara. Ka taea te kī ko te DBG he putanga whakapai ake o te tikanga tapahi "mata" o mua. Nā te mea ka taea e ia te whakaiti i te pānga o te tapahi tuarua, kua tere te rongonui o te tikanga DBG i roto i te "takai taumata-whata".

Tapatapa Taiaho

Ko te tukanga mōkihi tauine maramara taumata-wafer (WLCSP) e whakamahi ana i te tapahi taiaho. Ka taea e te tapahi taiaho te whakaiti i ngā āhuatanga pēnei i te tihore me te pakaru, ā, ka whiwhi maramara kounga pai ake, engari ina neke atu i te 100μm te matotoru o te wafer, ka tino heke te hua. Nō reira, ko te nuinga o te wā e whakamahia ana ki ngā wafer he iti iho i te 100μm te matotoru (he angiangi). Ka tapahia e te tapahi taiaho te silicon mā te whakamahi i te taiaho kaha-teitei ki te awaawa o te wafer. Heoi, i te whakamahi i te tikanga tapahi taiaho tikanga (Taiaho Tikanga), me pania he kiriata tiaki ki te mata o te wafer i mua. Nā te mea ko te whakamahana, te whakamātao rānei i te mata o te wafer ki te taiaho, ka puta he awaawa i runga i te mata o te wafer i ēnei hononga ā-tinana, ā, ka piri hoki ngā kongakonga silicon kua tapahia ki te mata. Ka kitea ko te tikanga tapahi taiaho tuku iho ka tapahia tika te mata o te wafer, ā, i tēnei āhuatanga, he rite ki te tikanga tapahi "mata".

Ko te Tapahi Huna (SD) he tikanga tapahi tuatahi i te taha o roto o te wafer ki te kaha reera, kātahi ka pēhia te rīpene e piri ana ki te tuara hei wawahi, ka wehea te maramara. Ina pēhia te rīpene i te tuara, ka ara ake tonu te wafer ki runga nā te totoro o te rīpene, ka wehea te maramara. Ko ngā painga o te SD i runga i te tikanga tapahi reera tuku iho: tuatahi, kāore he para silicon; tuarua, he whaiti te kerf (Kerf: te whānui o te awaawa kaituhi), nō reira ka taea te whiwhi i ētahi atu maramara. Hei tāpiri, ka tino whakaitihia te āhuatanga o te tihore me te pakaru mā te whakamahi i te tikanga SD, he mea nui ki te kounga whānui o te tapahi. Nō reira, ko te tikanga SD te mea tino rongonui i te heke mai.

Te Tapatapahi Plasma
Ko te tapahi plasma he hangarau hou kua whakawhanakehia e whakamahi ana i te whakairo plasma hei tapahi i te wā o te tukanga hanga (Fab). Ka whakamahia e te tapahi plasma ngā rauemi hau-haurua hei utu mō ngā wai, nō reira he iti noa te pānga ki te taiao. Ā, ka whakamahia te tikanga tapahi i te wafer katoa i te wā kotahi, nō reira he tere noa te tere "tapahi". Heoi, ka whakamahia e te tikanga plasma te hau tauhohenga matū hei rauemi mata, ā, he tino uaua te tukanga whakairo, nō reira he uaua te rere o tana tukanga. Engari ki te whakataurite ki te tapahi "mata" me te tapahi laser, kāore te tapahi plasma e kino ki te mata o te wafer, ā, ka whakaitihia te tere hapa, ka nui ake ngā maramara ka puta.

Nō nā tata nei, mai i te mea kua whakaitihia te matotoru o te anga ki te 30μm, ā, he nui te parahi (Cu) me ngā rauemi iti-whakapūmau hiko (Low-k) e whakamahia ana. Nō reira, hei ārai i ngā pūwero (Burr), ka pai ake hoki ngā tikanga tapahi plasma. Ko te tikanga, kei te whanake tonu te hangarau tapahi plasma. Ki taku whakaaro, ā tōna wā, kāore he take ki te mau i tētahi kopare motuhake i te wā e keri ana, nā te mea koinei te huarahi whanaketanga nui o te tapahi plasma.

I te mea kua whakaitihia tonutia te matotoru o ngā papa angiangi mai i te 100μm ki te 50μm, kātahi ki te 30μm, kua rerekē haere, kua whanake haere hoki ngā tikanga tapahi mō te whiwhi maramara motuhake mai i te tapahi "pakaru" me te "mata" ki te tapahi laser me te tapahi plasma. Ahakoa kua piki ake te utu whakaputa o te tukanga tapahi e ngā tikanga tapahi kua tino pakari haere, i tētahi atu taha, mā te whakaiti nui i ngā āhuatanga kāore e hiahiatia ana pērā i te tihore me te pakaru e puta pinepine ana i roto i te tapahi maramara haurua-ira me te whakanui ake i te maha o ngā maramara e whiwhihia ana mō ia papa angiangi, kua whakaatu te utu whakaputa o te maramara kotahi i te hekenga. Ko te tikanga, ko te pikinga o te maha o ngā maramara e whiwhihia ana mō ia wāhi o te papa angiangi e pā tata ana ki te whakaiti i te whānui o te tiriti tapahi. Mā te whakamahi i te tapahi plasma, tata ki te 20% te nui ake o ngā maramara ka taea te whiwhi i te whakataurite ki te whakamahi i te tikanga tapahi "mata", he take nui hoki tēnei e whiriwhiri ai te tangata i te tapahi plasma. I te whanaketanga me ngā huringa o ngā papa angiangi, te āhua o ngā maramara me ngā tikanga takai, kei te puta ake hoki ngā momo tukanga tapahi pērā i te hangarau tukatuka papa angiangi me te DBG.